ITUA20162121A1 - Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile - Google Patents

Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile

Info

Publication number
ITUA20162121A1
ITUA20162121A1 ITUA2016A002121A ITUA20162121A ITUA20162121A1 IT UA20162121 A1 ITUA20162121 A1 IT UA20162121A1 IT UA2016A002121 A ITUA2016A002121 A IT UA2016A002121A IT UA20162121 A ITUA20162121 A IT UA20162121A IT UA20162121 A1 ITUA20162121 A1 IT UA20162121A1
Authority
IT
Italy
Prior art keywords
checking
luminous intensity
mems mirror
variable resolution
linear mems
Prior art date
Application number
ITUA2016A002121A
Other languages
English (en)
Inventor
Offir Duvdevany
Dadi Sharon
Sason Sourani
Original Assignee
St Microelectronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Ltd filed Critical St Microelectronics Ltd
Priority to ITUA2016A002121A priority Critical patent/ITUA20162121A1/it
Priority to EP16190250.7A priority patent/EP3226058B1/en
Priority to US15/280,691 priority patent/US10642025B2/en
Publication of ITUA20162121A1 publication Critical patent/ITUA20162121A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
ITUA2016A002121A 2016-03-30 2016-03-30 Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile ITUA20162121A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITUA2016A002121A ITUA20162121A1 (it) 2016-03-30 2016-03-30 Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile
EP16190250.7A EP3226058B1 (en) 2016-03-30 2016-09-22 Method for controlling position of a linear mems mirror with variable resolution and/or light intensity
US15/280,691 US10642025B2 (en) 2016-03-30 2016-09-29 Method for controlling position of a linear MEMS mirror with variable resolution and/or light intensity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A002121A ITUA20162121A1 (it) 2016-03-30 2016-03-30 Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile

Publications (1)

Publication Number Publication Date
ITUA20162121A1 true ITUA20162121A1 (it) 2017-09-30

Family

ID=56235931

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUA2016A002121A ITUA20162121A1 (it) 2016-03-30 2016-03-30 Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile

Country Status (3)

Country Link
US (1) US10642025B2 (it)
EP (1) EP3226058B1 (it)
IT (1) ITUA20162121A1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11004372B2 (en) 2018-12-11 2021-05-11 Microsoft Technology Licensing, Llc Controlling a scanning mirror system
US10484656B1 (en) * 2018-12-12 2019-11-19 Microsoft Technology Licensing, Llc Driver system resonant frequency determination
US11039111B2 (en) * 2019-05-23 2021-06-15 Microsoft Technology Licensing, Llc MEMS control method to provide trajectory control
WO2024161797A1 (ja) * 2023-02-03 2024-08-08 富士フイルム株式会社 画像描画装置、及び画像描画装置の駆動方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003036553A1 (en) * 2001-10-19 2003-05-01 Symbol Technologies, Inc. Electro-optical assembly for image projection, especially in portable instruments
US20050219677A1 (en) * 2003-08-12 2005-10-06 Terraop Ltd. Bouncing mode operated scanning micro-mirror

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030072060A1 (en) * 2001-10-11 2003-04-17 Sason Sourani Optical communication apparatus and system
EP1453234A3 (en) * 2003-02-27 2006-05-17 ECI Telecom Ltd. An optical communication system and method
US7460292B2 (en) * 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
JP5238479B2 (ja) * 2008-04-01 2013-07-17 株式会社トプコン Ｍｅｍｓミラー走査器の駆動方法及びｍｅｍｓアクチュエータ走査器の駆動方法及びｍｅｍｓアクチュエータの回転角制御方法
RU2377509C1 (ru) * 2008-10-03 2009-12-27 Государственное образовательное учреждение высшего профессионального образования Московский государственный институт электронной техники (технический университет) Способ измерения резонансных частот

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003036553A1 (en) * 2001-10-19 2003-05-01 Symbol Technologies, Inc. Electro-optical assembly for image projection, especially in portable instruments
US20050219677A1 (en) * 2003-08-12 2005-10-06 Terraop Ltd. Bouncing mode operated scanning micro-mirror

Also Published As

Publication number Publication date
US20170285327A1 (en) 2017-10-05
EP3226058B1 (en) 2022-03-09
US10642025B2 (en) 2020-05-05
EP3226058A1 (en) 2017-10-04

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