JP2011199661A5

JP2011199661A5 -

Info

Publication number: JP2011199661A5
Application number: JP2010065016A
Authority: JP
Filing date: 2010-03-19
Publication date: 2013-05-02
Anticipated expiration: 2030-03-19

Description

本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。
［適用例１］
本発明の振動デバイスは、基部と、該基部から第１の方向に延出するとともに、該第１の方向に直交する第２の方向に並んで設けられ、前記第１の方向および前記第２の方向にそれぞれ直交する第３の方向に屈曲振動する複数の振動腕とを備える振動体と、
前記振動体を収納するパッケージと、
前記基部に設けられ、固定材を介して前記振動体を前記パッケージに部分的に固定する固着部と、を有し、
前記固着部は、前記第３の方向から見たときに、前記振動体の重心を通り前記第１の方向に延びる線分上もしくはその近傍に位置していることを特徴とする。 SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The vibrating device of the present invention is provided with a base and a second direction extending from the base in a first direction and arranged in a second direction orthogonal to the first direction, the first direction and the second A vibrating body comprising a plurality of vibrating arms that flexurally vibrate in a third direction orthogonal to the direction of
A package for storing the vibrating body;
A fixing portion that is provided on the base and that partially fixes the vibrating body to the package via a fixing member ;
The adhering portion is located on or near a line segment that passes through the center of gravity of the vibrating body and extends in the first direction when viewed from the third direction.

［適用例６］
本発明の振動デバイスでは、前記基部は、前記第３の方向を厚さ方向とする板状をなし、前記基部の一方の面には、前記固着部が設けられ、前記基部の他方の面上には、前記各振動腕を振動させるための電圧が印加される１対の電極のうちの少なくとも一方の電極が設けられていることが好ましい。
これにより、１つの固着部で振動体をパッケージに簡単に固定することができる。 [Application Example 6]
In the vibration device according to the aspect of the invention, the base portion may have a plate shape with the third direction as a thickness direction, and the fixing portion may be provided on one surface of the base portion, Preferably, at least one of a pair of electrodes to which a voltage for vibrating each vibrating arm is applied is provided.
As a result, the vibrating body can be easily fixed to the package with a single fixing portion.

［適用例１１］
本発明の振動デバイスでは、前記基部は、前記第３の方向を厚さ方向とする板状をなし、前記基部の一方の面には、前記固着部が設けられているとともに、前記各振動腕を振動させるための電圧が印加される１対の電極が前記第３の方向から見たときに前記線分付近に位置するように設けられ、
前記固定材は、導電性を有し、前記固定材を介して前記１対の電極に通電されることが好ましい。
これにより、ボンディングワイヤーを用いることなく、１対の電極に通電を行うことができる。そのため、振動デバイスの構成が簡単となる。 [Application Example 11]
In the vibrating device according to the aspect of the invention, the base portion has a plate shape with the third direction as a thickness direction, and the fixing portion is provided on one surface of the base portion, and each vibrating arm is provided. A pair of electrodes to which a voltage is applied to vibrate is provided so as to be positioned near the line segment when viewed from the third direction;
It is preferable that the fixing material has electrical conductivity, and the pair of electrodes are energized through the fixing material.
Thereby, it can energize to a pair of electrodes, without using a bonding wire. Therefore, the configuration of the vibration device is simplified.

Claims

A base portion, a first portion extending from the base portion in a first direction, and provided side by side in a second direction orthogonal to the first direction, each orthogonal to the first direction and the second direction; A vibrating body comprising a plurality of vibrating arms that flexurally vibrate in three directions;
A package for storing the vibrating body;
A fixing portion that is provided on the base and that partially fixes the vibrating body to the package via a fixing member ;
The vibration device according to claim 1, wherein the fixing portion is located on or near a line segment extending in the first direction through the center of gravity of the vibrating body when viewed from the third direction.

The vibrating device according to claim 1, wherein the fixing portion is provided in the vicinity of the center of gravity of the vibrating body when viewed from the third direction.

The vibrating device according to claim 2, wherein the vibrating body is configured such that a center of gravity thereof is located in the base portion.

4. The vibrating device according to claim 3, wherein the base has a portion whose thickness in the third direction is larger than the thickness of the vibrating arms in the third direction.

5. The vibration device according to claim 2, wherein the fixed portion is provided so that a center thereof coincides with a center of gravity of the vibrating body when viewed from the third direction.

The base portion has a plate shape with the third direction as a thickness direction, the fixing portion is provided on one surface of the base portion, and the vibrating arms are provided on the other surface of the base portion. The vibration device according to claim 5, wherein at least one of a pair of electrodes to which a voltage for vibrating the electrode is applied is provided.

The vibrating device according to claim 6, wherein the electrode provided on the other surface of the base is provided so as to be positioned in the vicinity of the line segment when viewed from the third direction.

The vibrating device according to claim 6 or 7, wherein each of the pair of electrodes is provided on the other surface of the base.

The vibrating device according to claim 8, wherein the pair of electrodes are provided so as to be arranged along the line segment when viewed from the third direction.

Of the pair of electrodes, one electrode is provided on the one surface of the base, and the other electrode is provided on the other surface of the base.
The vibrating device according to claim 6, wherein the fixing member has conductivity and is energized to the other electrode through the fixing member.

The base portion has a plate shape with the third direction as a thickness direction, the fixing portion is provided on one surface of the base portion, and a voltage for vibrating the vibrating arms is provided. A pair of electrodes to be applied are provided so as to be positioned near the line segment when viewed from the third direction;
5. The vibrating device according to claim 2, wherein the fixing member has conductivity and is energized to the pair of electrodes via the fixing member.

The vibrating device according to claim 11, wherein a pair of the fixing portions is provided so as to be symmetric with respect to the line segment when viewed from the third direction.

The vibrating device according to claim 11, wherein a pair of the fixing portions are provided so as to be aligned along the line segment when viewed from the third direction.

The vibrating body includes three vibrating arms,
The vibrating device according to claim 1, wherein the three vibrating arms are configured such that two adjacent vibrating arms bend and vibrate in directions opposite to each other.

The vibration according to claim 14, wherein a width of the fixing portion in the second direction is smaller than a separation distance in the second direction between two outer vibrating arms of the three vibrating arms. device.

The vibrating body includes a first electrode layer provided on the vibrating arm, a piezoelectric layer provided on the first electrode layer, and a second electrode layer provided on the piezoelectric layer. And a piezoelectric element that vibrates the vibrating arm by expanding and contracting the piezoelectric layer by energizing between the first electrode layer and the second electrode layer. 15. The vibration device according to any one of 15.