JP2009206216A - 発光装置 - Google Patents
発光装置 Download PDFInfo
- Publication number
- JP2009206216A JP2009206216A JP2008045286A JP2008045286A JP2009206216A JP 2009206216 A JP2009206216 A JP 2009206216A JP 2008045286 A JP2008045286 A JP 2008045286A JP 2008045286 A JP2008045286 A JP 2008045286A JP 2009206216 A JP2009206216 A JP 2009206216A
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- JP
- Japan
- Prior art keywords
- metal layer
- substrate
- light
- light emitting
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
Abstract
【解決手段】実装基板2は、ベース基板20と中間層基板(枠基板)30とを備える。ベース基板20は、シリコン基板20aの一表面側に発光素子1よりも大きな平面サイズであり中央部に発光素子1がろう材により接合されるマウント用金属層25a1および中間層基板30との接合用金属層29が形成されるとともに、マウント用金属層25a1の投影領域の全域に複数のサーマルビア26が形成されてなり、シリコン基板20aの上記一表面側にマウント用金属層25a1と接合用金属層29とを電気的に接続し且つ熱結合する連絡金属層25cと、上記ろう材が接合用金属層29に濡れ広がるのを防止する濡れ広がり抑制部21とが形成されている。
【選択図】 図1
Description
以下、本実施形態の発光装置について図1および図2に基づいて説明する。
本実施形態の発光装置の基本構成は実施形態1と略同じであり、図4に示すようにベース基板20における濡れ広がり抑制部21の形状が相違するだけで他の構成は実施形態1と同じなので、図示および説明を省略する。なお、実施形態1と同様の構成要素には同一の符号を付して説明を省略する。
2 実装基板
2a 収納凹所
4 光検出素子
13 接合材料層
20 ベース基板
20a シリコン基板(第1の半導体基板)
21 濡れ広がり抑制部
21a 短線
23 絶縁膜(シリコン酸化膜)
24 貫通孔配線
25a1 マウント用金属層
25a2 結線用金属層
25b 接続用金属層
29 接合用金属層
30 中間層基板(枠基板)
30a シリコン基板(第2の半導体基板)
31 開口窓
36 接合用金属層
40 光検出素子形成基板
Claims (3)
- 発光素子と、発光素子を収納する収納凹所が一表面に形成された実装基板とを備えた発光装置であって、実装基板は、第1の半導体基板を用いて形成されてなり発光素子が一表面側に実装されたベース基板と、第2の半導体基板を用いて形成されてなりベース基板の前記一表面側において発光素子を囲む形でベース基板に接合された枠基板とを備え、ベース基板は、第1の半導体基板の前記一表面側に発光素子よりも大きな平面サイズであり中央部に発光素子がろう材により接合されるマウント用金属層および枠基板との接合用金属層が形成されるとともに、マウント用金属層の投影領域における発光素子と重なる領域と重ならない領域との両方に第1の半導体基板の厚み方向に貫通するサーマルビアが形成されてなり、第1の半導体基板の前記一表面側にマウント用金属層と接合用金属層とを電気的に接続し且つ熱結合する連絡金属層と、前記ろう材が接合用金属層に濡れ広がるのを防止する濡れ広がり抑制部とが形成されてなることを特徴とする発光装置。
- 前記ベース基板は、平面視において前記ぬれ広がり抑制部が前記発光素子を取り囲む破線の枠状に形成されてなり、当該破線の隣り合う短線間に前記連絡金属層の一部が形成されてなることを特徴とする請求項1記載の発光装置。
- 前記ベース基板は、前記濡れ広がり抑制部の表面が、前記第1の半導体基板の前記一表面上に形成され前記マウント用金属層、前記接合用金属層および前記連絡金属層の下地となるシリコン酸化膜の露出部位からなることを特徴とする請求項1または請求項2記載の発光装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008045286A JP5192847B2 (ja) | 2008-02-26 | 2008-02-26 | 発光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008045286A JP5192847B2 (ja) | 2008-02-26 | 2008-02-26 | 発光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009206216A true JP2009206216A (ja) | 2009-09-10 |
JP5192847B2 JP5192847B2 (ja) | 2013-05-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008045286A Expired - Fee Related JP5192847B2 (ja) | 2008-02-26 | 2008-02-26 | 発光装置 |
Country Status (1)
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JP (1) | JP5192847B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4778107B1 (ja) * | 2010-10-19 | 2011-09-21 | 有限会社ナプラ | 発光デバイス、及び、その製造方法 |
WO2012087915A1 (en) * | 2010-12-22 | 2012-06-28 | Cree, Inc. | Electronic device submounts including substrates with thermally conductive vias |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61164076U (ja) * | 1986-03-20 | 1986-10-11 | ||
JPH06174943A (ja) * | 1992-12-04 | 1994-06-24 | Toshiba Corp | 光ファイバ装着体 |
JP2001284478A (ja) * | 2000-03-31 | 2001-10-12 | Toshiba Corp | マイクロ波回路装置 |
JP2006128512A (ja) * | 2004-10-29 | 2006-05-18 | Ngk Spark Plug Co Ltd | 発光素子用セラミック基板 |
JP2008034748A (ja) * | 2006-07-31 | 2008-02-14 | Matsushita Electric Works Ltd | 発光装置 |
-
2008
- 2008-02-26 JP JP2008045286A patent/JP5192847B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61164076U (ja) * | 1986-03-20 | 1986-10-11 | ||
JPH06174943A (ja) * | 1992-12-04 | 1994-06-24 | Toshiba Corp | 光ファイバ装着体 |
JP2001284478A (ja) * | 2000-03-31 | 2001-10-12 | Toshiba Corp | マイクロ波回路装置 |
JP2006128512A (ja) * | 2004-10-29 | 2006-05-18 | Ngk Spark Plug Co Ltd | 発光素子用セラミック基板 |
JP2008034748A (ja) * | 2006-07-31 | 2008-02-14 | Matsushita Electric Works Ltd | 発光装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4778107B1 (ja) * | 2010-10-19 | 2011-09-21 | 有限会社ナプラ | 発光デバイス、及び、その製造方法 |
JP2012089646A (ja) * | 2010-10-19 | 2012-05-10 | Napura:Kk | 発光デバイス、及び、その製造方法 |
US8766312B2 (en) | 2010-10-19 | 2014-07-01 | Napra Co., Ltd. | Light-emitting device comprising vertical conductors and through electrodes and method for manufacturing the same |
WO2012087915A1 (en) * | 2010-12-22 | 2012-06-28 | Cree, Inc. | Electronic device submounts including substrates with thermally conductive vias |
CN103329265A (zh) * | 2010-12-22 | 2013-09-25 | 克里公司 | 包括具有导热通路的基片的电子器件次粘着基台 |
US8772817B2 (en) | 2010-12-22 | 2014-07-08 | Cree, Inc. | Electronic device submounts including substrates with thermally conductive vias |
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JP5192847B2 (ja) | 2013-05-08 |
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