JP2009506323A5 - - Google Patents

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Publication number
JP2009506323A5
JP2009506323A5 JP2008528091A JP2008528091A JP2009506323A5 JP 2009506323 A5 JP2009506323 A5 JP 2009506323A5 JP 2008528091 A JP2008528091 A JP 2008528091A JP 2008528091 A JP2008528091 A JP 2008528091A JP 2009506323 A5 JP2009506323 A5 JP 2009506323A5
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JP
Japan
Prior art keywords
substrate
cavity
cap
bottom substrate
pressure sensor
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JP2008528091A
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English (en)
Japanese (ja)
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JP2009506323A (ja
JP5342236B2 (ja
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Priority claimed from US11/210,309 external-priority patent/US7622782B2/en
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Publication of JP2009506323A publication Critical patent/JP2009506323A/ja
Publication of JP2009506323A5 publication Critical patent/JP2009506323A5/ja
Application granted granted Critical
Publication of JP5342236B2 publication Critical patent/JP5342236B2/ja
Expired - Fee Related legal-status Critical Current
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JP2008528091A 2005-08-24 2006-08-22 圧力センサ及び製造方法 Expired - Fee Related JP5342236B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/210,309 US7622782B2 (en) 2005-08-24 2005-08-24 Pressure sensors and methods of making the same
US11/210,309 2005-08-24
PCT/US2006/032858 WO2007024911A2 (en) 2005-08-24 2006-08-22 Pressure sensors and methods of making the same

Publications (3)

Publication Number Publication Date
JP2009506323A JP2009506323A (ja) 2009-02-12
JP2009506323A5 true JP2009506323A5 (enExample) 2009-10-08
JP5342236B2 JP5342236B2 (ja) 2013-11-13

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Family Applications (1)

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JP2008528091A Expired - Fee Related JP5342236B2 (ja) 2005-08-24 2006-08-22 圧力センサ及び製造方法

Country Status (7)

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US (1) US7622782B2 (enExample)
EP (1) EP1920229B1 (enExample)
JP (1) JP5342236B2 (enExample)
KR (1) KR101296031B1 (enExample)
CN (1) CN101248340B (enExample)
AT (1) ATE532044T1 (enExample)
WO (1) WO2007024911A2 (enExample)

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CN109682510B (zh) * 2018-12-07 2021-05-04 中国电子科技集团公司第十三研究所 GaN高温压力传感器
CN109668661B (zh) * 2018-12-07 2021-05-04 中国电子科技集团公司第十三研究所 GaN高温压力传感器
CN111337166A (zh) * 2020-03-25 2020-06-26 电子科技大学 一种新型绝对压声表面波压力传感器的制备方法
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