JP2019504534A5 - - Google Patents

Download PDF

Info

Publication number
JP2019504534A5
JP2019504534A5 JP2018528001A JP2018528001A JP2019504534A5 JP 2019504534 A5 JP2019504534 A5 JP 2019504534A5 JP 2018528001 A JP2018528001 A JP 2018528001A JP 2018528001 A JP2018528001 A JP 2018528001A JP 2019504534 A5 JP2019504534 A5 JP 2019504534A5
Authority
JP
Japan
Prior art keywords
bias
ultrasonic transducers
group
ultrasonic
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018528001A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019504534A (ja
Filing date
Publication date
Priority claimed from US14/957,098 external-priority patent/US9987661B2/en
Application filed filed Critical
Publication of JP2019504534A publication Critical patent/JP2019504534A/ja
Publication of JP2019504534A5 publication Critical patent/JP2019504534A5/ja
Pending legal-status Critical Current

Links

JP2018528001A 2015-12-02 2016-12-01 容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法 Pending JP2019504534A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/957,098 2015-12-02
US14/957,098 US9987661B2 (en) 2015-12-02 2015-12-02 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
PCT/US2016/064325 WO2017095988A1 (en) 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods

Publications (2)

Publication Number Publication Date
JP2019504534A JP2019504534A (ja) 2019-02-14
JP2019504534A5 true JP2019504534A5 (enExample) 2019-12-12

Family

ID=58797703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018528001A Pending JP2019504534A (ja) 2015-12-02 2016-12-01 容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法

Country Status (10)

Country Link
US (2) US9987661B2 (enExample)
EP (1) EP3383277B1 (enExample)
JP (1) JP2019504534A (enExample)
KR (1) KR102121137B1 (enExample)
CN (1) CN108366774A (enExample)
AU (1) AU2016365309B2 (enExample)
CA (1) CA3006505A1 (enExample)
ES (1) ES2909488T3 (enExample)
TW (1) TWI705858B (enExample)
WO (1) WO2017095988A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
EP3801705A1 (en) 2018-05-31 2021-04-14 Matt McGrath Design & Co, LLC Biocompatible material with pain management capability and method of use thereof
TW202045099A (zh) 2019-02-07 2020-12-16 美商蝴蝶網路公司 用於微加工超音波傳感器裝置的雙層金屬電極
CN115917485B (zh) 2019-05-21 2024-09-06 京东方科技集团股份有限公司 用于产生和检测超声波感测信号的传感器电路、超声波感测显示设备
WO2020251915A1 (en) 2019-06-10 2020-12-17 Butterfly Network, Inc. Curved micromachined ultrasonic transducer membranes
US11558062B2 (en) 2019-07-25 2023-01-17 Bfly Operations, Inc. Methods and apparatuses for turning on and off an ADC driver in an ultrasound device
US11684951B2 (en) 2019-08-08 2023-06-27 Bfly Operations, Inc. Micromachined ultrasonic transducer devices having truncated circle shaped cavities
US11921240B2 (en) 2019-09-19 2024-03-05 Bfly Operations, Inc. Symmetric receiver switch for ultrasound devices
EP3815795A1 (en) * 2019-10-30 2021-05-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Membrane transducer with improved bandwidth
WO2021211822A1 (en) * 2020-04-16 2021-10-21 Bfly Operations, Inc. Methods and circuitry for built-in self-testing of circuitry and/or transducers in ultrasound devices
US12156762B2 (en) 2021-04-01 2024-12-03 Bfly Operations, Inc. Apparatuses and methods for configuring ultrasound devices
CN113477495A (zh) * 2021-06-26 2021-10-08 西北工业大学 一种基于堆栈排列的双频长焦深超声换能器

