JP2012080166A5 - - Google Patents

Claims (7)

One or more piezoelectric diaphragms having a pair of excitation electrodes with different polarities on the front and back surfaces, and wiring electrodes extending outwardly from at least one side surface of the piezoelectric diaphragm and electrically connected to the excitation electrodes are formed. In a piezoelectric vibrator having a support arm,
The piezoelectric vibrator according to claim 1, wherein the wiring electrode is formed on the entire outer peripheral surface of the support arm. One or more piezoelectric diaphragms having a pair of excitation electrodes with different polarities on the front and back surfaces, and wiring electrodes extending outward from one side surface of the piezoelectric diaphragm and electrically connected to the respective excitation electrodes are provided. In a piezoelectric vibrator having one support arm,
The support arm is provided with an insulating region extending toward the piezoelectric diaphragm, and a first wiring electrode and a second wiring electrode are formed to be electrically connected to the pair of excitation electrodes in the left-right direction across the insulating region. The piezoelectric vibrator is characterized in that the first wiring electrode and the second wiring electrode are formed on the entire outer peripheral surface of the upper and lower surfaces and side surfaces of the support arm excluding the insulating region. One or more piezoelectric diaphragms having a pair of excitation electrodes with different polarities on the front and back surfaces, and wiring electrodes that extend outward from both opposing side surfaces of the piezoelectric diaphragm and are electrically connected to the excitation electrodes, respectively In a piezoelectric vibrator having a pair of formed support arms,
Each of the support arms is provided with a wiring electrode that is connected to an excitation electrode having a corresponding polarity on the upper and lower surfaces and the entire outer peripheral surface of the side surface.   The piezoelectric vibrator according to claim 1, wherein the wiring electrode is formed by coating a conductive metal thin film along an outer peripheral surface of the support arm.   4. The support arm according to claim 1, wherein the support arm has a quadrangular cross section having upper and lower surfaces and four side surfaces, and the wiring electrodes are formed on the upper and lower surfaces of the support arm and all the four side surfaces. Any one of the piezoelectric vibrators.   4. The piezoelectric vibrator according to claim 1, wherein the piezoelectric vibration plate has a quadrangular shape with contour vibration in a width-longitudinal length-coupled mode. 5.   The piezoelectric vibrator according to claim 1, wherein the support arm extends outward from a substantially central portion of a side surface of the piezoelectric diaphragm.