JP2008199438A5 - - Google Patents

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Publication number
JP2008199438A5
JP2008199438A5 JP2007034391A JP2007034391A JP2008199438A5 JP 2008199438 A5 JP2008199438 A5 JP 2008199438A5 JP 2007034391 A JP2007034391 A JP 2007034391A JP 2007034391 A JP2007034391 A JP 2007034391A JP 2008199438 A5 JP2008199438 A5 JP 2008199438A5
Authority
JP
Japan
Prior art keywords
electrode
vibrating arm
piezoelectric vibrator
arm
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007034391A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008199438A (ja
JP5034540B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007034391A priority Critical patent/JP5034540B2/ja
Priority claimed from JP2007034391A external-priority patent/JP5034540B2/ja
Publication of JP2008199438A publication Critical patent/JP2008199438A/ja
Publication of JP2008199438A5 publication Critical patent/JP2008199438A5/ja
Application granted granted Critical
Publication of JP5034540B2 publication Critical patent/JP5034540B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007034391A 2007-02-15 2007-02-15 圧電振動子、発振器 Expired - Fee Related JP5034540B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007034391A JP5034540B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007034391A JP5034540B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Publications (3)

Publication Number Publication Date
JP2008199438A JP2008199438A (ja) 2008-08-28
JP2008199438A5 true JP2008199438A5 (enExample) 2010-03-18
JP5034540B2 JP5034540B2 (ja) 2012-09-26

Family

ID=39757973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007034391A Expired - Fee Related JP5034540B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Country Status (1)

Country Link
JP (1) JP5034540B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008245243A (ja) * 2007-02-26 2008-10-09 Epson Toyocom Corp 輪郭振動子、輪郭振動子の調整方法
JP7005988B2 (ja) * 2017-04-27 2022-01-24 セイコーエプソン株式会社 Ｍｅｍｓ素子、電子機器および移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549020A (en) * 1978-10-04 1980-04-08 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS5699929U (enExample) * 1979-12-28 1981-08-06
JP4434537B2 (ja) * 2001-08-27 2010-03-17 パナソニック株式会社 圧電機能部品
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車

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