JP2008542849A5 - - Google Patents

Download PDF

Info

Publication number
JP2008542849A5
JP2008542849A5 JP2008515375A JP2008515375A JP2008542849A5 JP 2008542849 A5 JP2008542849 A5 JP 2008542849A5 JP 2008515375 A JP2008515375 A JP 2008515375A JP 2008515375 A JP2008515375 A JP 2008515375A JP 2008542849 A5 JP2008542849 A5 JP 2008542849A5
Authority
JP
Japan
Prior art keywords
active layer
comb drive
stator
mirror
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008515375A
Other languages
English (en)
Japanese (ja)
Other versions
JP5313666B2 (ja
JP2008542849A (ja
Filing date
Publication date
Priority claimed from US11/144,842 external-priority patent/US7177063B2/en
Application filed filed Critical
Publication of JP2008542849A publication Critical patent/JP2008542849A/ja
Publication of JP2008542849A5 publication Critical patent/JP2008542849A5/ja
Application granted granted Critical
Publication of JP5313666B2 publication Critical patent/JP5313666B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2008515375A 2005-06-06 2006-06-06 Ｍｅｍｓ装置、光制御方法及びミラー形成方法 Expired - Fee Related JP5313666B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/144,842 US7177063B2 (en) 2003-08-12 2005-06-06 Bouncing mode operated scanning micro-mirror
US11/144,842 2005-06-06
PCT/IL2006/000657 WO2006131916A1 (en) 2005-06-06 2006-06-06 Bouncing mode operated scanning micro-mirror

Publications (3)

Publication Number Publication Date
JP2008542849A JP2008542849A (ja) 2008-11-27
JP2008542849A5 true JP2008542849A5 (enExample) 2009-07-23
JP5313666B2 JP5313666B2 (ja) 2013-10-09

Family

ID=37498165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008515375A Expired - Fee Related JP5313666B2 (ja) 2005-06-06 2006-06-06 Ｍｅｍｓ装置、光制御方法及びミラー形成方法

Country Status (5)

