JP2009182177A - プラズマ処理システム - Google Patents
プラズマ処理システム Download PDFInfo
- Publication number
- JP2009182177A JP2009182177A JP2008020293A JP2008020293A JP2009182177A JP 2009182177 A JP2009182177 A JP 2009182177A JP 2008020293 A JP2008020293 A JP 2008020293A JP 2008020293 A JP2008020293 A JP 2008020293A JP 2009182177 A JP2009182177 A JP 2009182177A
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- Prior art keywords
- plasma processing
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Links
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 239000011248 coating agent Substances 0.000 claims abstract description 31
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims description 29
- 239000000463 material Substances 0.000 abstract description 23
- 239000007789 gas Substances 0.000 description 37
- 230000005540 biological transmission Effects 0.000 description 8
- 230000003028 elevating effect Effects 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000004020 conductor Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
Abstract
【解決手段】処理容器30内に供給された処理ガスをプラズマ化させることにより、処理容器30内において基板Wを処理するプラズマ処理装置5と、プラズマ処理装置5の処理容器30内に対して基板Wを搬入、搬出させる搬送アーム11を備えた処理システム1であって、処理容器30内には、基板Wを上面に載置させる載置台31が設けられ、載置台31の上面には、搬送アーム11による基板Wの支持位置に対応する箇所に、凹部33が設けられている。搬送アーム11による基板Wの支持位置に対応する箇所においては、載置台31の上面から基板Wの裏面に対してコーティング材が転写されることがない。このため、搬送アーム11の上面にもコーティング材が転写されなくなる。
【選択図】図1
Description
1 プラズマ処理システム
2 搬入出部
3 ロードロック室
4 搬送室
5 プラズマ処理装置
10 搬送装置
11 搬送アーム
16 アライメント機構
20 突起
30 処理容器
31 載置台
32 温度調節機構
33 凹部
35 透過窓
36 ラジアルラインスロットアンテナ
37 遅波板
38 カバー
40 同軸導波管
45 マイクロ波供給装置
50 上シャワープレート
51 下シャワープレート
55 プラズマ生成ガス供給源
60 処理ガス供給源
65 昇降機構
70 昇降ピン
73 昇降装置
75 排気装置
80 洗浄機構
81 クリーニングガスの供給源
82 クリーニングガスノズル
Claims (6)
- 処理容器内に供給された処理ガスをプラズマ化させることにより、前記処理容器内において基板を処理するプラズマ処理装置と、前記プラズマ処理装置の前記処理容器内に対して基板を搬入、搬出させる搬送アームを備えた処理システムであって、
前記処理容器内には、基板を上面に載置させる載置台が設けられ、
前記載置台の上面には、前記搬送アームによる基板の支持位置に対応する箇所に、凹部が設けられていることを特徴とする、プラズマ処理システム。 - 前記処理容器の内面に、コーティング膜が形成されていることを特徴とする、請求項1に記載のプラズマ処理システム。
- 前記載置台は、基板を温度調節するための温度調節機構を備えていることを特徴とする、請求項1または2に記載のプラズマ処理システム。
- 前記搬送アームの上面に基板の裏面を支持するための突起が複数個所に設けられており、
前記載置台の上面には、前記複数の突起に対応する箇所に、前記凹部がそれぞれ設けられていることを特徴とする、請求項1〜3のいずれかに記載のプラズマ処理システム。 - 前記処理容器の外部において、前記搬送アームの上面に設けられた前記複数の突起を洗浄する洗浄機構を有することを特徴とする、請求項4に記載のプラズマ処理システム。
- 前記洗浄機構は、前記複数の突起にクリーニングガスを噴射するクリーニングガスノズルを有していることを特徴とする、請求項5に記載のプラズマ処理システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008020293A JP4515507B2 (ja) | 2008-01-31 | 2008-01-31 | プラズマ処理システム |
KR1020080115648A KR101004365B1 (ko) | 2008-01-31 | 2008-11-20 | 플라즈마 처리 시스템 |
TW098102213A TWI387046B (zh) | 2008-01-31 | 2009-01-21 | 電漿處理系統 |
US12/362,769 US20090194237A1 (en) | 2008-01-31 | 2009-01-30 | Plasma processing system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008020293A JP4515507B2 (ja) | 2008-01-31 | 2008-01-31 | プラズマ処理システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009182177A true JP2009182177A (ja) | 2009-08-13 |
JP4515507B2 JP4515507B2 (ja) | 2010-08-04 |
Family
ID=40930511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008020293A Expired - Fee Related JP4515507B2 (ja) | 2008-01-31 | 2008-01-31 | プラズマ処理システム |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090194237A1 (ja) |
JP (1) | JP4515507B2 (ja) |
KR (1) | KR101004365B1 (ja) |
TW (1) | TWI387046B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012222289A (ja) * | 2011-04-13 | 2012-11-12 | Panasonic Corp | プラズマ処理装置及びプラズマ処理方法 |
JP5369233B2 (ja) * | 2010-03-19 | 2013-12-18 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP2014099542A (ja) * | 2012-11-15 | 2014-05-29 | Tokyo Electron Ltd | 基板受渡機構、基板搬送装置及び基板受渡方法 |
