JP2010050960A5 - - Google Patents

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JP2010050960A5
JP2010050960A5 JP2009169705A JP2009169705A JP2010050960A5 JP 2010050960 A5 JP2010050960 A5 JP 2010050960A5 JP 2009169705 A JP2009169705 A JP 2009169705A JP 2009169705 A JP2009169705 A JP 2009169705A JP 2010050960 A5 JP2010050960 A5 JP 2010050960A5
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Japan
Prior art keywords
groove
pair
piezoelectric
excitation electrode
base
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JP2009169705A
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Japanese (ja)
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JP4838873B2 (en
JP2010050960A (en
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Priority to JP2009169705A priority Critical patent/JP4838873B2/en
Priority claimed from JP2009169705A external-priority patent/JP4838873B2/en
Publication of JP2010050960A publication Critical patent/JP2010050960A/en
Publication of JP2010050960A5 publication Critical patent/JP2010050960A5/ja
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Publication of JP4838873B2 publication Critical patent/JP4838873B2/en
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Claims (12)

基部の一端側から所定方向に伸びる一対の振動腕と、
前記一対の振動腕の表裏に形成される溝部と、
前記基部から前記溝部に形成され、前記振動腕の励振する励振電極と、
前記基部の前記一端側から且つ前記振動腕の両外側において前記所定方向に伸びる一対の支持腕と、を備え、
前記励振電極が前記基部側から前記溝部の途中まで形成されていることを特徴とする圧電振動片。 A pair of vibrating arms extending in a predetermined direction from one end of the base;
A groove formed on the front and back of the pair of vibrating arms;
An excitation electrode formed from the base to the groove and exciting the vibrating arm;
A pair of support arms extending in the predetermined direction from the one end side of the base and on both outer sides of the vibrating arm ,
The piezoelectric vibrating piece, wherein the excitation electrode is formed from the base side to the middle of the groove . 前記溝部の長さをＭ、前記励振電極の前記基部側からの長さをｍとしたとき、以下の関係が成り立つことを特徴とする請求項１に記載の圧電振動片。2. The piezoelectric vibrating piece according to claim 1, wherein the following relationship is established, where M is a length of the groove and m is a length of the excitation electrode from the base side.
前記励振電極は前記振動腕の先端側から前記励振電極の幅方向の中央領域に電極がないスリット領域を有しており、
前記溝内に形成された前記励振電極の表面積をｓｑ、前記溝内の表面積をＳＱとしたとき、以下の関係が成り立つことを特徴とする請求項２に記載の圧電振動片。
The excitation electrode has a slit region where there is no electrode in the center region in the width direction of the excitation electrode from the tip side of the vibrating arm,
3. The piezoelectric vibrating piece according to claim 2 , wherein the following relationship is established, where sq is a surface area of the excitation electrode formed in the groove and SQ is a surface area in the groove.
前記励振電極の幅方向の中央領域は前記溝部の底面であることを特徴とする請求項３に記載の圧電振動片。 The piezoelectric vibrating piece according to claim 3 , wherein a central region in the width direction of the excitation electrode is a bottom surface of the groove. 前記一対の振動腕の間に形成される振動根元部と前記一対の振動腕と一対の支持腕との間に形成される支持根元部とは、同一形状であることを特徴とする請求項１ないし請求項４のいずれか一項に記載の圧電振動片。   2. The vibration root portion formed between the pair of vibration arms and the support root portion formed between the pair of vibration arms and the pair of support arms have the same shape. The piezoelectric vibrating piece according to any one of claims 4 to 4. 前記溝部の幅は前記振動腕の幅の４０パーセントから６５パーセントであり、前記振動腕の厚さは振動腕の幅の２倍以上であることを特徴とする請求項１ないし請求項５のいずれか一項に記載の圧電振動片。   6. The width of the groove is 40% to 65% of the width of the vibrating arm, and the thickness of the vibrating arm is more than twice the width of the vibrating arm. The piezoelectric vibrating piece according to claim 1. 前記一対の振動腕の先端側には、前記溝部が形成された領域の幅よりも幅が広い錘部が形成されていることを特徴とする請求項１ないし請求項６のいずれか一項に記載の圧電振動片。   The weight portion having a width wider than the width of the region in which the groove portion is formed is formed on the tip side of the pair of vibrating arms. The piezoelectric vibrating piece according to the description. 請求項１ないし請求項７のいずれか一項に記載の圧電振動片と、
この圧電振動片を覆う蓋部と、
前記圧電振動片を支えるベースと、
を備えることを特徴とする圧電デバイス。 The piezoelectric vibrating piece according to any one of claims 1 to 7,
A lid covering this piezoelectric vibrating piece;
A base that supports the piezoelectric vibrating piece;
A piezoelectric device comprising: 基部の一端側から所定方向に伸びる一対の振動腕と、
前記一対の振動腕の表裏に形成される溝部と、
前記基部から前記溝部に形成され、前記振動腕の励振する励振電極と、
前記一対の振動腕の両外側において前記基部の前記一端側から前記所定方向に伸びる一対の支持腕と、
前記一対の支持腕から前記所定方向と交差する方向に伸びる調整腕と、
前記調整腕と接続されるとともに前記基部及び前記振動腕を囲む外枠部と、を備え、
前記励振電極が前記基部側から前記溝部の途中まで形成されていることを特徴とする圧電振動片。 A pair of vibrating arms extending in a predetermined direction from one end of the base;
A groove formed on the front and back of the pair of vibrating arms;
An excitation electrode formed from the base to the groove and exciting the vibrating arm;
A pair of support arms extending in the predetermined direction from the one end side of the base on both outer sides of the pair of vibrating arms;
An adjustment arm extending from the pair of support arms in a direction intersecting the predetermined direction;
An outer frame portion connected to the adjustment arm and surrounding the base and the vibrating arm,
The piezoelectric vibrating piece, wherein the excitation electrode is formed from the base side to the middle of the groove . 前記溝部の長さをＭ、前記励振電極の前記基部側からの長さをｍとしたとき、以下の関係が成り立つことを特徴とする請求項９に記載の圧電振動片。
 10. The piezoelectric vibrating piece according to claim 9, wherein the following relationship is established, where M is a length of the groove and m is a length of the excitation electrode from the base side .
前記励振電極は前記振動腕の先端側から前記励振電極の幅方向の中央領域に電極がないスリット領域を有しており、
前記溝内に形成された前記励振電極の表面積をｓｑ、前記溝内の表面積をＳＱとしたとき、以下の関係が成り立つことを特徴とする請求項１０に記載の圧電振動片。
The excitation electrode has a slit region where there is no electrode in the center region in the width direction of the excitation electrode from the tip side of the vibrating arm,
11. The piezoelectric vibrating piece according to claim 10 , wherein the following relationship is established, where sq is a surface area of the excitation electrode formed in the groove and SQ is a surface area in the groove.
請求項９から請求項１１のいずれか一項に記載の圧電フレームと、
この圧電フレームを覆う蓋部と、
前記圧電フレームを支えるベースと、
を備えることを特徴とする圧電デバイス。
A piezoelectric frame according to any one of claims 9 to 11 ,
A lid that covers this piezoelectric frame;
A base that supports the piezoelectric frame;
A piezoelectric device comprising:
JP2009169705A 2008-07-22 2009-07-21 Piezoelectric vibrating piece and piezoelectric device Expired - Fee Related JP4838873B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009169705A JP4838873B2 (en) 2008-07-22 2009-07-21 Piezoelectric vibrating piece and piezoelectric device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008188182 2008-07-22
JP2008188182 2008-07-22
JP2009169705A JP4838873B2 (en) 2008-07-22 2009-07-21 Piezoelectric vibrating piece and piezoelectric device

