JP2008527755A - Cmosfet内の歪みを最適化するための構造体及び方法 - Google Patents
Cmosfet内の歪みを最適化するための構造体及び方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 103
- 239000011248 coating agent Substances 0.000 claims abstract description 25
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 25
- 230000001939 inductive effect Effects 0.000 claims description 24
- 229910052785 arsenic Inorganic materials 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 10
- 229910052732 germanium Inorganic materials 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 8
- 238000002513 implantation Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 abstract description 55
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 13
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 12
- 230000000593 degrading effect Effects 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- 229920005591 polysilicon Polymers 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 9
- 239000007943 implant Substances 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 238000006731 degradation reaction Methods 0.000 description 7
- 238000002955 isolation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000005368 silicate glass Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052914 metal silicate Inorganic materials 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- -1 nitride silicates Chemical class 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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Abstract
【解決手段】 MOSFET内の歪みを最適化し、より具体的には、1つの種類(P又はN)のMOSFET内の歪みを最大にし、かつ、別の種類(N又はP)のMOSFET内の歪みを最小にし緩和する、PMOSFET及びNMOSFETの両方を含む歪みMOSFETの半導体構造体、及び歪みMOSFETを製造する方法が開示される。元の完全な厚さを有する歪み誘起CA窒化物コーティングが、PMOSFET及びNMOSFETの両方の上に形成され、この歪み誘起コーティングは、1つの種類の半導体デバイス内に最適化された十分な歪みをもたらし、別の種類の半導体デバイスの性能を劣化させる。歪み誘起CA窒化物コーティングは、別の種類の半導体デバイスの上で減少した厚さまでエッチングされ、減少した厚さの歪み誘起コーティングは、他方のMOSFET内でより少ない歪みを緩和し、他方のMOSFET内により少ない歪みをもたらす。
【選択図】 図1
Description
As又はGE、
ドーズ量:5e14から2e15まで、
エネルギー:20Kから50Kまで、
とすることができる。
Claims (18)
- P−半導体デバイス及びN−半導体デバイス内に異なる量の歪みをもつ、P−半導体デバイス及びN−半導体デバイスを有する半導体構造体を製造する方法であって、
基板上にP−半導体デバイス及びN−半導体デバイスを形成するステップと、
前記P−半導体デバイス及び前記N−半導体デバイスの上に、元の厚さを有し、前記P−半導体デバイス及び前記N−半導体デバイス内に歪みをもたらす歪み誘起コーティングを形成するステップと、
前記歪み誘起コーティングが施されたP−半導体デバイス及び歪み誘起コーティングが施されたN−半導体デバイスのうちの一方を保護し、前記歪み誘起コーティングが施された半導体デバイスの他方を露出されたままにするステップと、
前記露出された半導体デバイス内の歪みを緩和させるために、前記露出された誘起コーティングをエッチングして前記歪み誘起コーティングの厚さを減少させ、前記保護された半導体デバイス内の歪みが変わらないままにするように、前記保護された半導体デバイスの上の前記歪み誘起コーティングを保護されたままにするステップと
