JP2009042240A5 - - Google Patents
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- Publication number
- JP2009042240A5 JP2009042240A5 JP2008253520A JP2008253520A JP2009042240A5 JP 2009042240 A5 JP2009042240 A5 JP 2009042240A5 JP 2008253520 A JP2008253520 A JP 2008253520A JP 2008253520 A JP2008253520 A JP 2008253520A JP 2009042240 A5 JP2009042240 A5 JP 2009042240A5
- Authority
- JP
- Japan
- Prior art keywords
- base
- acceleration sensor
- vibrating
- vibrating arm
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001133 acceleration Effects 0.000 claims 5
- 230000005284 excitation Effects 0.000 claims 1
- 230000005484 gravity Effects 0.000 claims 1
Claims (3)
前記第1基部から前記第2基部に向けて延出された第1振動腕および第2振動腕と、
前記第2基部から前記第1基部に向けて延出された第3振動腕および第4振動腕と、
前記第1〜第4振動腕の先端部を連結する連結部と、を備えた振動体であって、
前記第1〜第4振動腕の各々は、貫通孔によって複数の振動腕部に分割された部分を有し、
各々の前記振動腕部の側面には励振電極が形成されたことを特徴とする加速度センサ。 A first base and a second base disposed on the first axis;
A first vibrating arm and a second vibrating arm extending from the first base toward the second base;
A third vibrating arm and a fourth vibrating arm extending from the second base toward the first base;
A connecting part that connects the tip parts of the first to fourth vibrating arms;
Each of the first to fourth vibrating arms has a portion divided into a plurality of vibrating arm portions by through holes,
The acceleration sensor on the side of the vibrating arms each characterized that you excitation electrode is formed.
前記連結部は、前記第1基部または前記第2基部と同等の質量か、前記第1基部または前記第2基部よりも大きい質量を備えたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1,
The acceleration sensor , wherein the connecting portion has a mass equivalent to that of the first base portion or the second base portion, or greater than that of the first base portion or the second base portion .
前記振動体は、前記連結部の重心位置に対して点対称に形成されたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1 or 2,
2. The acceleration sensor according to claim 1, wherein the vibrating body is formed point-symmetrically with respect to a center of gravity position of the connecting portion .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008253520A JP2009042240A (en) | 2006-10-13 | 2008-09-30 | Acceleration sensor |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006279508 | 2006-10-13 | ||
JP2007017439 | 2007-01-29 | ||
JP2008253520A JP2009042240A (en) | 2006-10-13 | 2008-09-30 | Acceleration sensor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007159832A Division JP2008209389A (en) | 2006-10-13 | 2007-06-18 | Acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009042240A JP2009042240A (en) | 2009-02-26 |
JP2009042240A5 true JP2009042240A5 (en) | 2010-07-22 |
Family
ID=39785793
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007159832A Withdrawn JP2008209389A (en) | 2006-10-13 | 2007-06-18 | Acceleration sensor |
JP2007159831A Withdrawn JP2008209388A (en) | 2006-10-13 | 2007-06-18 | Acceleration sensor |
JP2008253519A Withdrawn JP2009042239A (en) | 2006-10-13 | 2008-09-30 | Acceleration sensor |
JP2008253520A Withdrawn JP2009042240A (en) | 2006-10-13 | 2008-09-30 | Acceleration sensor |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007159832A Withdrawn JP2008209389A (en) | 2006-10-13 | 2007-06-18 | Acceleration sensor |
JP2007159831A Withdrawn JP2008209388A (en) | 2006-10-13 | 2007-06-18 | Acceleration sensor |
JP2008253519A Withdrawn JP2009042239A (en) | 2006-10-13 | 2008-09-30 | Acceleration sensor |
Country Status (2)
Country | Link |
---|---|
JP (4) | JP2008209389A (en) |
CN (1) | CN101162237B (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5446187B2 (en) | 2008-09-17 | 2014-03-19 | セイコーエプソン株式会社 | Vibrating piece and vibration type sensor |
JP5375624B2 (en) * | 2010-01-18 | 2013-12-25 | セイコーエプソン株式会社 | Acceleration sensor and acceleration detection device |
