JP2008199570A5 - - Google Patents
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- Publication number
- JP2008199570A5 JP2008199570A5 JP2007129470A JP2007129470A JP2008199570A5 JP 2008199570 A5 JP2008199570 A5 JP 2008199570A5 JP 2007129470 A JP2007129470 A JP 2007129470A JP 2007129470 A JP2007129470 A JP 2007129470A JP 2008199570 A5 JP2008199570 A5 JP 2008199570A5
- Authority
- JP
- Japan
- Prior art keywords
- length
- piezoelectric
- ratio
- piezoelectric layer
- origin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000005452 bending Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007129470A JP5019040B2 (ja) | 2007-01-18 | 2007-05-15 | 圧電振動子、および発振器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007009112 | 2007-01-18 | ||
| JP2007009112 | 2007-01-18 | ||
| JP2007129470A JP5019040B2 (ja) | 2007-01-18 | 2007-05-15 | 圧電振動子、および発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008199570A JP2008199570A (ja) | 2008-08-28 |
| JP2008199570A5 true JP2008199570A5 (enExample) | 2010-06-17 |
| JP5019040B2 JP5019040B2 (ja) | 2012-09-05 |
Family
ID=39758087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007129470A Expired - Fee Related JP5019040B2 (ja) | 2007-01-18 | 2007-05-15 | 圧電振動子、および発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5019040B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6028927B2 (ja) * | 2013-03-27 | 2016-11-24 | セイコーエプソン株式会社 | 振動子の製造方法、振動子、および発振器 |
| CN104505459B (zh) * | 2014-11-27 | 2017-06-30 | 南京航空航天大学 | 一种环形压电换能器的粘胶固化装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167497U (ja) * | 1984-04-13 | 1985-11-07 | 日本電気株式会社 | 超音波センサ− |
| US5023503A (en) * | 1990-01-03 | 1991-06-11 | Motorola, Inc. | Super high frequency oscillator/resonator |
| JP3240219B2 (ja) * | 1993-08-20 | 2001-12-17 | 雅則 奥山 | 超音波センサ |
| JPH07113643A (ja) * | 1993-10-15 | 1995-05-02 | Nikon Corp | 圧電振動角速度計 |
| JPH10173476A (ja) * | 1996-12-06 | 1998-06-26 | Riken Corp | 音叉型圧電振動子 |
| JP3891190B2 (ja) * | 2004-05-21 | 2007-03-14 | ソニー株式会社 | 圧電素子、圧電装置および角速度センサ |
-
2007
- 2007-05-15 JP JP2007129470A patent/JP5019040B2/ja not_active Expired - Fee Related
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