JP2009124075A - ワイヤボンディング方法およびワイヤボンディング構造体 - Google Patents
ワイヤボンディング方法およびワイヤボンディング構造体 Download PDFInfo
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- JP2009124075A JP2009124075A JP2007299228A JP2007299228A JP2009124075A JP 2009124075 A JP2009124075 A JP 2009124075A JP 2007299228 A JP2007299228 A JP 2007299228A JP 2007299228 A JP2007299228 A JP 2007299228A JP 2009124075 A JP2009124075 A JP 2009124075A
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Abstract
【解決手段】半導体チップ10の電極11と基板20の電極21との間でワイヤ接続工程を複数回行って両電極11、21上にワイヤ30を複数本重ねて形成するものであって、重ねられた複数本のワイヤ30のうち最上部に位置するワイヤ30よりも下側に位置するワイヤ30を形成する接続工程では、1次ボンディング後のワイヤ30の引き出しを、当該ワイヤ30における1次ボンディング部30a側の根元部から中間部までが2次ボンディング側のランド21に向かって水平面Hから斜め上方の方向に延びる形状となるように行う。
【選択図】図1
Description
図1は、本発明の第1実施形態に係るワイヤボンディング構造体の概略断面構成を示す図である。この構造体は、大きくは、第1の部材としての半導体チップ10と第2の部材としての基板20とが、ワイヤボンディングにより形成されたワイヤ30により電気的に接続されたものである。
図6は、本発明の第2実施形態に係るワイヤボンディング方法を用いたボンディングワイヤ30の接続工程を示す工程図である。
図7は、本発明の第3実施形態に係るワイヤボンディング方法を用いたボンディングワイヤ30の接続工程を示す工程図である。
なお、上記実施形態では、第1の部材は半導体チップ、第2の部材は基板であったが、第1の部材、第2の部材は、共にワイヤボンディングされる電極を有するものであればよく、これらに限定されるものではない。たとえば、第1の部材および第2の部材の組合せとしては、当該両部材がともに基板である場合や、ともに半導体チップである場合も可能である。
30…ボンディングワイヤ、30a…ボンディングワイヤの1次ボンディング部、
30c…ボンディングワイヤの頂部、100…ツール、θ…引き出し角度。
Claims (6)
- 先端部からワイヤ(30)が引き出されるようになっているワイヤボンディング用のツール(100)によって、第1の部材(10)上の電極(11)および第2の部材(20)上の電極(21)の一方の電極に1次ボンディングを行い、
次に、他方の電極まで前記ワイヤ(30)を引き出して当該他方の電極に2次ボンディングするという接続工程を行うことで、前記両電極(11、21)間を前記ワイヤ(30)により結線するワイヤボンディング方法において、
前記両電極(11、21)間で前記接続工程を複数回行って前記両電極(11、21)上に前記ワイヤ(30)を複数本重ねて形成するものであり、
前記重ねられた複数本の前記ワイヤ(30)のうち最上部に位置する前記ワイヤ(30)よりも下側に位置する前記ワイヤ(30)を形成する前記接続工程では、前記1次ボンディング後の前記ワイヤ(30)の引き出しを、当該ワイヤ(30)における1次ボンディング部(30a)側の根元部から中間部までが前記2次ボンディング側の前記電極(21)に向かって水平面から斜め上方の方向に延びる形状となるように行い、
その後、当該ワイヤ(30)を前記2次ボンディング側の前記電極(21)に着地させて、前記2次ボンディングを行うことを特徴とするワイヤボンディング方法。 - 先端部からワイヤ(30)が引き出されるようになっているワイヤボンディング用のツール(100)によって、第1の部材(10)上の電極(11)および第2の部材(20)上の電極(21)の一方の電極に1次ボンディングを行い、
次に、他方の電極まで前記ワイヤ(30)を引き出して当該他方の電極に2次ボンディングするという接続工程を行うことで、前記両電極(11、21)間を前記ワイヤ(30)により結線するワイヤボンディング方法において、
前記両電極(11、21)間で前記接続工程を複数回行って前記両電極(11、21)上に前記ワイヤ(30)を複数本重ねて形成するものであり、
