JP2009302501A - 相互接続構造体およびその形成方法(エレクトロマイグレーション耐性強化のための相互接続構造体) - Google Patents
相互接続構造体およびその形成方法(エレクトロマイグレーション耐性強化のための相互接続構造体) Download PDFInfo
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Abstract
【解決手段】 多層ライナは、誘電体材料のパターン付けされた表面から外側に、拡散障壁、マルチ材料層、及び金属含有ハード・マスクを含む。マルチ材料層は、下層の誘電体キャッピング層からの残留物からなる第1材料層と、下層の金属キャッピング層からの残留物からなる第2材料層とを含む。本発明はまた、誘電体材料内に形成されたビア開口の下部分内に多層ライナを含む相互接続構造体を形成する方法を提供する。
【選択図】 図13
Description
内部に埋設された少なくとも1つの導電性構造部を有する第1誘電体材料を含む下部相互接続レベルであって、前記の少なくとも1つの導電性構造部は内部に配置されたビア・ガウジング(くりぬき)構造部を有する、下部相互接続レベルと、
少なくとも1つの導電性構造部の全てではなく一部分の上に配置された、パターン付けされた金属キャッピング層と、
パターン付けされた金属キャッピング層及び第1誘電体材料の部分の上に配置されたパターン付けされた誘電体キャッピング層と、
下層の導電性充填ビアの上に配置され、かつそれに接続された少なくとも1つの導電性充填ラインを有する第2誘電体材料を含む上部相互接続レベルと
を含み、
ここで、パターン付けされた誘電体キャッピング層に近接して配置された導電性充填ビアの下部分は、第2誘電体材料のパターン付けされた表面から外側に、拡散障壁、マルチ材料層、及び金属含有ハード・マスクを含む多層ライナを含み、マルチ材料層は、パターン付けされた誘電体キャッピング層からの残留物からなる第1材料層と、パターン付けされた金属キャッピング層からの残留物からなる第2材料層とを含む。
内部に埋設された少なくとも1つの導電性構造部を有する第1誘電体材料と、少なくとも1つの導電性構造部の表面上に配置された金属キャッピング層と、金属キャッピング層及び第1誘電体材料の部分の表面上に配置された誘電体キャッピング層と、誘電体キャッピング層の表面上に配置された第2誘電体材料と、誘電体キャッピング層の表面上に配置されたハード・マスクとを含む構造体を準備するステップと、
ハード・マスク及び第2誘電体材料を貫通して、誘電体キャッピング層の表面上で停止する少なくとも1つのビア開口を形成するステップと、
少なくとも1つのビア開口内かつ第2誘電体材料の側壁上に、及び誘電体キャッピング層の露出された面上に配置される拡散障壁を形成するステップと、
拡散障壁、誘電体キャッピング層、及び金属キャッピング層の部分を除去することによって、第1誘電体材料内に埋設された少なくとも1つの導電性構造部内にビア・ガウジング構造部を形成するステップであって、該ステップ中に前記の少なくとも1つのビア開口の底部にマルチ材料層が形成され、マルチ材料層は誘電体キャッピング層からの残留物からなる第1材料層と、金属キャッピング層からの残留物からなる第2材料層とを含む、ステップと、
少なくとも1つのビア開口内に金属含有ハード・マスクを形成するステップと、
少なくとも1つのビア開口の上に配置されて接触する少なくとも1つのライン開口を形成するステップと、
少なくとも1つのライン開口及び少なくとも1つのビア開口の内部に別の拡散障壁を形成するステップと、
ビア・ガウジング構造部、少なくとも1つのビア開口及び少なくとも1つのライン開口の内部に、第2誘電体材料の上面と同一平面となる上面を有する相互接続導電性材料を形成するステップと
を含む。
本発明の好ましい実施形態においては、第1材料層82Aは少なくともシリコン及び窒素原子を含む。本発明の別の好ましい実施形態においては、第2材料層82Bは少なくともCo、Ir及びRu原子を含む。
12:誘電体キャップ
14:ボイド
50:初期構造体
52:第1相互接続レベル
54:第1誘電体材料
56:第1拡散障壁
58:導電性構造部
60:金属キャッピング層
64:誘電体キャッピング層
66:第2相互接続レベル
68:第2誘電体材料
68’、68”:損傷側壁
70:ハード・マスク
72:ビア開口
72A:ビア開口の下部分
78:第2拡散障壁
80:ビア・ガウジング構造部
82:マルチ材料層
82A:第1材料層
82B:第2材料層
84:金属含有ハード・マスク
86、86’:ライン開口
88:第3拡散障壁
90:相互接続導電性材料
Claims (20)
- 内部に埋設された少なくとも1つの導電性構造部を有する第1誘電体材料を含む第1相互接続レベルであって、前記少なくとも1つの導電性構造部は内部に配置されたビア・ガウジング構造部を有する、第1相互接続レベルと、
前記少なくとも1つの導電性構造部の全てではなく幾らかの部分の上に配置された、パターン付けされた金属キャッピング層と、
前記パターン付けされた金属キャッピング層及び前記第1誘電体材料の部分の上に配置されたパターン付けされた誘電体キャッピング層と、
下層の導電性充填ビアの上に配置され、かつ接続された少なくとも1つの導電性充填ラインを有する第2誘電体材料を含む上層の相互接続レベルと
を備え、
前記パターン付けされた誘電体キャッピング層の近傍に配置された前記導電性充填ビアの下部分は、前記第2誘電体材料のパターン付けされた表面から外側に、拡散障壁、マルチ材料層及び金属含有ハード・マスクを含む多層ライナを有し、