Country Link
US (2) US7177063B2 (enExample)
EP (1) EP1889117A4 (enExample)
JP (1) JP5313666B2 (enExample)
KR (1) KR101284542B1 (enExample)
WO (1) WO2006131916A1 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5098254B2 (ja) * 2006-08-29 2012-12-12 富士通株式会社 マイクロ揺動素子
JP2008116699A (ja) * 2006-11-06 2008-05-22 Sony Corp 駆動素子
WO2008087631A1 (en) * 2007-01-16 2008-07-24 Teraop Displays Ltd. A tilting device with integrated motion transformer and amplifier
US7863799B1 (en) 2007-03-02 2011-01-04 AG Microsystems Inc. Micro electro mechanical system using comb and parallel plate actuation
WO2008107870A1 (en) * 2007-03-06 2008-09-12 Btendo Ltd. A mems device having reduced deformations
US7535620B2 (en) * 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
CA2624400A1 (en) * 2007-06-21 2008-12-21 Jds Uniphase Corporation Mems device with an angular vertical comb actuator
WO2009026232A1 (en) * 2007-08-20 2009-02-26 Board Of Regents, The University Of Texas System Apparatus for performing confocal endoscopy
US20100039687A1 (en) * 2008-08-18 2010-02-18 Karthik Kumar Apparatus for Performing Confocal Endoscopy
US8526089B2 (en) 2007-10-05 2013-09-03 Innoluce B.V. MEMS scanning micromirror
JP4503076B2 (ja) * 2008-01-18 2010-07-14 三菱電機株式会社 揺動駆動装置
DE102008001053A1 (de) * 2008-04-08 2009-10-15 Robert Bosch Gmbh Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm oder ein mikromechanisches Bauteil
EP2435356B1 (en) 2009-05-24 2014-01-08 STMicroelectronics International N.V. A method for manufacturing a MOEMS apparatus having aligned structures in two planes
US8238018B2 (en) * 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
WO2010150821A1 (ja) * 2009-06-25 2010-12-29 三洋電機株式会社 共振器
JP5287748B2 (ja) * 2010-01-29 2013-09-11 三菱電機株式会社 光路制御装置および投射型画像表示装置
CN102262293B (zh) * 2010-05-27 2013-04-24 华为技术有限公司 光开关和光开关阵列
US8636911B2 (en) * 2010-10-07 2014-01-28 Magic Technologies, Inc. Process for MEMS scanning mirror with mass remove from mirror backside
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
JP2012226157A (ja) * 2011-04-20 2012-11-15 Sumitomo Precision Prod Co Ltd ミラーデバイス及びその製造方法
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
KR101285589B1 (ko) * 2012-04-10 2013-07-23 연세대학교 산학협력단 미세전자기계시스템을 이용한 트라이볼로지 테스터기, 트라이볼로지 테스터기를 갖는 반도체 패키지
CN102951593B (zh) * 2012-10-17 2015-05-06 东南大学 一种电热驱动调变齿间隙的微机电梳齿机构
CN102897704B (zh) * 2012-10-17 2015-03-04 东南大学 一种静电力调变齿间隙的微机电梳齿机构
US9487386B2 (en) * 2013-01-16 2016-11-08 Infineon Technologies Ag Comb MEMS device and method of making a comb MEMS device
KR101490884B1 (ko) * 2013-09-04 2015-02-06 국방과학연구소 구동형 마이크로 그레이팅 및 이를 이용하는 상관 분광기
US9201239B1 (en) * 2014-03-07 2015-12-01 Advanced Numicro Systems, Inc. Two-dimensional electrostatic scanner with distributed springs
JP6451187B2 (ja) * 2014-09-30 2019-01-16 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
ITUA20162121A1 (it) 2016-03-30 2017-09-30 St Microelectronics Ltd Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile
CN110286388B (zh) 2016-09-20 2020-11-03 创新科技有限公司 激光雷达系统和使用其检测物体的方法及介质
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
DE102018216611B4 (de) * 2018-05-22 2022-01-05 Infineon Technologies Ag MEMS-Bauelement mit Aufhängungsstruktur und Verfahren zum Herstellen eines MEMS-Bauelementes
WO2020080868A1 (ko) * 2018-10-18 2020-04-23 엘지전자 주식회사 스캐너, 및 이를 구비한 전자기기
KR102626254B1 (ko) * 2018-12-04 2024-01-17 현대자동차주식회사 노면상으로 광을 투사하는 자동차 및 그 제어 방법
US11004372B2 (en) 2018-12-11 2021-05-11 Microsoft Technology Licensing, Llc Controlling a scanning mirror system
US12007554B2 (en) * 2020-01-30 2024-06-11 Lumentum Operations Llc Self-aligned vertical comb drive assembly
CN112255781A (zh) * 2020-11-25 2021-01-22 苏州小优智能科技有限公司 一种梯形梳齿、静电梳齿驱动器及mems扫描镜
US11454804B1 (en) 2021-04-08 2022-09-27 Beijing Voyager Technology Co., Ltd. Scanning mirror assembly with torsion springs designed to improve non-linearity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3827977B2 (ja) * 2001-08-20 2006-09-27 富士通株式会社 マイクロミラー素子の製造方法
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
JP2004347663A (ja) * 2003-05-20 2004-12-09 Fujitsu Ltd 光偏向器
JP2005043612A (ja) * 2003-07-28 2005-02-17 Ricoh Co Ltd 光走査装置、光書込装置及び画像形成装置
US7042613B2 (en) * 2003-08-12 2006-05-09 Terraop Ltd. Bouncing mode operated scanning micro-mirror
EP1557703B1 (en) * 2004-01-26 2006-09-27 Yamaichi Electronics Co., Ltd. Actuator with comb-shaped electrode

Similar Documents

Publication Publication Date Title
JP4025990B2 (ja) ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
EP1927873A1 (en) Micromirror device with a hybrid parallel plate and comb drive actuator
EP3070508A1 (en) Optical deflector including mirror with extended reinforcement rib coupled to protruded portions of torsion bar
EP2006247A2 (en) MEMS device with an angular vertical comb actuator
EP2955561A1 (en) Optical deflector apparatus capable of increasing offset deflecting amount of mirror
JP2002131685A (ja) アクチュエ−タ
JP2006337858A (ja) 光変調素子アレイ
WO2009157486A1 (ja) 可動構造体及びそれを用いたマイクロミラー素子
JP3759598B2 (ja) アクチュエータ
JP2011061881A5 (enExample)
JP2014126725A (ja) 走査ミラー装置
KR100724740B1 (ko) 미러 패키지 및 광 스캐너
US9148075B2 (en) MEMS device and methods for manufacturing and using same
JP2007052256A (ja) 回転変位型光変調素子及びこれを用いた光学装置
CN114415365A (zh) Mems光学偏转器件
US8094356B2 (en) Light scanning device and image forming device
JP2007192902A (ja) 微小電気機械素子の駆動方法及び微小電気機械素子アレイの駆動方法、微小電気機械素子及び微小電気機械素子アレイ、並びに画像形成装置
US12013527B2 (en) Two degree-of-freedom actuator and MEMS device
JP2007155984A5 (enExample)
JP2006296138A (ja) 駆動素子
KR20070118619A (ko) 불연속적으로 제어되는 마이크로미러의 회전운동과병진운동의 미세 제어
TW201115186A (en) Discontinuous angles polygon mirror device
CN101990737B (zh) 电极梳、微机械构件和用于电极梳或微机械构件的制造方法
JP5387222B2 (ja) 光偏向器
JP2010134420A (ja) 光走査装置及び画像形成装置