Publications (3)

Publication Number Publication Date
JP2010050960A JP2010050960A (en) 2010-03-04
JP2010050960A5 true JP2010050960A5 (en) 2011-07-21
JP4838873B2 JP4838873B2 (en) 2011-12-14

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Family Applications (1)

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JP2009169705A Expired - Fee Related JP4838873B2 (en) 2008-07-22 2009-07-21 Piezoelectric vibrating piece and piezoelectric device

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Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102025342B (en) 2009-09-18 2014-12-17 精工爱普生株式会社 Vibration reed, vibrator, oscillator and electronic device
JP5617392B2 (en) 2010-07-09 2014-11-05 セイコーエプソン株式会社 Vibrating piece, vibrator and oscillator
JP5659585B2 (en) 2010-07-09 2015-01-28 セイコーエプソン株式会社 Vibrating piece, vibrator, oscillator and electronic device
JP2012054893A (en) * 2010-09-03 2012-03-15 Nippon Dempa Kogyo Co Ltd Tuning fork type crystal vibrating piece and crystal device
JP5534448B2 (en) * 2010-09-29 2014-07-02 エスアイアイ・クリスタルテクノロジー株式会社 Piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device and radio clock
JP5912557B2 (en) * 2011-03-29 2016-04-27 日本電波工業株式会社 Tuning fork type piezoelectric vibrating piece and piezoelectric device
JP6094672B2 (en) 2013-05-13 2017-03-15 株式会社村田製作所 Vibration device
JP2015023422A (en) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 Vibration piece, vibrator, oscillator, electronic apparatus and mobile
JP2015015770A (en) * 2014-10-09 2015-01-22 セイコーエプソン株式会社 Bending vibration piece, vibrator, oscillator, and electronic device
JP6479509B2 (en) * 2015-03-09 2019-03-06 シチズン時計株式会社 Piezoelectric vibrator
JP6647911B2 (en) * 2016-02-23 2020-02-14 エスアイアイ・クリスタルテクノロジー株式会社 Piezoelectric vibrating reed and piezoelectric vibrator
JP2019087774A (en) * 2017-11-01 2019-06-06 京セラ株式会社 Tuning fork type crystal vibrating element and piezoelectric device
JP7060073B2 (en) 2020-12-23 2022-04-26 セイコーエプソン株式会社 Vibrating elements, oscillators, oscillators, electronic devices and mobiles

Family Cites Families (5)

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JPS5458395A (en) * 1977-10-19 1979-05-11 Matsushima Kogyo Kk Piezooelectric vibrator
JPH01236808A (en) * 1988-03-17 1989-09-21 Matsushima Kogyo Co Ltd Tortion crystal resonator
JP3931662B2 (en) * 2001-01-15 2007-06-20 セイコーエプソン株式会社 Vibrating piece, vibrator, oscillator and electronic device
JP2004282230A (en) * 2003-03-13 2004-10-07 Seiko Epson Corp Piezoelectric oscillating piece, piezoelectric device using this, portable telephone using this and electronic apparatus
JP2008022413A (en) * 2006-07-14 2008-01-31 Epson Toyocom Corp Piezoelectric vibration chip and piezoelectric device

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