JP2008524565A - 座標測定装置ならびに座標測定装置を用いて測定する方法 - Google Patents
座標測定装置ならびに座標測定装置を用いて測定する方法 Download PDFInfo
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- JP2008524565A JP2008524565A JP2007545955A JP2007545955A JP2008524565A JP 2008524565 A JP2008524565 A JP 2008524565A JP 2007545955 A JP2007545955 A JP 2007545955A JP 2007545955 A JP2007545955 A JP 2007545955A JP 2008524565 A JP2008524565 A JP 2008524565A
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- 238000000034 method Methods 0.000 title claims abstract description 165
- 238000005259 measurement Methods 0.000 claims abstract description 328
- 238000012545 processing Methods 0.000 claims description 139
- 230000003287 optical effect Effects 0.000 claims description 71
- 238000011156 evaluation Methods 0.000 claims description 62
- 238000005286 illumination Methods 0.000 claims description 41
- 230000033001 locomotion Effects 0.000 claims description 20
- 230000009021 linear effect Effects 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 10
- 230000005855 radiation Effects 0.000 claims description 10
- 238000013213 extrapolation Methods 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000012937 correction Methods 0.000 claims description 8
- 238000004364 calculation method Methods 0.000 claims description 7
- 238000003325 tomography Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 4
- 230000006872 improvement Effects 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 230000003252 repetitive effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000015654 memory Effects 0.000 claims 17
- 230000000875 corresponding effect Effects 0.000 claims 9
- 230000006399 behavior Effects 0.000 claims 2
- 230000006978 adaptation Effects 0.000 claims 1
- 230000002596 correlated effect Effects 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000005070 sampling Methods 0.000 claims 1
- 230000008569 process Effects 0.000 description 16
- 230000007246 mechanism Effects 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000012952 Resampling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 235000019557 luminance Nutrition 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004061151 | 2004-12-16 | ||
| PCT/EP2005/013526 WO2006063838A1 (de) | 2004-12-16 | 2005-12-16 | Koordinatenmessgerät sowie verfahren zum messen mit einem koordinatenmessgerät |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012055740A Division JP2012137498A (ja) | 2004-12-16 | 2012-03-13 | 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008524565A true JP2008524565A (ja) | 2008-07-10 |
| JP2008524565A5 JP2008524565A5 (enExample) | 2009-02-12 |
Family
ID=35985193
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007545955A Pending JP2008524565A (ja) | 2004-12-16 | 2005-12-16 | 座標測定装置ならびに座標測定装置を用いて測定する方法 |
| JP2012055740A Pending JP2012137498A (ja) | 2004-12-16 | 2012-03-13 | 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012055740A Pending JP2012137498A (ja) | 2004-12-16 | 2012-03-13 | 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20100014099A1 (enExample) |
| EP (5) | EP2224204B1 (enExample) |
| JP (2) | JP2008524565A (enExample) |
| WO (1) | WO2006063838A1 (enExample) |
Cited By (8)
