JP2009194366A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims description 50
- 230000001939 inductive effect Effects 0.000 claims abstract description 138
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 29
- 230000006698 induction Effects 0.000 claims description 17
- 230000007935 neutral effect Effects 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 abstract description 28
- 230000009977 dual effect Effects 0.000 abstract description 7
- 238000009413 insulation Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 190
- 238000009792 diffusion process Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 208000033999 Device damage Diseases 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823871—Complementary field-effect transistors, e.g. CMOS interconnection or wiring or contact manufacturing related aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
Abstract
【解決手段】基板100にNFET101、PFET103、及び配線102を形成し、全面に伸張応力誘起層105を形成し、NFET101上に伸張応力誘起層105が残るようにエッチングし、全面に圧縮応力誘起層301を形成し、PFET103上及び配線上102の圧縮応力誘起層301の厚さを部分的に減少させ、全面に絶縁膜502を形成し、絶縁膜502、伸張応力誘起層105、及び圧縮応力誘起層301をエッチングして、NFET101、PFET103、及び配線102に通じる開口部501を形成する。
【選択図】 図5
Description
Claims (5)
- 半導体基板に第1チャネル型の第1のFET、第2チャネル型の第2のFET、及び第1、第2のFETの相互間に位置する配線を形成し、
全面に第1の応力誘起層を形成し、
前記第1のFET上に前記第1の応力誘起層が残るように前記第1の応力誘起層を選択的に除去し、
全面に第2の応力誘起層を形成し、
前記第1のFET上及びこれに隣接する前記配線上の前記第2の応力誘起層の厚さを部分的に減少させ、
全面に絶縁膜を形成し、
前記絶縁膜、前記第1の応力誘起層、及び前記第2の応力誘起層を選択的に除去して、前記第1のFET、第2のFET、及び配線のそれぞれに通じる開口部を形成する
ことを特徴とする半導体装置の製造方法。 - 半導体基板に第1チャネル型の第1のFET、第2チャネル型の第2のFET、及び第1、第2のFETの相互間に位置する配線を形成し、
全面に第1の応力誘起層を形成し、
前記第1のFET上に前記第1の応力誘起層が残るように前記第1の応力誘起層を選択的に除去し、
全面に第2の応力誘起層を形成し、
前記第2のFET上に前記第2の応力誘起層が残るように前記第2の応力誘起層を選択的に除去し、
全面に中性応力層を形成し、
全面に絶縁膜を形成し、
前記絶縁膜、前記中性応力層、及び第1の応力誘起層又は前記第2の応力誘起層を選択的に除去して、前記第1のFET、第2のFET、及び配線のそれぞれに通じる開口部を形成する
ことを特徴とする半導体装置の製造方法。 - 前記第1チャネル型の第1のFETがNチャネル型のFETであり、前記第2チャネル型の第2のFETがPチャネル型のFETであり、前記第1の応力誘起層がNチャネル型のFETに伸張応力を与える伸張応力誘起層であり、前記第2の応力誘起層がPチャネル型のFETに圧縮応力を与える圧縮応力誘起層であることを特徴とする請求項1又は2記載の半導体装置の製造方法。
- 前記第1及び第2の応力誘起層がシリコン窒化層であることを特徴とする請求項1又は2記載の半導体装置の製造方法。
- 前記中性応力層は、前記第1及び第2の応力誘起層の厚さの半分以下の厚さで形成されることを特徴とする請求項2記載の半導体装置の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/031,272 US7727834B2 (en) | 2008-02-14 | 2008-02-14 | Contact configuration and method in dual-stress liner semiconductor device |
US12/031,272 | 2008-02-14 |
Publications (2)
Publication Number | Publication Date |
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JP2009194366A true JP2009194366A (ja) | 2009-08-27 |
JP5253982B2 JP5253982B2 (ja) | 2013-07-31 |
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JP (1) | JP5253982B2 (ja) |
Cited By (16)
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JP2010021325A (ja) * | 2008-07-10 | 2010-01-28 | Fujitsu Microelectronics Ltd | 半導体装置の製造方法、及び半導体装置 |
JP2012248722A (ja) * | 2011-05-30 | 2012-12-13 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
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FR3007198B1 (fr) | 2013-06-13 | 2015-06-19 | St Microelectronics Rousset | Composant, par exemple transistor nmos, a region active a contraintes en compression relachees, et procede de fabrication |
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FR3018139B1 (fr) | 2014-02-28 | 2018-04-27 | Stmicroelectronics (Rousset) Sas | Circuit integre a composants, par exemple transistors nmos, a regions actives a contraintes en compression relachees |
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2008
- 2008-02-14 US US12/031,272 patent/US7727834B2/en not_active Expired - Fee Related
- 2008-11-28 JP JP2008304683A patent/JP5253982B2/ja not_active Expired - Fee Related
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US20090206414A1 (en) | 2009-08-20 |
US7727834B2 (en) | 2010-06-01 |
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