JP2008527712A5 - - Google Patents

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Publication number
JP2008527712A5
JP2008527712A5 JP2007550384A JP2007550384A JP2008527712A5 JP 2008527712 A5 JP2008527712 A5 JP 2008527712A5 JP 2007550384 A JP2007550384 A JP 2007550384A JP 2007550384 A JP2007550384 A JP 2007550384A JP 2008527712 A5 JP2008527712 A5 JP 2008527712A5
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JP
Japan
Prior art keywords
pitch
pattern
circuit elements
dummy
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007550384A
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English (en)
Japanese (ja)
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JP4317576B2 (ja
JP2008527712A (ja
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Publication date
Priority claimed from US10/905,474 external-priority patent/US7269818B2/en
Application filed filed Critical
Publication of JP2008527712A publication Critical patent/JP2008527712A/ja
Publication of JP2008527712A5 publication Critical patent/JP2008527712A5/ja
Application granted granted Critical
Publication of JP4317576B2 publication Critical patent/JP4317576B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007550384A 2005-01-06 2005-12-16 自動生成されたダミー形状にもかかわらず整合する回路素子機能 Expired - Fee Related JP4317576B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/905,474 US7269818B2 (en) 2005-01-06 2005-01-06 Circuit element function matching despite auto-generated dummy shapes
PCT/US2005/045787 WO2006073758A2 (en) 2005-01-06 2005-12-16 Circuit element function matching despite auto-generated dummy shapes

Publications (3)

Publication Number Publication Date
JP2008527712A JP2008527712A (ja) 2008-07-24
JP2008527712A5 true JP2008527712A5 (enExample) 2008-10-09
JP4317576B2 JP4317576B2 (ja) 2009-08-19

Family

ID=36642156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007550384A Expired - Fee Related JP4317576B2 (ja) 2005-01-06 2005-12-16 自動生成されたダミー形状にもかかわらず整合する回路素子機能

Country Status (5)

Country Link
US (2) US7269818B2 (enExample)
EP (1) EP1846851A4 (enExample)
JP (1) JP4317576B2 (enExample)
CN (1) CN101099154B (enExample)
WO (1) WO2006073758A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7269818B2 (en) * 2005-01-06 2007-09-11 International Business Machines Corporation Circuit element function matching despite auto-generated dummy shapes
JP2009053763A (ja) * 2007-08-23 2009-03-12 Nec Electronics Corp ダミーパターン配置装置、ダミーパターン配置方法
CN102445864A (zh) * 2011-10-21 2012-05-09 上海华力微电子有限公司 一种降低光刻对准失效率的方法
US8739078B2 (en) * 2012-01-18 2014-05-27 International Business Machines Corporation Near-neighbor trimming of dummy fill shapes with built-in optical proximity corrections for semiconductor applications
JP6205831B2 (ja) * 2012-07-04 2017-10-04 株式会社ソシオネクスト マスクパターン生成方法、マスクパターン生成装置、及び、マスクパターン生成プログラム

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