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| JP2010060556A (ja) * | 2008-09-04 | 2010-03-18 | Samsung Heavy Industries Co Ltd | 曲面部材計測システム及び方法 |
| JP2012137498A (ja) * | 2004-12-16 | 2012-07-19 | Werth Messtechnik Gmbh | 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法 |
| JP2012185053A (ja) * | 2011-03-07 | 2012-09-27 | Topcon Corp | パノラマ画像作成方法及び3次元レーザスキャナ |
| US8363904B2 (en) | 2009-10-13 | 2013-01-29 | Mitutoyo Corporation | Offset amount calibrating method and surface texture measuring machine |
| JP2014006121A (ja) * | 2012-06-22 | 2014-01-16 | Nagase Integrex Co Ltd | 距離センサ |
| US8654351B2 (en) | 2009-10-13 | 2014-02-18 | Mitutoyo Corporation | Offset amount calibrating method and surface profile measuring machine |
| US8650939B2 (en) | 2009-10-13 | 2014-02-18 | Mitutoyo Corporation | Surface texture measuring machine and a surface texture measuring method |
| KR101906942B1 (ko) | 2013-11-28 | 2018-10-11 | 헥사곤 테크놀로지 센터 게엠베하 | 공구 중심점에 있는 보정 레이저 헤드를 사용하는 좌표 측정 기계의 보정 방법 |
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| DE102007024197B4 (de) | 2007-05-24 | 2017-01-05 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Formmessung von Freiform-Flächen |
| DE102007036795A1 (de) | 2007-08-03 | 2009-02-05 | Werth Messtechnik Gmbh | Verfahren zum Messen eines Objektes sowie Koordinatenmessgerät |
| DE102007043741A1 (de) * | 2007-09-10 | 2009-03-12 | Eppendorf Ag | Optisches Sensorsystem an einer Vorrichtung zur Behandlung von Flüssigkeiten |
| DE102007051054A1 (de) * | 2007-10-19 | 2009-04-30 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Korrigieren der Messwerte eines Koordinatenmessgeräts und Koordinatenmessgerät |
| DE102008037599A1 (de) | 2008-11-27 | 2010-06-02 | Werth Messtechnik Gmbh | Verfahren zum Messen eines Objektes sowie Koordinatenmessgerät |
| EP2194357A1 (de) * | 2008-12-03 | 2010-06-09 | Leica Geosystems AG | Optisches Sensorelement für eine Messmaschine, und messmaschinenseitiges Kupplungselement hierfür |
| US8378252B2 (en) * | 2009-05-29 | 2013-02-19 | Electro Scientific Industries, Inc. | Method and apparatus for hybrid resolution feedback of a motion stage |
| DE102010017604B4 (de) * | 2009-09-01 | 2016-03-10 | Werth Messtechnik Gmbh | Verfahren zum optischen Messen von Strukturen eines Objekts |
| DE102010060833A1 (de) * | 2009-11-26 | 2011-06-01 | Werth Messtechnik Gmbh | Verfahren und Anordnung zur taktil-optischen Bestimmung der Geometrie eines Messobjektes |
| US8805035B2 (en) | 2010-05-03 | 2014-08-12 | Mim Software, Inc. | Systems and methods for contouring a set of medical images |
| WO2012057283A1 (ja) * | 2010-10-27 | 2012-05-03 | 株式会社ニコン | 形状測定装置、形状測定方法、構造物の製造方法およびプログラム |
| JP5197712B2 (ja) * | 2010-10-27 | 2013-05-15 | キヤノン株式会社 | 撮像装置 |
| DE102010054742A1 (de) | 2010-12-16 | 2012-06-21 | E. Zoller GmbH & Co. KG Einstell- und Messgeräte | Einstell- und/oder Messgerätevorrichtung |
| DE102011050493A1 (de) * | 2011-05-19 | 2012-11-22 | Ludwig-Maximilians-Universität München | Vorrichtung und Verfahren zur Detektion der Auslenkung elastischer Elemente |
| CN103376058A (zh) * | 2012-04-28 | 2013-10-30 | 鸿富锦精密工业(深圳)有限公司 | 温度补偿系统及方法 |
| EP2847541B1 (de) * | 2012-08-07 | 2016-05-18 | Carl Zeiss Industrielle Messtechnik GmbH | KOORDINATENMESSGERÄT MIT WEIßLICHTSENSOR |
