JP2009170896A5 - - Google Patents
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- Publication number
- JP2009170896A5 JP2009170896A5 JP2008319214A JP2008319214A JP2009170896A5 JP 2009170896 A5 JP2009170896 A5 JP 2009170896A5 JP 2008319214 A JP2008319214 A JP 2008319214A JP 2008319214 A JP2008319214 A JP 2008319214A JP 2009170896 A5 JP2009170896 A5 JP 2009170896A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- gate electrode
- semiconductor film
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010408 film Substances 0.000 claims 21
- 239000004065 semiconductor Substances 0.000 claims 21
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 7
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 7
- 239000013078 crystal Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- 238000009832 plasma treatment Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008319214A JP5496500B2 (ja) | 2007-12-18 | 2008-12-16 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007325708 | 2007-12-18 | ||
| JP2007325708 | 2007-12-18 | ||
| JP2008319214A JP5496500B2 (ja) | 2007-12-18 | 2008-12-16 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009170896A JP2009170896A (ja) | 2009-07-30 |
| JP2009170896A5 true JP2009170896A5 (enrdf_load_stackoverflow) | 2012-02-02 |
| JP5496500B2 JP5496500B2 (ja) | 2014-05-21 |
Family
ID=40971687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008319214A Expired - Fee Related JP5496500B2 (ja) | 2007-12-18 | 2008-12-16 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5496500B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI783356B (zh) | 2009-09-10 | 2022-11-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置和顯示裝置 |
| JP5683179B2 (ja) * | 2009-09-24 | 2015-03-11 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| TWI557910B (zh) * | 2011-06-16 | 2016-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| JP6046351B2 (ja) * | 2012-01-19 | 2016-12-14 | 日新電機株式会社 | 絶縁膜およびその製造方法 |
| KR20140071971A (ko) * | 2011-10-07 | 2014-06-12 | 스미토모덴키고교가부시키가이샤 | 절연막 및 그 제조 방법 |
| US8969130B2 (en) * | 2011-11-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof |
| CN104409509A (zh) * | 2014-10-20 | 2015-03-11 | 深圳市华星光电技术有限公司 | 薄膜晶体管 |
| US10600644B2 (en) * | 2017-08-04 | 2020-03-24 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Mono- and multilayer silicene prepared by plasma-enhanced chemical vapor deposition |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3006190B2 (ja) * | 1991-07-26 | 2000-02-07 | 株式会社島津製作所 | 真空成膜方法 |
| JPH10163502A (ja) * | 1996-12-03 | 1998-06-19 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
| JP2001077112A (ja) * | 1999-07-07 | 2001-03-23 | Matsushita Electric Ind Co Ltd | 積層体，積層体の製造方法及び半導体素子 |
| JP2001217424A (ja) * | 2000-02-03 | 2001-08-10 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよびそれを用いた液晶表示装置 |
| JP2002319678A (ja) * | 2001-04-20 | 2002-10-31 | Hitachi Ltd | 薄膜型半導体装置及びその製造方法 |
| JP2005005509A (ja) * | 2003-06-12 | 2005-01-06 | Canon Inc | 薄膜トランジスタ及びその製造方法 |
| JP2005167051A (ja) * | 2003-12-04 | 2005-06-23 | Sony Corp | 薄膜トランジスタおよび薄膜トランジスタの製造方法 |
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2008
- 2008-12-16 JP JP2008319214A patent/JP5496500B2/ja not_active Expired - Fee Related