JP2011082782A5 - - Google Patents
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- Publication number
- JP2011082782A5 JP2011082782A5 JP2009233068A JP2009233068A JP2011082782A5 JP 2011082782 A5 JP2011082782 A5 JP 2011082782A5 JP 2009233068 A JP2009233068 A JP 2009233068A JP 2009233068 A JP2009233068 A JP 2009233068A JP 2011082782 A5 JP2011082782 A5 JP 2011082782A5
- Authority
- JP
- Japan
- Prior art keywords
- vibration piece
- bending vibration
- piezoelectric film
- bending
- relaxation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005452 bending Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 125000004430 oxygen atom Chemical group O* 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009233068A JP5375503B2 (ja) | 2009-10-07 | 2009-10-07 | 屈曲振動片 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009233068A JP5375503B2 (ja) | 2009-10-07 | 2009-10-07 | 屈曲振動片 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011082782A JP2011082782A (ja) | 2011-04-21 |
| JP2011082782A5 true JP2011082782A5 (enExample) | 2012-07-19 |
| JP5375503B2 JP5375503B2 (ja) | 2013-12-25 |
Family
ID=44076377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009233068A Expired - Fee Related JP5375503B2 (ja) | 2009-10-07 | 2009-10-07 | 屈曲振動片 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5375503B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5369741B2 (ja) * | 2009-02-12 | 2013-12-18 | セイコーエプソン株式会社 | 振動片および振動子 |
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
| JP2015046807A (ja) * | 2013-08-29 | 2015-03-12 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
| JP6331702B2 (ja) * | 2014-05-29 | 2018-05-30 | セイコーエプソン株式会社 | 電子デバイス、電子機器および移動体 |
| KR102799442B1 (ko) * | 2019-12-31 | 2025-04-22 | 엘지디스플레이 주식회사 | 플렉서블 진동 필름 및 이를 구비한 표시 장치 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007183147A (ja) * | 2006-01-06 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 振動素子およびこの振動素子を用いた角速度センサ |
| JP4533934B2 (ja) * | 2008-01-15 | 2010-09-01 | エプソントヨコム株式会社 | 振動片及び振動子の製造方法 |
-
2009
- 2009-10-07 JP JP2009233068A patent/JP5375503B2/ja not_active Expired - Fee Related
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