JP2009218788A5 - - Google Patents
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- Publication number
- JP2009218788A5 JP2009218788A5 JP2008059479A JP2008059479A JP2009218788A5 JP 2009218788 A5 JP2009218788 A5 JP 2009218788A5 JP 2008059479 A JP2008059479 A JP 2008059479A JP 2008059479 A JP2008059479 A JP 2008059479A JP 2009218788 A5 JP2009218788 A5 JP 2009218788A5
- Authority
- JP
- Japan
- Prior art keywords
- resin film
- semiconductor substrate
- piezoelectric oscillator
- vibrator
- conductive portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008059479A JP5151569B2 (ja) | 2008-03-10 | 2008-03-10 | 圧電発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008059479A JP5151569B2 (ja) | 2008-03-10 | 2008-03-10 | 圧電発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009218788A JP2009218788A (ja) | 2009-09-24 |
| JP2009218788A5 true JP2009218788A5 (enExample) | 2011-04-28 |
| JP5151569B2 JP5151569B2 (ja) | 2013-02-27 |
Family
ID=41190242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008059479A Expired - Fee Related JP5151569B2 (ja) | 2008-03-10 | 2008-03-10 | 圧電発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5151569B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6888606B2 (ja) * | 2018-12-21 | 2021-06-16 | 株式会社村田製作所 | 高周波モジュール |
| JP7287116B2 (ja) * | 2019-05-30 | 2023-06-06 | セイコーエプソン株式会社 | 振動デバイスおよび電子機器 |
| JP2023138014A (ja) * | 2022-03-18 | 2023-09-29 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器および圧電振動片の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4479413B2 (ja) * | 2004-08-17 | 2010-06-09 | セイコーエプソン株式会社 | 圧電発振器 |
| JP2006109400A (ja) * | 2004-09-13 | 2006-04-20 | Seiko Epson Corp | 電子部品、回路基板、電子機器、電子部品の製造方法 |
| JP4600663B2 (ja) * | 2004-12-07 | 2010-12-15 | セイコーエプソン株式会社 | 温度補償型圧電発振器 |
| JP2008021792A (ja) * | 2006-07-12 | 2008-01-31 | Seiko Epson Corp | デバイスとその製造方法並びに電子機器 |
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2008
- 2008-03-10 JP JP2008059479A patent/JP5151569B2/ja not_active Expired - Fee Related