JP2008543008A5 - - Google Patents
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- Publication number
- JP2008543008A5 JP2008543008A5 JP2008514166A JP2008514166A JP2008543008A5 JP 2008543008 A5 JP2008543008 A5 JP 2008543008A5 JP 2008514166 A JP2008514166 A JP 2008514166A JP 2008514166 A JP2008514166 A JP 2008514166A JP 2008543008 A5 JP2008543008 A5 JP 2008543008A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cathode
- conductor
- lattice
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 25
- 238000005530 etching Methods 0.000 claims 13
- 239000011347 resin Substances 0.000 claims 10
- 229920005989 resin Polymers 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 9
- 238000000151 deposition Methods 0.000 claims 8
- 239000003054 catalyst Substances 0.000 claims 4
- 239000011810 insulating material Substances 0.000 claims 3
- 230000004888 barrier function Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004090 dissolution Methods 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000002086 nanomaterial Substances 0.000 claims 1
- 239000002071 nanotube Substances 0.000 claims 1
- 239000002070 nanowire Substances 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0551412A FR2886284B1 (fr) | 2005-05-30 | 2005-05-30 | Procede de realisation de nanostructures |
| PCT/FR2006/050490 WO2007026086A2 (fr) | 2005-05-30 | 2006-05-29 | Procede de fabrication d'une cathode emissive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008543008A JP2008543008A (ja) | 2008-11-27 |
| JP2008543008A5 true JP2008543008A5 (https=) | 2012-01-05 |
Family
ID=35520555
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008514165A Active JP5247438B2 (ja) | 2005-05-30 | 2006-05-29 | ナノ構造物の製造方法 |
| JP2008514166A Pending JP2008543008A (ja) | 2005-05-30 | 2006-05-29 | 放出陰極の製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008514165A Active JP5247438B2 (ja) | 2005-05-30 | 2006-05-29 | ナノ構造物の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7993703B2 (https=) |
| EP (2) | EP1885648B1 (https=) |
| JP (2) | JP5247438B2 (https=) |
| FR (1) | FR2886284B1 (https=) |
| WO (2) | WO2007026086A2 (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2873852B1 (fr) | 2004-07-28 | 2011-06-24 | Commissariat Energie Atomique | Structure de cathode a haute resolution |
| WO2007114655A1 (en) * | 2006-04-05 | 2007-10-11 | Industry Academic Cooperation Foundation Of Kyunghee University | Field emission display and manufacturing method of the same having selective array of electron emission source |
| KR100803194B1 (ko) * | 2006-06-30 | 2008-02-14 | 삼성에스디아이 주식회사 | 탄소나노튜브 구조체 형성방법 |
| JP5637687B2 (ja) | 2006-12-19 | 2014-12-10 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツングBASF Coatings GmbH | 高い引掻耐性及び耐候性を有する被覆剤 |
| DE102007061855A1 (de) | 2007-12-19 | 2009-06-25 | Basf Coatings Ag | Beschichtungsmittel mit hoher Kratzbeständigkeit und Witterungsstabilität |
| DE102007061854A1 (de) | 2007-12-19 | 2009-06-25 | Basf Coatings Ag | Beschichtungsmittel mit hoher Kratzbeständigkeit und Witterungsstabilität |
| DE102007061856A1 (de) | 2007-12-19 | 2009-06-25 | Basf Coatings Ag | Beschichtungsmittel mit hoher Kratzbeständigkeit und Witterungsstabilität |
| JP5187689B2 (ja) * | 2008-08-08 | 2013-04-24 | 学校法人 関西大学 | ナノワイヤ構造体、ナノワイヤ結合体、およびその製造方法 |
| JP5572944B2 (ja) * | 2008-12-18 | 2014-08-20 | 富士通株式会社 | 配線構造体の製造方法及び配線構造体 |
| DE102009024103A1 (de) | 2009-06-06 | 2010-12-09 | Basf Coatings Gmbh | Beschichtungsmittel und daraus hergestellte Beschichtungen mit hoher Kratzfestigkeit und hoher Kocherstabilität |
| CN102064063B (zh) * | 2010-12-24 | 2012-08-29 | 清华大学 | 场发射阴极装置及其制备方法 |
