TWI399331B - Floating handling device - Google Patents

Floating handling device Download PDF

Info

Publication number
TWI399331B
TWI399331B TW101118639A TW101118639A TWI399331B TW I399331 B TWI399331 B TW I399331B TW 101118639 A TW101118639 A TW 101118639A TW 101118639 A TW101118639 A TW 101118639A TW I399331 B TWI399331 B TW I399331B
Authority
TW
Taiwan
Prior art keywords
floating
control
fluid
height
blower
Prior art date
Application number
TW101118639A
Other languages
English (en)
Chinese (zh)
Other versions
TW201242877A (en
Inventor
平田賢輔
長谷川文夫
田中刈入
Original Assignee
Ｉｈｉ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｉｈｉ股份有限公司 filed Critical Ｉｈｉ股份有限公司
Publication of TW201242877A publication Critical patent/TW201242877A/zh
Application granted granted Critical
Publication of TWI399331B publication Critical patent/TWI399331B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
TW101118639A 2007-06-29 2008-06-06 Floating handling device TWI399331B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置

Publications (2)

Publication Number Publication Date
TW201242877A TW201242877A (en) 2012-11-01
TWI399331B true TWI399331B (zh) 2013-06-21

Family

ID=40225915

Family Applications (2)

Application Number Title Priority Date Filing Date
TW101118639A TWI399331B (zh) 2007-06-29 2008-06-06 Floating handling device
TW097121179A TW200914350A (en) 2007-06-29 2008-06-06 Float-carrying device

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW097121179A TW200914350A (en) 2007-06-29 2008-06-06 Float-carrying device

Country Status (5)

Country Link
JP (1) JP2009012877A (https=)
KR (2) KR20120042990A (https=)
CN (1) CN101715421A (https=)
TW (2) TWI399331B (https=)
WO (1) WO2009004858A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5582021B2 (ja) * 2010-12-22 2014-09-03 村田機械株式会社 物品搬送装置
CN102923480A (zh) * 2011-08-12 2013-02-13 大银微系统股份有限公司 气浮平台的管路整合构造
CN102616567B (zh) * 2012-03-23 2014-02-05 深圳市华星光电技术有限公司 玻璃基板的取出装置
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
CN114476681A (zh) * 2022-03-09 2022-05-13 河北泰晶新材料科技有限公司 一种物料输送系统、物料输送方法及存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
TWI258827B (en) * 2005-01-19 2006-07-21 Mitsubishi Electric Corp Apparatus and method for positioning
TW200716465A (en) * 2005-10-26 2007-05-01 Ind Tech Res Inst Substrate transportation apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
JP4187366B2 (ja) * 1999-09-28 2008-11-26 株式会社トーショー 散薬供給装置
WO2004088742A1 (ja) * 2003-03-28 2004-10-14 Hirata Corporation 基板搬送システム
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
TWI258827B (en) * 2005-01-19 2006-07-21 Mitsubishi Electric Corp Apparatus and method for positioning
TW200716465A (en) * 2005-10-26 2007-05-01 Ind Tech Res Inst Substrate transportation apparatus

Also Published As

Publication number Publication date
CN101715421A (zh) 2010-05-26
TWI375650B (https=) 2012-11-01
WO2009004858A1 (ja) 2009-01-08
TW200914350A (en) 2009-04-01
TW201242877A (en) 2012-11-01
JP2009012877A (ja) 2009-01-22
KR20100018611A (ko) 2010-02-17
KR101135000B1 (ko) 2012-04-09
KR20120042990A (ko) 2012-05-03

Similar Documents

Publication Publication Date Title
TWI399331B (zh) Floating handling device
KR20180099726A (ko) 기판 반송 로봇 및 그 운전 방법
TWI393205B (zh) 基板搬送裝置及基板搬送方法
JP4349101B2 (ja) 基板搬送装置
TWI411567B (zh) Floating handling device and handling system with floating handling device
KR20130017443A (ko) 기판 도포 장치, 부상식 기판 반송 장치 및 부상식 기판 반송 방법
CN101715422B (zh) 悬浮装置及悬浮输送装置
TW200925089A (en) Floating device and floating carrier
CN108249159A (zh) 浮起搬运装置以及基板处理装置
JP5372695B2 (ja) 基板処理装置
CN101711218B (zh) 悬浮装置及悬浮输送装置
JP2008098227A (ja) 基板処理装置
KR101610215B1 (ko) 반송 장치
TW201010921A (en) Floating type conveying apparatus
JP4715088B2 (ja) 基板搬送装置及び基板保管搬送装置
KR20100001557A (ko) 기판 이송장치
TWI445654B (zh) Floating handling device
JP2006193267A (ja) 基板搬送方法および基板搬送装置
TWI355364B (https=)
WO2006003876A1 (ja) 基板塗布装置
KR102202465B1 (ko) 반송 유닛, 이를 포함하는 기판 처리 장치 및 기판 반송 방법
JP2012212744A (ja) 基板処理装置および基板処理方法
JP2006263674A (ja) フラットパネル製造装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees