JP2009042239A5 - - Google Patents

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Publication number
JP2009042239A5
JP2009042239A5 JP2008253519A JP2008253519A JP2009042239A5 JP 2009042239 A5 JP2009042239 A5 JP 2009042239A5 JP 2008253519 A JP2008253519 A JP 2008253519A JP 2008253519 A JP2008253519 A JP 2008253519A JP 2009042239 A5 JP2009042239 A5 JP 2009042239A5
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JP
Japan
Prior art keywords
vibrating arm
base
acceleration sensor
vibrating
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008253519A
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Japanese (ja)
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JP2009042239A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2008253519A priority Critical patent/JP2009042239A/en
Priority claimed from JP2008253519A external-priority patent/JP2009042239A/en
Publication of JP2009042239A publication Critical patent/JP2009042239A/en
Publication of JP2009042239A5 publication Critical patent/JP2009042239A5/ja
Withdrawn legal-status Critical Current

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Claims (3)

第１軸上に配置された第１基部および第２基部と、
前記第１基部から前記第２基部に向けて延出された第１振動腕と、
前記第２基部から前記第１基部に向けて延出された第２振動腕と、
前記第１振動腕と前記第２振動腕とを連結した連結部と、を備えた振動体であって、
前記第１振動腕および前記第２振動腕の各々は、貫通孔によって複数の振動腕部に分割され、
前記振動腕部の各々は、湾曲して形成されており、且つ、前記第１軸に対して前記第１振動腕の前記振動腕部同士および前記第２振動腕の前記振動腕部同士が互いに線対称に形成されたことを特徴とする加速度センサ。 A first base and a second base disposed on the first axis;
A first vibrating arm extending from the first base toward the second base;
A second vibrating arm extending from the second base toward the first base;
A vibrating body comprising: a connecting portion connecting the first vibrating arm and the second vibrating arm;
Each of the first vibrating arm and the second vibrating arm is divided into a plurality of vibrating arm portions by a through hole,
Each of the vibrating arm portions is formed to be curved, and the vibrating arm portions of the first vibrating arm and the vibrating arm portions of the second vibrating arm are mutually connected with respect to the first axis. an acceleration sensor, characterized that it has been formed in line symmetry. 請求項１に記載の加速度センサにおいて、
前記連結部は、前記第１基部または前記第２基部と同等の質量か、前記第１基部または前記第２基部よりも大きい質量を備えたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1,
The acceleration sensor , wherein the connecting portion has a mass equivalent to that of the first base portion or the second base portion, or greater than that of the first base portion or the second base portion . 請求項１または２に記載の加速度センサにおいて、
前記振動体は、前記連結部の重心位置に対して点対称に形成されたことを特徴とする加速度センサ。 In the acceleration sensor according to請Motomeko 1 or 2,
2. The acceleration sensor according to claim 1, wherein the vibrating body is formed point-symmetrically with respect to a center of gravity position of the connecting portion .
JP2008253519A 2006-10-13 2008-09-30 Acceleration sensor Withdrawn JP2009042239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008253519A JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006279508 2006-10-13
JP2007017439 2007-01-29
JP2008253519A JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007159831A Division JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor

Publications (2)

Publication Number Publication Date
JP2009042239A JP2009042239A (en) 2009-02-26
JP2009042239A5 true JP2009042239A5 (en) 2010-07-22

Family

ID=39785793

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (en) 2006-10-13 2007-06-18 Acceleration sensor
JP2007159831A Withdrawn JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor
JP2008253519A Withdrawn JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor
JP2008253520A Withdrawn JP2009042240A (en) 2006-10-13 2008-09-30 Acceleration sensor

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (en) 2006-10-13 2007-06-18 Acceleration sensor
JP2007159831A Withdrawn JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008253520A Withdrawn JP2009042240A (en) 2006-10-13 2008-09-30 Acceleration sensor

Country Status (2)

Country Link
JP (4) JP2008209389A (en)
CN (1) CN101162237B (en)

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JP5446187B2 (en) 2008-09-17 2014-03-19 セイコーエプソン株式会社 Vibrating piece and vibration type sensor
JP5375624B2 (en) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 Acceleration sensor and acceleration detection device
JP5703731B2 (en) * 2010-12-14 2015-04-22 セイコーエプソン株式会社 Electronics
JP5560805B2 (en) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 Gyro element, gyro sensor, and electronic device
JP5341807B2 (en) * 2010-03-26 2013-11-13 株式会社東芝 Acceleration sensor
DE102010030878B4 (en) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Micromechanical sensor device for measuring an acceleration, a pressure and the like
US9759739B2 (en) 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP2014052263A (en) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd External force detection device and external force detection sensor
CN103197101A (en) * 2013-04-18 2013-07-10 厦门乃尔电子有限公司 Non-uniform section cantilever beam piezoelectricity accelerating speed sensor
JP2015179933A (en) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 Vibration element, gyro sensor element, electronic device, electronic apparatus and moving body
JP6044607B2 (en) * 2014-08-28 2016-12-14 横河電機株式会社 Vibration sensor device
CN105429607B (en) * 2014-09-16 2020-12-29 精工爱普生株式会社 Vibration device, electronic apparatus, and moving object
CN105865666B (en) * 2016-05-03 2018-11-20 成都皆为科技有限公司 A kind of integral type biquartz tuning fork resonant sensitive element and force-measuring module
GB2561887B (en) * 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
DE102017217975A1 (en) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Micromechanical spring structure
JP7331881B2 (en) * 2021-04-20 2023-08-23 株式会社豊田中央研究所 Acceleration sensor and acceleration sensor device
CN114280329A (en) * 2021-12-27 2022-04-05 西安交通大学 Quartz acceleration sensor with tuning fork fixedly supported at two ends
CN113985067A (en) * 2021-12-29 2022-01-28 山东利恩斯智能科技有限公司 Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof
US11953514B2 (en) 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
US11965907B2 (en) 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
CN114814334B (en) * 2022-04-14 2023-05-16 南京高华科技股份有限公司 Current sensor

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US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
JPS61165624A (en) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド Flowmeter
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
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JP3368744B2 (en) * 1996-03-27 2003-01-20 株式会社豊田中央研究所 Vibration acceleration sensor
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