JP2008224922A5 - - Google Patents
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- Publication number
- JP2008224922A5 JP2008224922A5 JP2007061346A JP2007061346A JP2008224922A5 JP 2008224922 A5 JP2008224922 A5 JP 2008224922A5 JP 2007061346 A JP2007061346 A JP 2007061346A JP 2007061346 A JP2007061346 A JP 2007061346A JP 2008224922 A5 JP2008224922 A5 JP 2008224922A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- deposition material
- liquid crystal
- vapor deposition
- crystal device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 24
- 239000000463 material Substances 0.000 claims 14
- 239000004973 liquid crystal related substance Substances 0.000 claims 12
- 238000007740 vapor deposition Methods 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000010409 thin film Substances 0.000 claims 4
- 239000010408 film Substances 0.000 claims 2
- 230000005484 gravity Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007061346A JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007061346A JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008224922A JP2008224922A (ja) | 2008-09-25 |
JP2008224922A5 true JP2008224922A5 (ko) | 2010-02-25 |
JP5098375B2 JP5098375B2 (ja) | 2012-12-12 |
Family
ID=39843637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007061346A Expired - Fee Related JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5098375B2 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009075459A (ja) * | 2007-09-21 | 2009-04-09 | Fujifilm Corp | 二軸性複屈折体の製造方法、二軸性複屈折体及び液晶プロジェクタ |
WO2018066829A1 (ko) * | 2016-10-04 | 2018-04-12 | 주식회사 셀코스 | 수평배향 액정 디바이스 및 수평배향 액정기판의 배향막 증착방법 |
JP6566977B2 (ja) * | 2017-02-07 | 2019-08-28 | キヤノン株式会社 | 蒸着装置及び蒸着源 |
JP6570561B2 (ja) * | 2017-02-07 | 2019-09-04 | キヤノン株式会社 | 蒸着装置及び蒸着源 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63313123A (ja) * | 1987-06-17 | 1988-12-21 | Konica Corp | 液晶表示素子の製造方法 |
JP3623292B2 (ja) * | 1995-11-21 | 2005-02-23 | 株式会社アルバック | 真空蒸着用基板傾斜自公転装置 |
JP4835826B2 (ja) * | 2005-04-25 | 2011-12-14 | 株式会社昭和真空 | 液晶配向膜用真空蒸着装置およびその成膜方法 |
JP5028584B2 (ja) * | 2005-05-27 | 2012-09-19 | 株式会社昭和真空 | 液晶配向膜用真空蒸着装置およびその成膜方法 |
JP4329738B2 (ja) * | 2005-07-14 | 2009-09-09 | セイコーエプソン株式会社 | 液晶装置の製造装置、液晶装置の製造方法 |
-
2007
- 2007-03-12 JP JP2007061346A patent/JP5098375B2/ja not_active Expired - Fee Related
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