JP2012080166A5 - - Google Patents

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Publication number
JP2012080166A5
JP2012080166A5 JP2010220621A JP2010220621A JP2012080166A5 JP 2012080166 A5 JP2012080166 A5 JP 2012080166A5 JP 2010220621 A JP2010220621 A JP 2010220621A JP 2010220621 A JP2010220621 A JP 2010220621A JP 2012080166 A5 JP2012080166 A5 JP 2012080166A5
Authority
JP
Japan
Prior art keywords
piezoelectric
support arm
piezoelectric vibrator
wiring
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010220621A
Other languages
English (en)
Japanese (ja)
Other versions
JP5603728B2 (ja
JP2012080166A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010220621A priority Critical patent/JP5603728B2/ja
Priority claimed from JP2010220621A external-priority patent/JP5603728B2/ja
Publication of JP2012080166A publication Critical patent/JP2012080166A/ja
Publication of JP2012080166A5 publication Critical patent/JP2012080166A5/ja
Application granted granted Critical
Publication of JP5603728B2 publication Critical patent/JP5603728B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010220621A 2010-09-30 2010-09-30 圧電振動子 Active JP5603728B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010220621A JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010220621A JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

Publications (3)

Publication Number Publication Date
JP2012080166A JP2012080166A (ja) 2012-04-19
JP2012080166A5 true JP2012080166A5 (enExample) 2013-11-14
JP5603728B2 JP5603728B2 (ja) 2014-10-08

Family

ID=46239954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010220621A Active JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

Country Status (1)

Country Link
JP (1) JP5603728B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
WO2016158048A1 (ja) 2015-03-31 2016-10-06 株式会社村田製作所 共振子
WO2016158045A1 (ja) * 2015-03-31 2016-10-06 株式会社村田製作所 共振子
US10938375B2 (en) 2015-03-31 2021-03-02 Murata Manufacturing Co, Ltd. Resonator
US10778182B2 (en) 2015-03-31 2020-09-15 Murata Manufacturing Co., Ltd. Resonator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931889B2 (ja) * 1976-10-18 1984-08-04 セイコーインスツルメンツ株式会社 圧電振動子
JPS55130416U (enExample) * 1979-03-12 1980-09-16
JPH03130620U (enExample) * 1990-04-13 1991-12-27

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