KR101284542B1 - 반발 모드 작동식 주사 미세 거울 - Google Patents

반발 모드 작동식 주사 미세 거울 Download PDF

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KR101284542B1
KR101284542B1 KR1020087000190A KR20087000190A KR101284542B1 KR 101284542 B1 KR101284542 B1 KR 101284542B1 KR 1020087000190 A KR1020087000190 A KR 1020087000190A KR 20087000190 A KR20087000190 A KR 20087000190A KR 101284542 B1 KR101284542 B1 KR 101284542B1
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South Korea
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active layer
mirror
comb drive
stator
delete delete
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English (en)
Korean (ko)
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KR20080026591A (ko
Inventor
슬라바 크릴로브
모쉬 메디나
아비그도 후버
로넨 라레자르
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에스티마이크로일렉트로닉스 인터내셔널 엔브이
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/07—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical liquids exhibiting Kerr effect

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
KR1020087000190A 2005-06-06 2006-06-06 반발 모드 작동식 주사 미세 거울 Expired - Fee Related KR101284542B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/144,842 2005-06-06
US11/144,842 US7177063B2 (en) 2003-08-12 2005-06-06 Bouncing mode operated scanning micro-mirror
PCT/IL2006/000657 WO2006131916A1 (en) 2005-06-06 2006-06-06 Bouncing mode operated scanning micro-mirror

Publications (2)

Publication Number Publication Date
KR20080026591A KR20080026591A (ko) 2008-03-25
KR101284542B1 true KR101284542B1 (ko) 2013-07-15

Family

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KR1020087000190A Expired - Fee Related KR101284542B1 (ko) 2005-06-06 2006-06-06 반발 모드 작동식 주사 미세 거울

Country Status (5)

Country Link
US (2) US7177063B2 (enExample)
EP (1) EP1889117A4 (enExample)
JP (1) JP5313666B2 (enExample)
KR (1) KR101284542B1 (enExample)
WO (1) WO2006131916A1 (enExample)

