JP5313666B2 - Ｍｅｍｓ装置、光制御方法及びミラー形成方法 - Google Patents

Ｍｅｍｓ装置、光制御方法及びミラー形成方法 Download PDF

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JP5313666B2
JP5313666B2 JP2008515375A JP2008515375A JP5313666B2 JP 5313666 B2 JP5313666 B2 JP 5313666B2 JP 2008515375 A JP2008515375 A JP 2008515375A JP 2008515375 A JP2008515375 A JP 2008515375A JP 5313666 B2 JP5313666 B2 JP 5313666B2
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active layer
mirror
substrate
stator
layer
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Japanese (ja)
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JP2008542849A (ja
JP2008542849A5 (enExample
Inventor
クリロヴ、スラヴァ
メディナ、モシェ
フーバー、アヴィグドル
ラレザー、ロネン
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エスティーマイクロエレクトロニクス インターナショナル エヌ．ブイ．
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/07—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical liquids exhibiting Kerr effect

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2008515375A 2005-06-06 2006-06-06 Ｍｅｍｓ装置、光制御方法及びミラー形成方法 Expired - Fee Related JP5313666B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/144,842 US7177063B2 (en) 2003-08-12 2005-06-06 Bouncing mode operated scanning micro-mirror
US11/144,842 2005-06-06
PCT/IL2006/000657 WO2006131916A1 (en) 2005-06-06 2006-06-06 Bouncing mode operated scanning micro-mirror

Publications (3)

Publication Number Publication Date
JP2008542849A JP2008542849A (ja) 2008-11-27
JP2008542849A5 JP2008542849A5 (enExample) 2009-07-23
JP5313666B2 true JP5313666B2 (ja) 2013-10-09

Family

ID=37498165

Family Applications (1)

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JP2008515375A Expired - Fee Related JP5313666B2 (ja) 2005-06-06 2006-06-06 Ｍｅｍｓ装置、光制御方法及びミラー形成方法

Country Status (5)

Country Link
US (2) US7177063B2 (enExample)
EP (1) EP1889117A4 (enExample)
JP (1) JP5313666B2 (enExample)
KR (1) KR101284542B1 (enExample)
WO (1) WO2006131916A1 (enExample)