前記マルチ材料層は、前記パターン付けされた誘電体キャッピング層からの残留物からなる第1材料層と、前記パターン付けされた金属キャッピング層からの残留物からなる第2材料層とを含む、
相互接続構造体。 - 前記第1及び第2誘電体材料は、4.0又はそれ以下の誘電率を有する同じ又は異なる低k誘電体を含む、請求項1に記載の相互接続構造体。
- 前記第1及び第2誘電体材料は、2.8又はそれ以下の誘電率を有する同じ又は異なる多孔質低k誘電体を含む、請求項1に記載の相互接続構造体。
- 前記第1及び第2誘電体材料は、同じ又は異なるものであり、SiO2、シルセスキオキサン、Si、C、O及びH原子を含むCドープ酸化物、並びに、熱硬化性ポリアリーレンエーテルのうちの少なくとも1つを含む、請求項1に記載の相互接続構造体。
- 前記パターン付けされた誘電体キャッピング層は、SiC、Si4NH3、SiO2、炭素ドープ酸化物、並びに、窒素及び水素ドープ炭化シリコンSiC(N,H)のうちの1つを含む、請求項1に記載の相互接続構造体。
- 前記パターン付けされた金属キャッピング層は、純粋状態のCo、Ir及びRu、又は、それらとW、B、P、Mo及びReのうちの少なくとも1つとの合金、のうちの1つを含む、請求項1に記載の相互接続構造体。
- 前記パターン付けされた金属キャッピング層はCo含有物である、請求項6に記載の相互接続構造体。
- 前記導電性充填ライン、前記導電性充填ビア及び前記ビア・ガウジング構造部は、同じ相互接続導電性材料で充填される、請求項1に記載の相互接続構造体。
- 前記相互接続導電性材料はCu又はCu含有合金からなる、請求項8に記載の相互接続構造体。
- 前記第1材料層はシリコン及び窒素原子を含む、請求項1に記載の相互接続構造体。
- 前記第2材料層はCo、Ir及びRuのうちの1つの原子を含む、請求項1に記載の相互接続構造体。
- 前記金属含有ハード・マスクはRu、Ta及びTiのうちの1つを含む、請求項1に記載の相互接続構造体。
- 相互接続構造体の形成方法であって、
内部に埋設された少なくとも1つの導電性構造部を有する第1誘電体材料と、前記少なくとも1つの導電性構造部の表面上に配置された金属キャッピング層と、前記金属キャッピング層及び前記第1誘電体材料の部分の表面上に配置された誘電体キャッピング層と、前記誘電体キャッピング層の表面上に配置された第2誘電体材料と、前記誘電体キャッピング層の表面上に配置されたハード・マスクとを含む構造体を準備するステップと、
前記ハード・マスク及び前記第2誘電体材料を貫通して前記誘電体キャッピング層の表面上で停止する少なくとも1つのビア開口を形成するステップと、
前記少なくとも1つのビア開口の内部で、かつ前記第2誘電体材料の側壁上及び前記誘電体キャッピング層の露出された面上、に配置された拡散障壁を形成するステップと、
前記拡散障壁、前記誘電体キャッピング層及び前記金属キャッピング層の部分を除去することによって、前記第1誘電体材料内に埋設された前記少なくとも1つの導電性構造部の中にビア・ガウジング構造部を形成するステップであって、該ステップ中に前記少なくとも1つのビア開口の底部に、前記誘電体キャッピング層からの残留物からなる第1材料層と、前記金属キャッピング層からの残留物からなる第2材料層とを含むマルチ材料層が形成される、ステップと、
前記少なくとも1つのビア開口内に金属含有ハード・マスクを形成するステップと、
前記少なくとも1つのビア開口の上に配置され、かつそれに接触する少なくとも1つのライン開口を形成するステップと、
前記少なくとも1つのライン開口及び前記少なくとも1つのビア開口の内部に別の拡散障壁を形成するステップと、
前記ビア・ガウジング構造部、前記少なくとも1つのビア開口及び前記少なくとも1つのライン開口の内部に、前記第2誘電体材料の上面と同一平面となる上面を有する相互接続導電性材料を形成するステップと、
を含む方法。 - 前記少なくとも1つのビア・ガウジング構造部は、気体スパッタリング・プロセスによって形成される、請求項13に記載の方法。
- 前記気体スパッタリング・プロセスは、Ar、He、Xe、N2、H2、NH3及びN2H2のうちの1つを含む、請求項14に記載の方法。
- 前記金属含有ハード・マスクは、Ru、Ta、W及びTiのうちの1つを含む、請求項13に記載の方法。
- 前記少なくとも1つのビア開口を形成した後、前記第2誘電体材料の側壁が損傷され、前記損傷側壁は、希釈フッ化水素酸の使用を含むクリーニング・ステップによって除去される、請求項13に記載の方法。
- 前記少なくとも1つのライン開口を形成した後、前記第2誘電体材料の側壁が損傷され、前記損傷側壁は、希釈フッ化水素酸の使用を含むクリーニング・ステップによって除去される、請求項13に記載の方法。
- 前記第1材料層はシリコン及び窒素原子を含む、請求項13に記載の方法。
- 前記第2材料層はCo、Ir及びRuのうちの1つの原子を含む、請求項13に記載の方法。
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CN101609829A (zh) | 2009-12-23 |
ATE525748T1 (de) | 2011-10-15 |
EP2139037A1 (en) | 2009-12-30 |
US20090309226A1 (en) | 2009-12-17 |
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US8354751B2 (en) | 2013-01-15 |
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