JP2009012877A - 浮上搬送装置 - Google Patents

浮上搬送装置 Download PDF

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Publication number
JP2009012877A
JP2009012877A JP2007173446A JP2007173446A JP2009012877A JP 2009012877 A JP2009012877 A JP 2009012877A JP 2007173446 A JP2007173446 A JP 2007173446A JP 2007173446 A JP2007173446 A JP 2007173446A JP 2009012877 A JP2009012877 A JP 2009012877A
Authority
JP
Japan
Prior art keywords
thin plate
levitation
blower
unit
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007173446A
Other languages
English (en)
Japanese (ja)
Inventor
Kensuke Hirata
賢輔 平田
Fumio Hasegawa
文夫 長谷川
Kai Tanaka
刈入 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2007173446A priority Critical patent/JP2009012877A/ja
Priority to KR1020127004006A priority patent/KR20120042990A/ko
Priority to KR1020107000545A priority patent/KR101135000B1/ko
Priority to CN200880021730A priority patent/CN101715421A/zh
Priority to PCT/JP2008/058624 priority patent/WO2009004858A1/ja
Priority to TW097121179A priority patent/TW200914350A/zh
Priority to TW101118639A priority patent/TWI399331B/zh
Publication of JP2009012877A publication Critical patent/JP2009012877A/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP2007173446A 2007-06-29 2007-06-29 浮上搬送装置 Pending JP2009012877A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置
KR1020127004006A KR20120042990A (ko) 2007-06-29 2008-05-09 부상 반송 장치
KR1020107000545A KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치
CN200880021730A CN101715421A (zh) 2007-06-29 2008-05-09 悬浮输送装置
PCT/JP2008/058624 WO2009004858A1 (ja) 2007-06-29 2008-05-09 浮上搬送装置
TW097121179A TW200914350A (en) 2007-06-29 2008-06-06 Float-carrying device
TW101118639A TWI399331B (zh) 2007-06-29 2008-06-06 Floating handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置

Publications (1)

Publication Number Publication Date
JP2009012877A true JP2009012877A (ja) 2009-01-22

Family

ID=40225915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007173446A Pending JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置

Country Status (5)

Country Link
JP (1) JP2009012877A (https=)
KR (2) KR20120042990A (https=)
CN (1) CN101715421A (https=)
TW (2) TWI399331B (https=)
WO (1) WO2009004858A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012121641A (ja) * 2010-12-06 2012-06-28 Daifuku Co Ltd 板状体搬送装置
JP2012131612A (ja) * 2010-12-22 2012-07-12 Murata Machinery Ltd 物品搬送装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
CN102923480A (zh) * 2011-08-12 2013-02-13 大银微系统股份有限公司 气浮平台的管路整合构造
CN102616567B (zh) * 2012-03-23 2014-02-05 深圳市华星光电技术有限公司 玻璃基板的取出装置
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
CN114476681A (zh) * 2022-03-09 2022-05-13 河北泰晶新材料科技有限公司 一种物料输送系统、物料输送方法及存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
WO2004088742A1 (ja) * 2003-03-28 2004-10-14 Hirata Corporation 基板搬送システム
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
JP2007088201A (ja) * 2005-09-22 2007-04-05 Tokyo Electron Ltd 基板処理装置及び基板処理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4187366B2 (ja) * 1999-09-28 2008-11-26 株式会社トーショー 散薬供給装置
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
EP1840686B1 (en) * 2005-01-19 2013-05-08 Mitsubishi Electric Corporation Positioning device and positioning method
TWI301119B (en) * 2005-10-26 2008-09-21 Ind Tech Res Inst Substrate transportation apparatus
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
WO2004088742A1 (ja) * 2003-03-28 2004-10-14 Hirata Corporation 基板搬送システム
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
JP2007088201A (ja) * 2005-09-22 2007-04-05 Tokyo Electron Ltd 基板処理装置及び基板処理方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012121641A (ja) * 2010-12-06 2012-06-28 Daifuku Co Ltd 板状体搬送装置
CN102745453A (zh) * 2010-12-06 2012-10-24 株式会社大福 板状体搬运装置
TWI510422B (zh) * 2010-12-06 2015-12-01 Daifuku Kk 板狀體搬送裝置
JP2012131612A (ja) * 2010-12-22 2012-07-12 Murata Machinery Ltd 物品搬送装置

Also Published As

Publication number Publication date
CN101715421A (zh) 2010-05-26
TWI375650B (https=) 2012-11-01
WO2009004858A1 (ja) 2009-01-08
TW200914350A (en) 2009-04-01
TW201242877A (en) 2012-11-01
TWI399331B (zh) 2013-06-21
KR20100018611A (ko) 2010-02-17
KR101135000B1 (ko) 2012-04-09
KR20120042990A (ko) 2012-05-03

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