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JP5098254B2 (ja) * 2006-08-29 2012-12-12 富士通株式会社 マイクロ揺動素子
JP2008116699A (ja) * 2006-11-06 2008-05-22 Sony Corp 駆動素子
WO2008087631A1 (en) * 2007-01-16 2008-07-24 Teraop Displays Ltd. A tilting device with integrated motion transformer and amplifier
US7863799B1 (en) 2007-03-02 2011-01-04 AG Microsystems Inc. Micro electro mechanical system using comb and parallel plate actuation
US8922864B2 (en) * 2007-03-06 2014-12-30 Stmicroelectronics International N.V. MEMS device having reduced deformations
US7535620B2 (en) * 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
US7817331B2 (en) * 2007-06-21 2010-10-19 Jds Uniphase Corporation MEMS device with an angular vertical comb actuator
US20100039687A1 (en) * 2008-08-18 2010-02-18 Karthik Kumar Apparatus for Performing Confocal Endoscopy
WO2009026232A1 (en) * 2007-08-20 2009-02-26 Board Of Regents, The University Of Texas System Apparatus for performing confocal endoscopy
EP2208103B1 (en) 2007-10-05 2013-02-13 Innoluce B.V. Mems scanning micromirror
JP4503076B2 (ja) 2008-01-18 2010-07-14 三菱電機株式会社 揺動駆動装置
DE102008001053A1 (de) * 2008-04-08 2009-10-15 Robert Bosch Gmbh Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm oder ein mikromechanisches Bauteil
WO2010137009A1 (en) * 2009-05-24 2010-12-02 Btendo Ltd A moems apparatus comprising a comb drive and a method for manufacturing same
WO2010139050A1 (en) * 2009-06-01 2010-12-09 Tiansheng Zhou Mems micromirror and micromirror array
WO2010150821A1 (ja) * 2009-06-25 2010-12-29 三洋電機株式会社 共振器
JP5287748B2 (ja) * 2010-01-29 2013-09-11 三菱電機株式会社 光路制御装置および投射型画像表示装置
CN102262293B (zh) * 2010-05-27 2013-04-24 华为技术有限公司 光开关和光开关阵列
US8636911B2 (en) 2010-10-07 2014-01-28 Magic Technologies, Inc. Process for MEMS scanning mirror with mass remove from mirror backside
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
JP2012226157A (ja) * 2011-04-20 2012-11-15 Sumitomo Precision Prod Co Ltd ミラーデバイス及びその製造方法
NL2007554C2 (en) 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
KR101285589B1 (ko) * 2012-04-10 2013-07-23 연세대학교 산학협력단 미세전자기계시스템을 이용한 트라이볼로지 테스터기, 트라이볼로지 테스터기를 갖는 반도체 패키지
CN102897704B (zh) * 2012-10-17 2015-03-04 东南大学 一种静电力调变齿间隙的微机电梳齿机构
CN102951593B (zh) * 2012-10-17 2015-05-06 东南大学 一种电热驱动调变齿间隙的微机电梳齿机构
US9487386B2 (en) * 2013-01-16 2016-11-08 Infineon Technologies Ag Comb MEMS device and method of making a comb MEMS device
KR101490884B1 (ko) * 2013-09-04 2015-02-06 국방과학연구소 구동형 마이크로 그레이팅 및 이를 이용하는 상관 분광기
US9201239B1 (en) * 2014-03-07 2015-12-01 Advanced Numicro Systems, Inc. Two-dimensional electrostatic scanner with distributed springs
JP6451187B2 (ja) * 2014-09-30 2019-01-16 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
ITUA20162121A1 (it) 2016-03-30 2017-09-30 St Microelectronics Ltd Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile
JP6697636B2 (ja) 2016-09-20 2020-05-20 イノヴィズ テクノロジーズ リミテッド Ｌｉｄａｒシステム及び方法
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
DE102018216611B4 (de) * 2018-05-22 2022-01-05 Infineon Technologies Ag MEMS-Bauelement mit Aufhängungsstruktur und Verfahren zum Herstellen eines MEMS-Bauelementes
WO2020080868A1 (ko) * 2018-10-18 2020-04-23 엘지전자 주식회사 스캐너, 및 이를 구비한 전자기기
KR102626254B1 (ko) * 2018-12-04 2024-01-17 현대자동차주식회사 노면상으로 광을 투사하는 자동차 및 그 제어 방법
US11004372B2 (en) 2018-12-11 2021-05-11 Microsoft Technology Licensing, Llc Controlling a scanning mirror system
CN112255781A (zh) * 2020-11-25 2021-01-22 苏州小优智能科技有限公司 一种梯形梳齿、静电梳齿驱动器及mems扫描镜
US11454804B1 (en) * 2021-04-08 2022-09-27 Beijing Voyager Technology Co., Ltd. Scanning mirror assembly with torsion springs designed to improve non-linearity

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JP2004347663A (ja) * 2003-05-20 2004-12-09 Fujitsu Ltd 光偏向器
JP2005043612A (ja) * 2003-07-28 2005-02-17 Ricoh Co Ltd 光走査装置、光書込装置及び画像形成装置
US20050036196A1 (en) * 2003-08-12 2005-02-17 Terraop Ltd Bouncing mode operated scanning micro-mirror

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JP3827977B2 (ja) * 2001-08-20 2006-09-27 富士通株式会社 マイクロミラー素子の製造方法
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
EP1557703B1 (en) * 2004-01-26 2006-09-27 Yamaichi Electronics Co., Ltd. Actuator with comb-shaped electrode

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004347663A (ja) * 2003-05-20 2004-12-09 Fujitsu Ltd 光偏向器
JP2005043612A (ja) * 2003-07-28 2005-02-17 Ricoh Co Ltd 光走査装置、光書込装置及び画像形成装置
US20050036196A1 (en) * 2003-08-12 2005-02-17 Terraop Ltd Bouncing mode operated scanning micro-mirror

Also Published As

Publication number Publication date
US7332367B2 (en) 2008-02-19
KR20080026591A (ko) 2008-03-25
JP2008542849A (ja) 2008-11-27
US20050219677A1 (en) 2005-10-06
JP5313666B2 (ja) 2013-10-09
US7177063B2 (en) 2007-02-13
US20070216986A1 (en) 2007-09-20
WO2006131916A1 (en) 2006-12-14
EP1889117A1 (en) 2008-02-20
EP1889117A4 (en) 2017-01-11

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