JP2009027194A5 - - Google Patents

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Publication number
JP2009027194A5
JP2009027194A5 JP2008272473A JP2008272473A JP2009027194A5 JP 2009027194 A5 JP2009027194 A5 JP 2009027194A5 JP 2008272473 A JP2008272473 A JP 2008272473A JP 2008272473 A JP2008272473 A JP 2008272473A JP 2009027194 A5 JP2009027194 A5 JP 2009027194A5
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magnetic pole
transition time
current
workpiece
electromagnet
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JP2008272473A
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Japanese (ja)
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JP2009027194A (ja
JP4932811B2 (ja
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Priority claimed from US08/735,444 external-priority patent/US6113731A/en
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Publication of JP4932811B2 publication Critical patent/JP4932811B2/ja
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JP2008272473A 1997-01-02 2008-10-22 非均一な磁界を有する磁気励起プラズマチャンバ Expired - Fee Related JP4932811B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/735,444 US6113731A (en) 1997-01-02 1997-01-02 Magnetically-enhanced plasma chamber with non-uniform magnetic field
US08/735444 1997-01-02

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP36040197A Division JP4387471B2 (ja) 1997-01-02 1997-12-26 非均一な磁界を有する磁気励起プラズマチャンバ

Publications (3)

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JP2009027194A JP2009027194A (ja) 2009-02-05
JP2009027194A5 true JP2009027194A5 (enExample) 2009-11-26
JP4932811B2 JP4932811B2 (ja) 2012-05-16

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JP36040197A Expired - Fee Related JP4387471B2 (ja) 1997-01-02 1997-12-26 非均一な磁界を有する磁気励起プラズマチャンバ
JP2008272473A Expired - Fee Related JP4932811B2 (ja) 1997-01-02 2008-10-22 非均一な磁界を有する磁気励起プラズマチャンバ

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JP36040197A Expired - Fee Related JP4387471B2 (ja) 1997-01-02 1997-12-26 非均一な磁界を有する磁気励起プラズマチャンバ

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Country Link
US (1) US6113731A (enExample)
EP (1) EP0852389A3 (enExample)
JP (2) JP4387471B2 (enExample)
KR (1) KR100564087B1 (enExample)
TW (1) TW439110B (enExample)

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