| US9188428B2 (en) | 2012-08-07 | 2015-11-17 | Carl Zeiss Industrielle Messtechnik Gmbh | Coordinate measuring machine with selectively active white light sensor |
| CN103673962B (zh) * | 2012-09-12 | 2016-12-21 | 长江大学 | 轮廓线自动量测系统及方法 |
| US9621780B2 (en) * | 2012-10-04 | 2017-04-11 | Nvidia Corporation | Method and system of curve fitting for common focus measures |
| US9392158B2 (en) | 2012-10-04 | 2016-07-12 | Nvidia Corporation | Method and system for intelligent dynamic autofocus search |
| DE102013105623A1 (de) | 2013-05-31 | 2014-12-04 | Werth Messtechnik Gmbh | Verfahren zur Bestimmung von Geometriemerkmalen |
| DE102014108353A1 (de) | 2013-06-13 | 2014-12-18 | Werth Messtechnik Gmbh | Verfahren und Vorrichtung zur Bestimmung von Geometrien an Messobjekten mittels eines kombinierten Sensorsystems |
| CN104089655B (zh) * | 2014-07-16 | 2016-05-25 | 宁波横河模具股份有限公司 | 一种料理机综合测试装置 |
| DE202015103994U1 (de) | 2015-07-30 | 2015-10-06 | Werth Messtechnik Gmbh | Anordnung mit zumindest einer verschiebbaren Wechselstation |
| DE202015104971U1 (de) | 2015-09-18 | 2016-12-20 | Werth Messtechnik Gmbh | Vorrichtung, insbesondere Koordinatenmessgerät mit zumindest einer verschiebbaren Wechselstation oder Rückzugsachse |
| JP6719815B2 (ja) * | 2016-03-16 | 2020-07-08 | 株式会社ミツトヨ | 表面性状測定機の制御方法 |
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- 2005-12-16 JP JP2007545955A patent/JP2008524565A/ja active Pending
- 2005-12-16 EP EP10185231.7A patent/EP2284480B1/de not_active Expired - Lifetime
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012137498A (ja) * | 2004-12-16 | 2012-07-19 | Werth Messtechnik Gmbh | 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法 |
| JP2010060556A (ja) * | 2008-09-04 | 2010-03-18 | Samsung Heavy Industries Co Ltd | 曲面部材計測システム及び方法 |
| US8363904B2 (en) | 2009-10-13 | 2013-01-29 | Mitutoyo Corporation | Offset amount calibrating method and surface texture measuring machine |
| US8654351B2 (en) | 2009-10-13 | 2014-02-18 | Mitutoyo Corporation | Offset amount calibrating method and surface profile measuring machine |
| US8650939B2 (en) | 2009-10-13 | 2014-02-18 | Mitutoyo Corporation | Surface texture measuring machine and a surface texture measuring method |
| JP2012185053A (ja) * | 2011-03-07 | 2012-09-27 | Topcon Corp | パノラマ画像作成方法及び3次元レーザスキャナ |
| JP2014006121A (ja) * | 2012-06-22 | 2014-01-16 | Nagase Integrex Co Ltd | 距離センサ |
| KR101906942B1 (ko) | 2013-11-28 | 2018-10-11 | 헥사곤 테크놀로지 센터 게엠베하 | 공구 중심점에 있는 보정 레이저 헤드를 사용하는 좌표 측정 기계의 보정 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006063838A1 (de) | 2006-06-22 |
| EP2224204A3 (de) | 2013-05-15 |
| EP2284485A3 (de) | 2013-05-15 |
| JP2012137498A (ja) | 2012-07-19 |
| EP2284486A2 (de) | 2011-02-16 |
| EP2284480A2 (de) | 2011-02-16 |
| EP2224204B1 (de) | 2021-05-26 |
| EP2224204A2 (de) | 2010-09-01 |
| EP2284485A2 (de) | 2011-02-16 |
| EP2284480A3 (de) | 2013-05-15 |
| EP2284480B1 (de) | 2014-08-27 |
| EP2284485B1 (de) | 2015-09-16 |
| EP2284486B1 (de) | 2018-04-11 |
| EP2284486A3 (de) | 2013-10-02 |
| EP1846729A1 (de) | 2007-10-24 |
| US20100014099A1 (en) | 2010-01-21 |
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