JP2009004752A - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP2009004752A
JP2009004752A JP2008125829A JP2008125829A JP2009004752A JP 2009004752 A JP2009004752 A JP 2009004752A JP 2008125829 A JP2008125829 A JP 2008125829A JP 2008125829 A JP2008125829 A JP 2008125829A JP 2009004752 A JP2009004752 A JP 2009004752A
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JP
Japan
Prior art keywords
electrostatic chuck
alumina
titanium oxide
plasma
ceramic dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008125829A
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English (en)
Japanese (ja)
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JP2009004752A5 (enExample
Inventor
Masami Ando
正美 安藤
Toshihiro Aoshima
利裕 青島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP2008125829A priority Critical patent/JP2009004752A/ja
Publication of JP2009004752A publication Critical patent/JP2009004752A/ja
Publication of JP2009004752A5 publication Critical patent/JP2009004752A5/ja
Pending legal-status Critical Current

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JP2008125829A 2007-05-18 2008-05-13 静電チャック Pending JP2009004752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008125829A JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007132821 2007-05-18
JP2008125829A JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Publications (2)

Publication Number Publication Date
JP2009004752A true JP2009004752A (ja) 2009-01-08
JP2009004752A5 JP2009004752A5 (enExample) 2012-03-01

Family

ID=40320755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008125829A Pending JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Country Status (1)

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JP (1) JP2009004752A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111868913A (zh) * 2018-03-23 2020-10-30 住友大阪水泥股份有限公司 静电卡盘装置及静电卡盘装置的制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203893A (ja) * 2000-10-23 2002-07-19 National Institute Of Advanced Industrial & Technology 静電チャック
JP2003188247A (ja) * 2001-12-17 2003-07-04 Ngk Spark Plug Co Ltd 静電チャック及びその製造方法
JP2006049356A (ja) * 2004-07-30 2006-02-16 Toto Ltd 静電チャック
JP2007112676A (ja) * 2005-10-21 2007-05-10 Nitsukatoo:Kk 導電性アルミナ質焼結体
JP2007214287A (ja) * 2006-02-08 2007-08-23 Toto Ltd 静電チャック

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203893A (ja) * 2000-10-23 2002-07-19 National Institute Of Advanced Industrial & Technology 静電チャック
JP2003188247A (ja) * 2001-12-17 2003-07-04 Ngk Spark Plug Co Ltd 静電チャック及びその製造方法
JP2006049356A (ja) * 2004-07-30 2006-02-16 Toto Ltd 静電チャック
JP2007112676A (ja) * 2005-10-21 2007-05-10 Nitsukatoo:Kk 導電性アルミナ質焼結体
JP2007214287A (ja) * 2006-02-08 2007-08-23 Toto Ltd 静電チャック

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111868913A (zh) * 2018-03-23 2020-10-30 住友大阪水泥股份有限公司 静电卡盘装置及静电卡盘装置的制造方法
CN111868913B (zh) * 2018-03-23 2023-08-22 住友大阪水泥股份有限公司 静电卡盘装置及静电卡盘装置的制造方法

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