| EP2541581A1 (en) * | 2011-06-29 | 2013-01-02 | Khalid Waqas | Device comprising nanostructures and method of manufacturing thereof |
| WO2013037951A1 (en) * | 2011-09-16 | 2013-03-21 | Danmarks Tekniske Universitet | Catalyst deposition for the preparation of carbon nanotubes |
| CN105984862B (zh) * | 2015-02-16 | 2018-08-28 | 北京大学深圳研究生院 | 用于生长碳纳米管的方法 |
| JP7556246B2 (ja) | 2020-09-23 | 2024-09-26 | セイコーエプソン株式会社 | 発光装置、発光装置の製造方法およびプロジェクター |
| CN114426255B (zh) * | 2020-10-28 | 2025-03-04 | 中国科学技术大学 | 一种微纳米结构定点缺陷掺杂的方法及nv色心传感器 |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2593953B1 (fr) | 1986-01-24 | 1988-04-29 | Commissariat Energie Atomique | Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ |
| FR2687839B1 (fr) * | 1992-02-26 | 1994-04-08 | Commissariat A Energie Atomique | Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source. |
| EP0700063A1 (en) * | 1994-08-31 | 1996-03-06 | International Business Machines Corporation | Structure and method for fabricating of a field emission device |
| JPH08115654A (ja) * | 1994-10-14 | 1996-05-07 | Sony Corp | 粒子放出装置、電界放出型装置及びこれらの製造方法 |
| US5872422A (en) * | 1995-12-20 | 1999-02-16 | Advanced Technology Materials, Inc. | Carbon fiber-based field emission devices |
| JP2000067736A (ja) * | 1998-08-14 | 2000-03-03 | Sony Corp | 電子放出素子およびその製造方法、ならびにこれを用いたディスプレイ装置 |
| JP2000123713A (ja) * | 1998-10-15 | 2000-04-28 | Sony Corp | 電子放出素子およびその製造方法、ならびにこれを用いたディスプレイ装置 |
| JP2000323012A (ja) * | 1999-05-10 | 2000-11-24 | Futaba Corp | 電界放出素子 |
| JP2001023506A (ja) * | 1999-07-07 | 2001-01-26 | Sony Corp | 電子放出源およびその製造方法ならびにディスプレイ装置 |
| US6062931A (en) * | 1999-09-01 | 2000-05-16 | Industrial Technology Research Institute | Carbon nanotube emitter with triode structure |
| FR2798507B1 (fr) | 1999-09-09 | 2006-06-02 | Commissariat Energie Atomique | Dispositif permettant de produire un champ electrique module au niveau d'une electrode et son application aux ecrans plats a emission de champ |
| FR2798508B1 (fr) | 1999-09-09 | 2001-10-05 | Commissariat Energie Atomique | Dispositif permettant de produire un champ electrique module au niveau d'une electrode et son application aux ecrans plats a emission de champ |
| KR100480773B1 (ko) * | 2000-01-07 | 2005-04-06 | 삼성에스디아이 주식회사 | 카본 나노 튜브를 이용한 3극 전계방출소자의 제작방법 |
| JP2002117791A (ja) * | 2000-10-06 | 2002-04-19 | Hitachi Ltd | 画像表示装置 |
| JP3737696B2 (ja) * | 2000-11-17 | 2006-01-18 | 株式会社東芝 | 横型の電界放出型冷陰極装置の製造方法 |
| CA2442985C (en) * | 2001-03-30 | 2016-05-31 | The Regents Of The University Of California | Methods of fabricating nanostructures and nanowires and devices fabricated therefrom |
| US6541906B2 (en) * | 2001-05-23 | 2003-04-01 | Industrial Technology Research Institute | Field emission display panel equipped with a dual-layer cathode and an anode on the same substrate and method for fabrication |
| US6920680B2 (en) | 2001-08-28 | 2005-07-26 | Motorola, Inc. | Method of making vacuum microelectronic device |
| FR2829873B1 (fr) | 2001-09-20 | 2006-09-01 | Thales Sa | Procede de croissance localisee de nanotubes et procede de fabrication de cathode autoalignee utilisant le procede de croissance de nanotubes |
| JP2003115259A (ja) * | 2001-10-03 | 2003-04-18 | Sony Corp | 電子放出装置及びその製造方法、冷陰極電界電子放出素子及びその製造方法、冷陰極電界電子放出表示装置及びその製造方法、並びに、薄膜のエッチング方法 |
| JP2003115257A (ja) * | 2001-10-03 | 2003-04-18 | Sony Corp | 冷陰極電界電子放出素子の製造方法、及び、冷陰極電界電子放出表示装置の製造方法 |
| KR100449071B1 (ko) * | 2001-12-28 | 2004-09-18 | 한국전자통신연구원 | 전계 방출 소자용 캐소드 |
| FR2836279B1 (fr) * | 2002-02-19 | 2004-09-24 | Commissariat Energie Atomique | Structure de cathode pour ecran emissif |
