JP2008539435A - 機械振動子制御エレクトロニクス - Google Patents

機械振動子制御エレクトロニクス Download PDF

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Publication number
JP2008539435A
JP2008539435A JP2008508986A JP2008508986A JP2008539435A JP 2008539435 A JP2008539435 A JP 2008539435A JP 2008508986 A JP2008508986 A JP 2008508986A JP 2008508986 A JP2008508986 A JP 2008508986A JP 2008539435 A JP2008539435 A JP 2008539435A
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JP
Japan
Prior art keywords
signal
output
phase
gyroscope
locked loop
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Pending
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JP2008508986A
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English (en)
Japanese (ja)
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JP2008539435A5 (enExample
Inventor
デンマ，ニック・アンソニー
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Honeywell International Inc
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Honeywell International Inc
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Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2008539435A publication Critical patent/JP2008539435A/ja
Publication of JP2008539435A5 publication Critical patent/JP2008539435A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
    • Y10T74/1229—Gyroscope control

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Control Of Electric Motors In General (AREA)
  • Control Of Ac Motors In General (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
JP2008508986A 2005-04-26 2006-04-24 機械振動子制御エレクトロニクス Pending JP2008539435A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/908,034 US7443257B2 (en) 2005-04-26 2005-04-26 Mechanical oscillator control electronics
PCT/US2006/015411 WO2006116271A2 (en) 2005-04-26 2006-04-24 Mechanical oscillator control electronics

Publications (2)

Publication Number Publication Date
JP2008539435A true JP2008539435A (ja) 2008-11-13
JP2008539435A5 JP2008539435A5 (enExample) 2009-04-30

Family

ID=37027764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008508986A Pending JP2008539435A (ja) 2005-04-26 2006-04-24 機械振動子制御エレクトロニクス

Country Status (6)

Country Link
US (1) US7443257B2 (enExample)
EP (1) EP1875324B1 (enExample)
JP (1) JP2008539435A (enExample)
KR (1) KR101236150B1 (enExample)
DE (1) DE602006018891D1 (enExample)
WO (1) WO2006116271A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017223659A (ja) * 2016-05-11 2017-12-21 株式会社村田製作所 Ｍｅｍｓジャイロスコープのためのデジタル制御装置

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US7769112B2 (en) * 2005-09-29 2010-08-03 Freescale Semiconductor, Inc. Method and system for generating wavelets
US7626530B2 (en) * 2008-05-01 2009-12-01 Robert Bosch Gmbh System and method for improving linearity of electronic circuits with mechanical oscillators
DE102008031609B4 (de) * 2008-07-07 2010-06-02 Albert-Ludwigs-Universität Freiburg Messvorrichtung mit einem mikroelektromechanischen kapazitiven Sensor
DE102009026508A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Sensor und Verfahren zum Betreiben eines Sensors
GB201003539D0 (en) 2010-03-03 2010-04-21 Silicon Sensing Systems Ltd Sensor
US8228130B1 (en) * 2011-02-15 2012-07-24 Texas Instruments Incorporated Circuitry and method for precision amplitude control in quartz and MEMS oscillators
US9091539B2 (en) 2011-06-10 2015-07-28 Honeywell International Inc. Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup
US9523909B2 (en) 2011-09-04 2016-12-20 Maradin Technologies Ltd. Apparatus and methods for locking resonating frequency of a miniature system
FR2988935B1 (fr) * 2012-04-03 2014-04-25 Commissariat Energie Atomique Dispositif de commande de nems a module numerique de retard
GB201313389D0 (en) * 2013-07-26 2013-09-11 Atlantic Inertial Systems Ltd Signal processing
JP6268052B2 (ja) * 2013-08-23 2018-01-24 株式会社東芝 半導体集積回路、および、モータ駆動装置
CN106403920B (zh) * 2015-07-28 2019-02-22 无锡华润上华科技有限公司 加速度器
US11466986B2 (en) 2017-12-14 2022-10-11 Invensense, Inc. Microelectromechanical systems (MEMS) gyroscope sense frequency tracking
CN110311684B (zh) * 2019-07-10 2020-11-27 清华大学 一种基于微机电陀螺的自动调谐带通σ-δ接口电路
DE102019219630A1 (de) * 2019-12-13 2021-06-17 Robert Bosch Gmbh Phasenregelkreis für eine Treiberschaltung zum Betreiben eines MEMS-Gyroskops
DE102020206003A1 (de) * 2020-05-13 2021-11-18 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Betreiben eines mikroelektromechanischen Gyroskops, Gyroskop