US8945411B2 (en) | 2011-04-13 | 2015-02-03 | Panasonic Corporation | Plasma processing apparatus and plasma processing method |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20190119815A1 (en) * | 2017-10-24 | 2019-04-25 | Applied Materials, Inc. | Systems and processes for plasma filtering |
US11256180B2 (en) * | 2019-04-29 | 2022-02-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Processing apparatus and method thereof |
JP2022141334A (ja) * | 2021-03-15 | 2022-09-29 | キオクシア株式会社 | 半導体製造装置および半導体製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6437036U (ja) * | 1987-08-28 | 1989-03-06 | ||
JPS6439634U (ja) * | 1987-09-01 | 1989-03-09 | ||
JPH04343430A (ja) * | 1991-04-30 | 1992-11-30 | Internatl Business Mach Corp <Ibm> | 過フッ化炭化水素ポリマ膜を基板に接着する方法および基板 |
JPH05304069A (ja) * | 1992-04-24 | 1993-11-16 | Sony Corp | 露光装置 |
JPH10247675A (ja) * | 1997-03-04 | 1998-09-14 | Toshiba Corp | マルチチャンバシステム及びその搬送台車並びにゲートバルブさらにはその排気制御方法及びその装置 |
JP2002373932A (ja) * | 2001-06-14 | 2002-12-26 | Anelva Corp | 基板保持機構及び基板処理装置 |
JP2005019914A (ja) * | 2003-06-30 | 2005-01-20 | Japan Steel Works Ltd:The | 基板の授受装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2538269B2 (ja) * | 1987-08-03 | 1996-09-25 | 富士通株式会社 | 半導体装置の製造方法 |
JPH01306565A (ja) * | 1988-06-02 | 1989-12-11 | Canon Inc | 堆積膜形成方法 |
US5366585A (en) * | 1993-01-28 | 1994-11-22 | Applied Materials, Inc. | Method and apparatus for protection of conductive surfaces in a plasma processing reactor |
US5609688A (en) * | 1993-05-07 | 1997-03-11 | Fujitsu Ltd. | Apparatus for producing semiconductor device |
US6279724B1 (en) * | 1997-12-19 | 2001-08-28 | Semitoll Inc. | Automated semiconductor processing system |
JP4873405B2 (ja) * | 2006-03-24 | 2012-02-08 | 東京エレクトロン株式会社 | プラズマ処理装置と方法 |
-
2008
- 2008-01-31 JP JP2008020293A patent/JP4515507B2/ja not_active Expired - Fee Related
- 2008-11-20 KR KR1020080115648A patent/KR101004365B1/ko not_active IP Right Cessation
-
2009
- 2009-01-21 TW TW098102213A patent/TWI387046B/zh not_active IP Right Cessation
- 2009-01-30 US US12/362,769 patent/US20090194237A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6437036U (ja) * | 1987-08-28 | 1989-03-06 | ||
JPS6439634U (ja) * | 1987-09-01 | 1989-03-09 | ||
JPH04343430A (ja) * | 1991-04-30 | 1992-11-30 | Internatl Business Mach Corp <Ibm> | 過フッ化炭化水素ポリマ膜を基板に接着する方法および基板 |
JPH05304069A (ja) * | 1992-04-24 | 1993-11-16 | Sony Corp | 露光装置 |
JPH10247675A (ja) * | 1997-03-04 | 1998-09-14 | Toshiba Corp | マルチチャンバシステム及びその搬送台車並びにゲートバルブさらにはその排気制御方法及びその装置 |
JP2002373932A (ja) * | 2001-06-14 | 2002-12-26 | Anelva Corp | 基板保持機構及び基板処理装置 |
JP2005019914A (ja) * | 2003-06-30 | 2005-01-20 | Japan Steel Works Ltd:The | 基板の授受装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5369233B2 (ja) * | 2010-03-19 | 2013-12-18 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP2012222289A (ja) * | 2011-04-13 | 2012-11-12 | Panasonic Corp | プラズマ処理装置及びプラズマ処理方法 |
US8945411B2 (en) | 2011-04-13 | 2015-02-03 | Panasonic Corporation | Plasma processing apparatus and plasma processing method |
JP2014099542A (ja) * | 2012-11-15 | 2014-05-29 | Tokyo Electron Ltd | 基板受渡機構、基板搬送装置及び基板受渡方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090194237A1 (en) | 2009-08-06 |
KR101004365B1 (ko) | 2010-12-28 |
KR20090084651A (ko) | 2009-08-05 |
JP4515507B2 (ja) | 2010-08-04 |
TWI387046B (zh) | 2013-02-21 |
TW200947601A (en) | 2009-11-16 |
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