FR2988935B1 - Dispositif de commande de nems a module numerique de retard - Google Patents

Dispositif de commande de nems a module numerique de retard

Info

Publication number
FR2988935B1
FR2988935B1 FR1253040A FR1253040A FR2988935B1 FR 2988935 B1 FR2988935 B1 FR 2988935B1 FR 1253040 A FR1253040 A FR 1253040A FR 1253040 A FR1253040 A FR 1253040A FR 2988935 B1 FR2988935 B1 FR 2988935B1
Authority
FR
France
Prior art keywords
nems
controlling
delay module
digital delay
digital
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1253040A
Other languages
English (en)
Other versions
FR2988935A1 (fr
Inventor
Gerard Billiot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1253040A priority Critical patent/FR2988935B1/fr
Priority to PCT/EP2013/056912 priority patent/WO2013150013A1/fr
Priority to US14/390,555 priority patent/US20150166332A1/en
Publication of FR2988935A1 publication Critical patent/FR2988935A1/fr
Application granted granted Critical
Publication of FR2988935B1 publication Critical patent/FR2988935B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/081—Details of the phase-locked loop provided with an additional controlled phase shifter
    • H03L7/0812—Details of the phase-locked loop provided with an additional controlled phase shifter and where no voltage or current controlled oscillator is used
    • H03L7/0816—Details of the phase-locked loop provided with an additional controlled phase shifter and where no voltage or current controlled oscillator is used the controlled phase shifter and the frequency- or phase-detection arrangement being connected to a common input

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
FR1253040A 2012-04-03 2012-04-03 Dispositif de commande de nems a module numerique de retard Expired - Fee Related FR2988935B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1253040A FR2988935B1 (fr) 2012-04-03 2012-04-03 Dispositif de commande de nems a module numerique de retard
PCT/EP2013/056912 WO2013150013A1 (fr) 2012-04-03 2013-04-02 Dispositif de commande de nems a module numerique de retard
US14/390,555 US20150166332A1 (en) 2012-04-03 2013-04-02 Nems control device having a digital delay module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1253040A FR2988935B1 (fr) 2012-04-03 2012-04-03 Dispositif de commande de nems a module numerique de retard

Publications (2)

Publication Number Publication Date
FR2988935A1 FR2988935A1 (fr) 2013-10-04
FR2988935B1 true FR2988935B1 (fr) 2014-04-25

Family

ID=46785530

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1253040A Expired - Fee Related FR2988935B1 (fr) 2012-04-03 2012-04-03 Dispositif de commande de nems a module numerique de retard

Country Status (3)

Country Link
US (1) US20150166332A1 (fr)
FR (1) FR2988935B1 (fr)
WO (1) WO2013150013A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3014094B1 (fr) * 2013-11-29 2016-01-22 Commissariat Energie Atomique Systeme mecanique micro-usine (nems) avec resistances d'adaptation
CN113992195A (zh) * 2021-10-22 2022-01-28 合肥艾创微电子科技有限公司 一种电机驱动系统的开机初始化电路

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6169437B1 (en) * 1999-08-02 2001-01-02 Motorola, Inc. Variable delay module
US6593870B2 (en) * 2001-10-18 2003-07-15 Rockwell Automation Technologies, Inc. MEMS-based electrically isolated analog-to-digital converter
US6614275B1 (en) * 2002-04-04 2003-09-02 Sun Microsystems, Inc. Adjustable capacitances for DLL loop and power supply noise filters
US6995622B2 (en) * 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
US7443257B2 (en) * 2005-04-26 2008-10-28 Honeywell International Inc. Mechanical oscillator control electronics
US7332835B1 (en) * 2006-11-28 2008-02-19 General Electric Company Micro-electromechanical system based switching module serially stackable with other such modules to meet a voltage rating
US8446227B2 (en) 2009-02-04 2013-05-21 Sand 9, Inc. Methods and apparatus for tuning devices having mechanical resonators
WO2011157882A2 (fr) * 2010-06-18 2011-12-22 Baolab Microsystems Sl Accéléromètre à ressort électrostatique instable
US10217045B2 (en) * 2012-07-16 2019-02-26 Cornell University Computation devices and artificial neurons based on nanoelectromechanical systems
FR2994777B1 (fr) * 2012-08-22 2014-08-22 Commissariat Energie Atomique Circuit de mesure de frequence de resonance de nano-resonateurs
US9541396B2 (en) * 2013-01-22 2017-01-10 MCube Inc. Multi-axis integrated inertial sensing device
US9513122B2 (en) * 2013-01-22 2016-12-06 MCube Inc. Integrated MEMs inertial sensing device with automatic gain control
US9109901B2 (en) * 2013-03-08 2015-08-18 Freescale Semiconductor Inc. System and method for monitoring a gyroscope

Also Published As

Publication number Publication date
FR2988935A1 (fr) 2013-10-04
US20150166332A1 (en) 2015-06-18
WO2013150013A1 (fr) 2013-10-10

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20151231