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JP5098254B2 (ja) * 2006-08-29 2012-12-12 富士通株式会社 マイクロ揺動素子
JP2008116699A (ja) * 2006-11-06 2008-05-22 Sony Corp 駆動素子
WO2008087631A1 (en) * 2007-01-16 2008-07-24 Teraop Displays Ltd. A tilting device with integrated motion transformer and amplifier
US7863799B1 (en) 2007-03-02 2011-01-04 AG Microsystems Inc. Micro electro mechanical system using comb and parallel plate actuation
WO2008107870A1 (en) * 2007-03-06 2008-09-12 Btendo Ltd. A mems device having reduced deformations
US7535620B2 (en) * 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
CA2624400A1 (en) * 2007-06-21 2008-12-21 Jds Uniphase Corporation Mems device with an angular vertical comb actuator
WO2009026232A1 (en) * 2007-08-20 2009-02-26 Board Of Regents, The University Of Texas System Apparatus for performing confocal endoscopy
US20100039687A1 (en) * 2008-08-18 2010-02-18 Karthik Kumar Apparatus for Performing Confocal Endoscopy
US8526089B2 (en) 2007-10-05 2013-09-03 Innoluce B.V. MEMS scanning micromirror
JP4503076B2 (ja) * 2008-01-18 2010-07-14 三菱電機株式会社 揺動駆動装置
DE102008001053A1 (de) * 2008-04-08 2009-10-15 Robert Bosch Gmbh Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm oder ein mikromechanisches Bauteil
EP2435356B1 (en) 2009-05-24 2014-01-08 STMicroelectronics International N.V. A method for manufacturing a MOEMS apparatus having aligned structures in two planes
US8238018B2 (en) * 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
WO2010150821A1 (ja) * 2009-06-25 2010-12-29 三洋電機株式会社 共振器
JP5287748B2 (ja) * 2010-01-29 2013-09-11 三菱電機株式会社 光路制御装置および投射型画像表示装置
CN102262293B (zh) * 2010-05-27 2013-04-24 华为技术有限公司 光开关和光开关阵列
US8636911B2 (en) * 2010-10-07 2014-01-28 Magic Technologies, Inc. Process for MEMS scanning mirror with mass remove from mirror backside
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
JP2012226157A (ja) * 2011-04-20 2012-11-15 Sumitomo Precision Prod Co Ltd ミラーデバイス及びその製造方法
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
KR101285589B1 (ko) * 2012-04-10 2013-07-23 연세대학교 산학협력단 미세전자기계시스템을 이용한 트라이볼로지 테스터기, 트라이볼로지 테스터기를 갖는 반도체 패키지
CN102951593B (zh) * 2012-10-17 2015-05-06 东南大学 一种电热驱动调变齿间隙的微机电梳齿机构
CN102897704B (zh) * 2012-10-17 2015-03-04 东南大学 一种静电力调变齿间隙的微机电梳齿机构
US9487386B2 (en) * 2013-01-16 2016-11-08 Infineon Technologies Ag Comb MEMS device and method of making a comb MEMS device
KR101490884B1 (ko) * 2013-09-04 2015-02-06 국방과학연구소 구동형 마이크로 그레이팅 및 이를 이용하는 상관 분광기
US9201239B1 (en) * 2014-03-07 2015-12-01 Advanced Numicro Systems, Inc. Two-dimensional electrostatic scanner with distributed springs
JP6451187B2 (ja) * 2014-09-30 2019-01-16 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
ITUA20162121A1 (it) 2016-03-30 2017-09-30 St Microelectronics Ltd Metodo di controllo della posizione di uno specchio mems lineare con risoluzione e/o intensita' luminosa variabile
CN110286388B (zh) 2016-09-20 2020-11-03 创新科技有限公司 激光雷达系统和使用其检测物体的方法及介质
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
DE102018216611B4 (de) * 2018-05-22 2022-01-05 Infineon Technologies Ag MEMS-Bauelement mit Aufhängungsstruktur und Verfahren zum Herstellen eines MEMS-Bauelementes
WO2020080868A1 (ko) * 2018-10-18 2020-04-23 엘지전자 주식회사 스캐너, 및 이를 구비한 전자기기
KR102626254B1 (ko) * 2018-12-04 2024-01-17 현대자동차주식회사 노면상으로 광을 투사하는 자동차 및 그 제어 방법
US11004372B2 (en) 2018-12-11 2021-05-11 Microsoft Technology Licensing, Llc Controlling a scanning mirror system
US12007554B2 (en) * 2020-01-30 2024-06-11 Lumentum Operations Llc Self-aligned vertical comb drive assembly
CN112255781A (zh) * 2020-11-25 2021-01-22 苏州小优智能科技有限公司 一种梯形梳齿、静电梳齿驱动器及mems扫描镜
US11454804B1 (en) 2021-04-08 2022-09-27 Beijing Voyager Technology Co., Ltd. Scanning mirror assembly with torsion springs designed to improve non-linearity

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Publication number Priority date Publication date Assignee Title
JP3827977B2 (ja) * 2001-08-20 2006-09-27 富士通株式会社 マイクロミラー素子の製造方法
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
JP2004347663A (ja) * 2003-05-20 2004-12-09 Fujitsu Ltd 光偏向器
JP2005043612A (ja) * 2003-07-28 2005-02-17 Ricoh Co Ltd 光走査装置、光書込装置及び画像形成装置
US7042613B2 (en) * 2003-08-12 2006-05-09 Terraop Ltd. Bouncing mode operated scanning micro-mirror
EP1557703B1 (en) * 2004-01-26 2006-09-27 Yamaichi Electronics Co., Ltd. Actuator with comb-shaped electrode

Also Published As

Publication number Publication date
US20070216986A1 (en) 2007-09-20
WO2006131916A1 (en) 2006-12-14
EP1889117A4 (en) 2017-01-11
KR101284542B1 (ko) 2013-07-15
JP2008542849A (ja) 2008-11-27
US7177063B2 (en) 2007-02-13
KR20080026591A (ko) 2008-03-25
US7332367B2 (en) 2008-02-19
US20050219677A1 (en) 2005-10-06
EP1889117A1 (en) 2008-02-20

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