を含む方法。 - 前記エッチングするステップに続いて、前記露出された半導体デバイス内の前記歪みをさらに緩和するために、前記露出された半導体デバイス内に歪み減少ドーパントを注入するステップを含む、請求項1に記載の方法。
- As又はGeを含む歪み減少ドーパントを注入するステップを含む、請求項2に記載の方法。
- 20KeVから50KeVまでの注入エネルギーで、5e14原子/cm2から2e15原子/cm2までの用量の前記As又はGeを注入するステップを含む、請求項3に記載の方法。
- 前記保護するステップは、
前記基板上の前記P−半導体デバイス及び前記N−半導体デバイスの上に、フォトレジスト層をブランケット堆積させるステップと、
前記フォトレジスト層を放射線のパターンに露光させ、前記パターンを前記フォトレジスト層に現像し、前記保護された半導体デバイスの上を覆うブロック・マスクを形成するステップと
を含む、請求項1に記載の方法。 - 前記歪み誘起コーティングは、前記保護されたP−半導体デバイスの性能を改善するために圧縮歪みをもたらし、前記圧縮歪みは、前記露出されたN−半導体デバイス内で緩和される、請求項1に記載の方法。
- 前記P−半導体デバイスがP型MOSFETであり、前記N−半導体デバイスがN型MOSFETである、請求項6に記載の方法。
- 前記歪み誘起コーティングは、前記保護されたN−半導体デバイスの性能を改善するために引張歪みをもたらし、前記引張歪みは、前記露出されたP−半導体デバイス内で緩和される、請求項1に記載の方法。
- 前記P−半導体デバイスがP型MOSFETであり、前記N−半導体デバイスがN型MOSFETである、請求項8に記載の方法。
- 前記歪み誘起コーティングがSi3N4を含む、請求項1に記載の方法。
- P−半導体デバイス及びN−半導体デバイス内に異なる量の歪みをもつ、P−半導体デバイス及びN−半導体デバイスを含む半導体構造体であって、
前記半導体構造体は、半導体基板上に形成されたP−半導体デバイス及びN−半導体デバイスを含み、
前記P−半導体デバイス及び前記N−半導体デバイスのうちの一方の上に形成された、元の完全な厚さを有し、前記一方の半導体デバイス内に最適化された十分な歪みをもたらす歪み誘起コーティングと、
前記P−半導体デバイス及び前記N−半導体デバイスのうちの他方の上に形成された、前記完全な厚さより薄い、エッチングされた減少した厚さを有する歪み誘起コーティングであって、前記減少した厚さの歪み誘起コーティングは、前記一方の半導体デバイス内に比べて、前記他方の半導体デバイス内でより少ない歪みを緩和し、前記他方の半導体デバイス内により少ない歪みをもたらす、歪み誘起コーティングと
を備える、半導体構造体。 - 前記他方の半導体デバイスもまた、前記他方の半導体デバイス内の歪みをさらに緩和するために、注入された歪み減少ドーパントを有する、請求項11に記載の半導体構造体。
- 前記注入された歪み減少ドーパントは、前記他方の半導体デバイス内の前記歪みをさらに緩和するために、As又はGeを含む、請求項12に記載の半導体構造体。
- 前記歪み誘起コーティングは、前記一方のP−半導体デバイスの性能を改善するために圧縮歪みをもたらし、前記圧縮歪みは、前記他方のN−半導体デバイス内で緩和される、請求項11に記載の半導体構造体。
- 前記P−半導体デバイスがP型MOSFETであり、前記N−半導体デバイスがN型MOSFETである、請求項11に記載の半導体構造体。
- 前記歪み誘起コーティングは、前記一方のN−半導体デバイスの性能を改善するために引張歪みをもたらし、前記引張歪みは、前記他方のP−半導体デバイス内で緩和される、請求項11に記載の半導体構造体。
- 前記P−半導体デバイスがP型MOSFETであり、前記N−半導体デバイスがN型MOSFETである、請求項11に記載の半導体構造体。
- 前記歪み誘起コーティングがSi3N4を含む、請求項11に記載の半導体構造体。
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US10/905,745 US7432553B2 (en) | 2005-01-19 | 2005-01-19 | Structure and method to optimize strain in CMOSFETs |
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PCT/US2006/001768 WO2006078740A2 (en) | 2005-01-19 | 2006-01-19 | Structure and method to optimize strain in cmosfets |
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TW200634926A (en) | 2006-10-01 |
US20080251853A1 (en) | 2008-10-16 |
WO2006078740A2 (en) | 2006-07-27 |
US7432553B2 (en) | 2008-10-07 |
EP1842239A2 (en) | 2007-10-10 |
EP1842239A4 (en) | 2009-07-01 |
WO2006078740A3 (en) | 2007-11-01 |
US20080070357A1 (en) | 2008-03-20 |
US20060157795A1 (en) | 2006-07-20 |
CN101496176A (zh) | 2009-07-29 |
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