JP5703731B2 (en) * | 2010-12-14 | 2015-04-22 | セイコーエプソン株式会社 | Electronics |
JP5560805B2 (en) * | 2010-03-19 | 2014-07-30 | セイコーエプソン株式会社 | Gyro element, gyro sensor, and electronic device |
JP5341807B2 (en) | 2010-03-26 | 2013-11-13 | 株式会社東芝 | Acceleration sensor |
DE102010030878B4 (en) * | 2010-07-02 | 2023-08-17 | Robert Bosch Gmbh | Micromechanical sensor device for measuring an acceleration, a pressure and the like |
US9759739B2 (en) | 2011-02-02 | 2017-09-12 | Honeywell International Inc. | MEMS vibrating-beam accelerometer with piezoelectric drive |
JP2014052263A (en) * | 2012-09-06 | 2014-03-20 | Nippon Dempa Kogyo Co Ltd | External force detection device and external force detection sensor |
CN103197101A (en) * | 2013-04-18 | 2013-07-10 | 厦门乃尔电子有限公司 | Non-uniform section cantilever beam piezoelectricity accelerating speed sensor |
JP2015179933A (en) * | 2014-03-19 | 2015-10-08 | セイコーエプソン株式会社 | Vibration element, gyro sensor element, electronic device, electronic apparatus and moving body |
JP6044607B2 (en) * | 2014-08-28 | 2016-12-14 | 横河電機株式会社 | Vibration sensor device |
CN105429607B (en) * | 2014-09-16 | 2020-12-29 | 精工爱普生株式会社 | Vibration device, electronic apparatus, and moving object |
CN105865666B (en) * | 2016-05-03 | 2018-11-20 | 成都皆为科技有限公司 | A kind of integral type biquartz tuning fork resonant sensitive element and force-measuring module |
GB2561887B (en) * | 2017-04-27 | 2022-10-05 | Cambridge Entpr Ltd | High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement |
DE102017217975A1 (en) * | 2017-10-10 | 2019-04-11 | Robert Bosch Gmbh | Micromechanical spring structure |
JP7331881B2 (en) * | 2021-04-20 | 2023-08-23 | 株式会社豊田中央研究所 | Acceleration sensor and acceleration sensor device |
CN114280329A (en) * | 2021-12-27 | 2022-04-05 | 西安交通大学 | Quartz acceleration sensor with tuning fork fixedly supported at two ends |
CN113985067A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof |
US11953514B2 (en) | 2022-04-02 | 2024-04-09 | Emcore Corporation | Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes |
US11965907B2 (en) | 2022-04-02 | 2024-04-23 | Emcore Corporation | Resonantly vibrating accelerometer driven in multiple vibrational modes |
US11959935B2 (en) | 2022-04-02 | 2024-04-16 | Emcore Corporation | Resonantly vibrating accelerometer with cross-coupling signal suppression |
CN114814334B (en) * | 2022-04-14 | 2023-05-16 | 南京高华科技股份有限公司 | Current sensor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3238789A (en) * | 1961-07-14 | 1966-03-08 | Litton Systems Inc | Vibrating bar transducer |
JPS61165624A (en) * | 1977-06-07 | 1986-07-26 | マイクロ・モ−シヨン・インコ−ポレ−テツド | Flowmeter |
GB8418914D0 (en) * | 1984-07-25 | 1984-08-30 | Standard Telephones Cables Ltd | Transducer |
FR2574209B1 (en) * | 1984-12-04 | 1987-01-30 | Onera (Off Nat Aerospatiale) | RESONATOR WITH VIBRATING BLADE |
US5331242A (en) * | 1992-11-18 | 1994-07-19 | Alliedsignal Inc. | Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode |
JP3368744B2 (en) * | 1996-03-27 | 2003-01-20 | 株式会社豊田中央研究所 | Vibration acceleration sensor |
JP4806850B2 (en) * | 2001-01-24 | 2011-11-02 | パナソニック株式会社 | Actuator |
JP2003149261A (en) * | 2001-11-16 | 2003-05-21 | Matsushita Electric Ind Co Ltd | Acceleration sensor and automobile using the same |
-
2007
- 2007-06-18 JP JP2007159832A patent/JP2008209389A/en not_active Withdrawn
- 2007-06-18 JP JP2007159831A patent/JP2008209388A/en not_active Withdrawn
- 2007-10-11 CN CN2007101524273A patent/CN101162237B/en not_active Expired - Fee Related
-
2008
- 2008-09-30 JP JP2008253519A patent/JP2009042239A/en not_active Withdrawn
- 2008-09-30 JP JP2008253520A patent/JP2009042240A/en not_active Withdrawn
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