Citations (8)

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JPH07336217A (ja) * 1994-06-10 1995-12-22 Matsushita Electric Ind Co Ltd 信号処理回路
JPH0854238A (ja) * 1994-06-06 1996-02-27 Aisin Seiki Co Ltd 振動子駆動回路
JPH08114461A (ja) * 1994-09-30 1996-05-07 Rockwell Internatl Corp 回転速度を感知するためのマイクロマシン化された速度センサシステム、および寄生駆動電圧を最小にする方法
JPH08338729A (ja) * 1995-06-13 1996-12-24 Nikon Corp 自励振回路及びこれを用いた圧電振動角速度計
JPH09284126A (ja) * 1996-04-15 1997-10-31 Sony Corp Ｐｌｌ回路及びデコーダ装置
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2000081335A (ja) * 1998-09-07 2000-03-21 Denso Corp ヨーレートセンサ
JP2000131074A (ja) * 1998-10-28 2000-05-12 Aisin Seiki Co Ltd 静電駆動の角速度検出装置

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US4258579A (en) * 1977-12-19 1981-03-31 The Boeing Company Gyroscope wheel speed modulator
US4331263A (en) * 1979-11-30 1982-05-25 Christopher Scientific Co., Inc. Control unit for use in a vibratory feeder system
US5272922A (en) * 1991-03-06 1993-12-28 Watson Industries, Inc. Vibrating element angular rate sensor system and north seeking gyroscope embodiment thereof
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6164134A (en) * 1999-01-29 2000-12-26 Hughes Electronics Corporation Balanced vibratory gyroscope and amplitude control for same
US6481283B1 (en) * 1999-04-05 2002-11-19 Milli Sensor Systems & Actuators, Inc. Coriolis oscillating gyroscopic instrument
US6311555B1 (en) * 1999-11-17 2001-11-06 American Gnc Corporation Angular rate producer with microelectromechanical system technology
US6456939B1 (en) * 2000-01-04 2002-09-24 Mccall Hiram Micro inertial measurement unit
KR100373484B1 (ko) * 2000-01-27 2003-02-25 국방과학연구소 진동형 마이크로자이로스코프
WO2001069266A1 (en) * 2000-03-13 2001-09-20 Microsensors, Inc. Method of driving mems sensor with balanced four-phase comb drive
JP2001356017A (ja) 2000-06-14 2001-12-26 Alps Electric Co Ltd 振動子の駆動検出装置
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
US6675630B2 (en) * 2001-08-17 2004-01-13 The Boeing Company Microgyroscope with electronic alignment and tuning
DE10240087C5 (de) 2002-08-30 2011-12-01 Austriamicrosystems Ag Vibrationskreisel

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0854238A (ja) * 1994-06-06 1996-02-27 Aisin Seiki Co Ltd 振動子駆動回路
JPH07336217A (ja) * 1994-06-10 1995-12-22 Matsushita Electric Ind Co Ltd 信号処理回路
JPH08114461A (ja) * 1994-09-30 1996-05-07 Rockwell Internatl Corp 回転速度を感知するためのマイクロマシン化された速度センサシステム、および寄生駆動電圧を最小にする方法
JPH08338729A (ja) * 1995-06-13 1996-12-24 Nikon Corp 自励振回路及びこれを用いた圧電振動角速度計
JPH09284126A (ja) * 1996-04-15 1997-10-31 Sony Corp Ｐｌｌ回路及びデコーダ装置
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2000081335A (ja) * 1998-09-07 2000-03-21 Denso Corp ヨーレートセンサ
JP2000131074A (ja) * 1998-10-28 2000-05-12 Aisin Seiki Co Ltd 静電駆動の角速度検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017223659A (ja) * 2016-05-11 2017-12-21 株式会社村田製作所 Ｍｅｍｓジャイロスコープのためのデジタル制御装置

Also Published As

Publication number Publication date
EP1875324B1 (en) 2010-12-15
EP1875324A2 (en) 2008-01-09
US20060238260A1 (en) 2006-10-26
KR20080005445A (ko) 2008-01-11
KR101236150B1 (ko) 2013-02-25
US7443257B2 (en) 2008-10-28
DE602006018891D1 (de) 2011-01-27
WO2006116271A2 (en) 2006-11-02
WO2006116271A3 (en) 2006-11-30

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