前記重ねられた複数本の前記ワイヤ(30)のうち最上部に位置する前記ワイヤ(30)よりも下側に位置する前記ワイヤ(30)を形成する前記接続工程では、前記1次ボンディング後の前記ワイヤ(30)の引き出しを、形成後の当該ワイヤ(30)における頂部(30c)が前記1次ボンディングされた前記電極(11)の垂直上方ではなく前記両電極(11、21)の間に位置するように、前記2次ボンディング側の前記電極(21)に向かって水平面から斜め上方の方向に向かって行い、
その後、当該ワイヤ(30)を前記2次ボンディング側の前記電極(21)に着地させて、前記2次ボンディングを行うことを特徴とするワイヤボンディング方法。 - 前記斜め上方の方向とは、当該方向と前記水平面とのなす角度(θ)が10〜45°となっているものであることを特徴とする請求項1または2に記載のワイヤボンディング方法。
- 前記ワイヤ(30)の前記1次ボンディング部(30a)の一部が、その下側に位置する前記ワイヤ(30)の前記1次ボンディング部(30a)から前記2次ボンディング側の前記電極(21)とは反対側の方向へはみ出るように位置をずらしながら、前記ワイヤ(30)を重ねていくことを特徴とする請求項1ないし3のいずれか1つに記載のワイヤボンディング方法。
- 第1の部材(10)上の電極(11)および第2の部材(20)上の電極(21)のうち一方の電極に1次ボンディングを行い、他方の電極に2次ボンディングすることにより、前記両電極(11、21)間を前記ワイヤ(30)により結線してなるワイヤボンディング構造体において、
前記両電極(11、21)間にて前記両電極(11、21)上に前記ワイヤ(30)が複数本重ねて形成されており、
前記重ねられた複数本の前記ワイヤ(30)のうち最上部に位置する前記ワイヤ(30)よりも下側に位置する前記ワイヤ(30)は、当該ワイヤ(30)における1次ボンディング部(30a)側の根元部から中間部までが前記2次ボンディング側の前記電極(21)に向かって水平面から斜め上方の方向に延びる形状となるように引き出されていることを特徴とするワイヤボンディング構造体。 - 第1の部材(10)上の電極(11)および第2の部材(20)上の電極(21)のうち一方の電極に1次ボンディングを行い、他方の電極に2次ボンディングすることにより、前記両電極(11、21)間を前記ワイヤ(30)により結線してなるワイヤボンディング構造体において、
前記両電極(11、21)間にて前記両電極(11、21)上に前記ワイヤ(30)が複数本重ねて形成されており、
前記重ねられた複数本の前記ワイヤ(30)のうち最上部に位置する前記ワイヤ(30)よりも下側に位置する前記ワイヤ(30)は、当該ワイヤ(30)における頂部(30c)が前記1次ボンディングされた前記電極(11)の垂直上方ではなく前記両電極(11、21)の間に位置するように、前記2次ボンディング側の前記電極(21)に向かって水平面から斜め上方の方向に向かって引き出されていることを特徴とするワイヤボンディング構造体。
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JP2015146393A (ja) * | 2014-02-03 | 2015-08-13 | カルソニックカンセイ株式会社 | 超音波ウェッジボンディング構造 |
US9123713B2 (en) | 2010-11-24 | 2015-09-01 | Tessera, Inc. | Lead structures with vertical offsets |
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JP2005268497A (ja) * | 2004-03-18 | 2005-09-29 | Denso Corp | 半導体装置及び半導体装置の製造方法 |
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WO2011087485A3 (en) * | 2009-12-22 | 2012-01-26 | Tessera, Inc | Microelectronic assembly with joined bond elements having lowered inductance |
US8410618B2 (en) | 2009-12-22 | 2013-04-02 | Tessera, Inc. | Microelectronic assembly with joined bond elements having lowered inductance |
US8816514B2 (en) | 2009-12-22 | 2014-08-26 | Tessera, Inc. | Microelectronic assembly with joined bond elements having lowered inductance |
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