| FR2836280B1 (fr) * | 2002-02-19 | 2004-04-02 | Commissariat Energie Atomique | Structure de cathode a couche emissive formee sur une couche resistive |
| CN100407362C (zh) * | 2002-04-12 | 2008-07-30 | 三星Sdi株式会社 | 场发射显示器 |
| GB2389959B (en) * | 2002-06-19 | 2006-06-14 | Univ Dundee | Improved field emission device |
| JP3890470B2 (ja) * | 2002-07-16 | 2007-03-07 | 日立造船株式会社 | カーボンナノチューブを用いた電子放出素子用電極材料およびその製造方法 |
| US20040037972A1 (en) * | 2002-08-22 | 2004-02-26 | Kang Simon | Patterned granulized catalyst layer suitable for electron-emitting device, and associated fabrication method |
| US7175494B1 (en) * | 2002-08-22 | 2007-02-13 | Cdream Corporation | Forming carbon nanotubes at lower temperatures suitable for an electron-emitting device |
| US6803708B2 (en) * | 2002-08-22 | 2004-10-12 | Cdream Display Corporation | Barrier metal layer for a carbon nanotube flat panel display |
| US6984535B2 (en) * | 2002-12-20 | 2006-01-10 | Cdream Corporation | Selective etching of a protective layer to form a catalyst layer for an electron-emitting device |
| US7064475B2 (en) * | 2002-12-26 | 2006-06-20 | Canon Kabushiki Kaisha | Electron source structure covered with resistance film |
| KR100884527B1 (ko) * | 2003-01-07 | 2009-02-18 | 삼성에스디아이 주식회사 | 전계 방출 표시장치 |
| US7828620B2 (en) * | 2003-01-09 | 2010-11-09 | Sony Corporation | Method of manufacturing tubular carbon molecule and tubular carbon molecule, method of manufacturing field electron emission device and field electron emission device, and method of manufacturing display unit and display unit |
| JP3900094B2 (ja) * | 2003-03-14 | 2007-04-04 | 三菱電機株式会社 | 電子放出素子及びその製造方法ならびに表示装置 |
| JP2004281308A (ja) * | 2003-03-18 | 2004-10-07 | Mitsubishi Electric Corp | 冷陰極電子源及びその製造方法 |
| US7521851B2 (en) * | 2003-03-24 | 2009-04-21 | Zhidan L Tolt | Electron emitting composite based on regulated nano-structures and a cold electron source using the composite |
| JP4083611B2 (ja) * | 2003-03-25 | 2008-04-30 | 三菱電機株式会社 | 冷陰極電子源の製造方法 |
| JP2004362960A (ja) * | 2003-06-05 | 2004-12-24 | Akio Hiraki | 電子放出素子およびその製造方法 |
| JP2005078850A (ja) * | 2003-08-28 | 2005-03-24 | Ulvac Japan Ltd | 炭素系超微細冷陰極およびその製造方法 |
| JP4448356B2 (ja) * | 2004-03-26 | 2010-04-07 | 富士通株式会社 | 半導体装置およびその製造方法 |
| US20050236963A1 (en) * | 2004-04-15 | 2005-10-27 | Kang Sung G | Emitter structure with a protected gate electrode for an electron-emitting device |
| FR2873852B1 (fr) * | 2004-07-28 | 2011-06-24 | Commissariat Energie Atomique | Structure de cathode a haute resolution |
| KR100682863B1 (ko) * | 2005-02-19 | 2007-02-15 | 삼성에스디아이 주식회사 | 탄소나노튜브 구조체 및 그 제조방법과, 탄소나노튜브 구조체를 이용한 전계방출소자 및 그 제조방법 |
| KR100697656B1 (ko) * | 2005-04-28 | 2007-03-22 | 이승호 | 다중 전자 공급원을 구비한 평면 발광 소자 |
| FR2897718B1 (fr) * | 2006-02-22 | 2008-10-17 | Commissariat Energie Atomique | Structure de cathode a nanotubes pour ecran emissif |
-
2005
- 2005-05-30 FR FR0551412A patent/FR2886284B1/fr not_active Expired - Fee Related
-
2006
- 2006-05-29 EP EP06794468.6A patent/EP1885648B1/fr not_active Not-in-force
- 2006-05-29 WO PCT/FR2006/050490 patent/WO2007026086A2/fr not_active Ceased
- 2006-05-29 JP JP2008514165A patent/JP5247438B2/ja active Active
- 2006-05-29 EP EP06820247A patent/EP1885649A2/fr not_active Withdrawn
- 2006-05-29 US US11/915,238 patent/US7993703B2/en not_active Expired - Fee Related
- 2006-05-29 JP JP2008514166A patent/JP2008543008A/ja active Pending
- 2006-05-29 WO PCT/FR2006/050489 patent/WO2007003826A2/fr not_active Ceased
- 2006-05-29 US US11/915,222 patent/US7785164B2/en not_active Expired - Fee Related
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