JP5268385B2 - 半導体装置 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823412—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
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- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
D.V. Singh, et al.,(20.5) 、IEDM 2005 C.D.Sheraw, et al., (2-1) VLSI 2005
前記の不具合に対し、本発明は、Nチャネル領域内のチャネルおよびPチャネル領域内のチャネルに印加するストレスを制御でき、面積の増加抑制および歩留まりの低下を実現できる半導体装置およびその製造方法を提供することを目的とする。
以下、本発明の実施形態に係る半導体装置の製造方法について、図面を参照しながら説明する。
202 Pチャネル領域
203 nチャネルゲート
204 pチャネルゲート
206 素子分離領域
214 np境界領域の幅
216 np境界領域における段差
219 層間絶縁膜
221 コンタクト
222 ゲート上コンタクト
250 ゲート絶縁膜
501 半導体基板
502 ゲート長
503 ゲート間隔
504a、504b エクステンション領域
505 サイドウォール
506 サイドウォール下層膜
507 サイドウォール上層膜
508a、508b ソース・ドレイン領域
511、512 Niシリサイド層
513 コンタクトライナー
514a、514b 注入用レジスト
515 pチャネルライナー注入層
516 nチャネルライナー注入層
517 np境界領域
518 nチャネルコンタクトライナー
519 pチャネルコンタクトライナー
Claims (9)
- 半導体基板と、
前記半導体基板のうち、Nチャネル領域に位置する第1の活性領域とPチャネル領域に位置する第2の活性領域とを電気的に分離する素子分離領域と、
前記第1の活性領域上にゲート絶縁膜を挟んで設けられたnチャネルゲートと、前記第1の活性領域のうち前記nチャネルゲートの両側方に位置する領域に設けられた第1のソース・ドレイン領域とを有するnチャネル型電界効果トランジスタと、
前記第2の活性領域上にゲート絶縁膜を挟んで設けられたpチャネルゲートと、前記第2の活性領域のうち前記pチャネルゲートの両側方に位置する領域に設けられた第2のソース・ドレイン領域とを有するpチャネル型電界効果トランジスタと、
前記第1の活性領域上から前記nチャネルゲートの側方および上方に亘って設けられた収縮力を有するnチャネルコンタクトライナーと、
前記第2の活性領域上から前記pチャネルゲートの側方および上方に亘って設けられ、前記nチャネルコンタクトライナーよりも厚く、前記nチャネルコンタクトライナーと連続的に形成された膨張力を有するpチャネルコンタクトライナーとを備え、
前記nチャネルコンタクトライナーと前記pチャネルコンタクトライナーとは同一の母材から構成されており、
前記nチャネルコンタクトライナーおよび前記pチャネルコンタクトライナーは、Si以上のイオン半径を有する元素を含み、
前記pチャネルコンタクトライナーには、前記pチャネルコンタクトライナーを構成する母材の構成原子間の結合エネルギーよりも前記構成原子との結合エネルギーが大きい元素のイオンが注入されている半導体装置。 - 前記第1の活性領域および前記nチャネル型電界効果トランジスタと前記nチャネルコンタクトライナーとの間から、前記第2の活性領域および前記pチャネル型電界効果トランジスタと前記pチャネルコンタクトライナーとの間に亘って設けられ、前記nチャネルコンタクトライナーおよび前記pチャネルコンタクトライナーと同一の母材から構成され、且つ前記nチャネルコンタクトライナーおよび前記pチャネルコンタクトライナーよりも前記不純物原子の密度が小さいコンタクトライナーをさらに備えていることを特徴とする請求項1に記載の半導体装置。
- 前記コンタクトライナー中のSi−N結合の密度は、前記nチャネルコンタクトライナーおよび前記pチャネルコンタクトライナー中のSi−N結合の密度より高いことを特徴とする請求項2に記載の半導体装置。
- 前記nチャネルコンタクトライナー、前記pチャネルコンタクトライナーの母材は窒化シリコンであり、
前記nチャネルコンタクトライナー中のSi−N結合の密度は、前記pチャネルコンタクトライナー中のSi−N結合の密度よりも高いことを特徴とする請求項1〜3のうちいずれか1つに記載の半導体装置。 - 前記nチャネルコンタクトライナーは炭素またはフッ素を不純物原子として含んでいることを特徴とする請求項1〜4のうちいずれか1つに記載の半導体装置。
- 前記pチャネルコンタクトライナーは酸素を不純物原子として含んでいることを特徴とする請求項1〜5のうちいずれか1つに記載の半導体装置。
- 前記nチャネルコンタクトライナーおよび前記pチャネルコンタクトライナーは、Si、As、InまたはGeを含んでいることを特徴とする請求項1〜6のうちのいずれか1つに記載の半導体装置。
- 前記pチャネルコンタクトライナーは、前記nチャネルコンタクトライナーよりも高密度でGeを含んでいることを特徴とする請求項1〜7のうちいずれか1つに記載の半導体装置。
- 前記Nチャネル領域と前記Pチャネル領域との境界領域における、前記nチャネルコンタクトライナーと前記pチャネルコンタクトライナーとの間の段差は3nm以上15nm以下であることを特徴とする請求項1〜8のうちいずれか1つに記載の半導体装置。
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JP2008031393A JP5268385B2 (ja) | 2008-02-13 | 2008-02-13 | 半導体装置 |
US12/364,797 US8084826B2 (en) | 2008-02-13 | 2009-02-03 | Semiconductor device and manufacturing method thereof |
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US7727834B2 (en) * | 2008-02-14 | 2010-06-01 | Toshiba America Electronic Components, Inc. | Contact configuration and method in dual-stress liner semiconductor device |
US8487354B2 (en) * | 2009-08-21 | 2013-07-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for improving selectivity of epi process |
US8159009B2 (en) | 2009-11-19 | 2012-04-17 | Qualcomm Incorporated | Semiconductor device having strain material |
US8728860B2 (en) * | 2010-09-03 | 2014-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2014146748A (ja) * | 2013-01-30 | 2014-08-14 | Toshiba Corp | 半導体装置及びその製造方法並びに半導体基板 |
KR102231205B1 (ko) * | 2014-11-19 | 2021-03-25 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US11615982B2 (en) * | 2021-01-15 | 2023-03-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Reducing spacing between conductive features through implantation |
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JP2003086708A (ja) * | 2000-12-08 | 2003-03-20 | Hitachi Ltd | 半導体装置及びその製造方法 |
US6573172B1 (en) * | 2002-09-16 | 2003-06-03 | Advanced Micro Devices, Inc. | Methods for improving carrier mobility of PMOS and NMOS devices |
US7227205B2 (en) * | 2004-06-24 | 2007-06-05 | International Business Machines Corporation | Strained-silicon CMOS device and method |
US7432553B2 (en) | 2005-01-19 | 2008-10-07 | International Business Machines Corporation | Structure and method to optimize strain in CMOSFETs |
JP2006253317A (ja) * | 2005-03-09 | 2006-09-21 | Fujitsu Ltd | 半導体集積回路装置およびpチャネルMOSトランジスタ |
JP2007200961A (ja) * | 2006-01-24 | 2007-08-09 | Sharp Corp | 半導体装置およびその製造方法 |
US20070296027A1 (en) | 2006-06-21 | 2007-12-27 | International Business Machines Corporation | Cmos devices comprising a continuous stressor layer with regions of opposite stresses, and methods of fabricating the same |
US20080064173A1 (en) * | 2006-09-08 | 2008-03-13 | United Microelectronics Corp. | Semiconductor device, cmos device and fabricating methods of the same |
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