Family Cites Families (120)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286671A (en) 1993-05-07 1994-02-15 Kulite Semiconductor Products, Inc. Fusion bonding technique for use in fabricating semiconductor devices
US6645145B1 (en) 1998-11-19 2003-11-11 Siemens Medical Solutions Usa, Inc. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6381197B1 (en) * 1999-05-11 2002-04-30 Bernard J Savord Aperture control and apodization in a micro-machined ultrasonic transducer
US6430109B1 (en) 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6779387B2 (en) 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6694817B2 (en) 2001-08-21 2004-02-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6795374B2 (en) 2001-09-07 2004-09-21 Siemens Medical Solutions Usa, Inc. Bias control of electrostatic transducers
US6659954B2 (en) 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US7429495B2 (en) 2002-08-07 2008-09-30 Chang-Feng Wan System and method of fabricating micro cavities
US6958255B2 (en) 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7312440B2 (en) 2003-01-14 2007-12-25 Georgia Tech Research Corporation Integrated micro fuel processor and flow delivery infrastructure
US7208727B2 (en) 2003-01-14 2007-04-24 Georgia Tech Research Corporation Electrospray systems and methods
US7087023B2 (en) 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US7257051B2 (en) 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US6865140B2 (en) 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
US7313053B2 (en) 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7247246B2 (en) 2003-10-20 2007-07-24 Atmel Corporation Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity
WO2005046443A2 (en) 2003-11-07 2005-05-26 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7125383B2 (en) 2003-12-30 2006-10-24 General Electric Company Method and apparatus for ultrasonic continuous, non-invasive blood pressure monitoring
US7285897B2 (en) 2003-12-31 2007-10-23 General Electric Company Curved micromachined ultrasonic transducer arrays and related methods of manufacture
US7052464B2 (en) 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
US7104129B2 (en) 2004-02-02 2006-09-12 Invensense Inc. Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
WO2005077012A2 (en) 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods
US8008835B2 (en) 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US7612483B2 (en) 2004-02-27 2009-11-03 Georgia Tech Research Corporation Harmonic cMUT devices and fabrication methods
US7646133B2 (en) 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7530952B2 (en) 2004-04-01 2009-05-12 The Board Of Trustees Of The Leland Stanford Junior University Capacitive ultrasonic transducers with isolation posts
US8309428B2 (en) 2004-09-15 2012-11-13 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US7888709B2 (en) 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
US8658453B2 (en) 2004-09-15 2014-02-25 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US7518251B2 (en) 2004-12-03 2009-04-14 General Electric Company Stacked electronics for sensors
US7375420B2 (en) 2004-12-03 2008-05-20 General Electric Company Large area transducer array
US7037746B1 (en) 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
US7250353B2 (en) 2005-03-29 2007-07-31 Invensense, Inc. Method and system of releasing a MEMS structure
US7704743B2 (en) 2005-03-30 2010-04-27 Georgia Tech Research Corporation Electrosonic cell manipulation device and method of use thereof
EP1883956A4 (en) 2005-05-18 2011-03-23 Kolo Technologies Inc BY-THE-WAFER CONNECTION
CA2607918A1 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Micro-electro-mechanical transducers
CN101558552B (zh) 2005-06-17 2017-05-31 科隆科技公司 具有绝缘延伸部的微机电换能器
US7637149B2 (en) 2005-06-17 2009-12-29 Georgia Tech Research Corporation Integrated displacement sensors for probe microscopy and force spectroscopy
JP4523879B2 (ja) * 2005-06-20 2010-08-11 株式会社日立製作所 電気・音響変換素子、アレイ型超音波トランスデューサおよび超音波診断装置
US7880565B2 (en) 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
US7612635B2 (en) 2005-08-03 2009-11-03 Kolo Technologies, Inc. MEMS acoustic filter and fabrication of the same
US7878977B2 (en) 2005-09-30 2011-02-01 Siemens Medical Solutions Usa, Inc. Flexible ultrasound transducer array
US7441447B2 (en) 2005-10-07 2008-10-28 Georgia Tech Research Corporation Methods of imaging in probe microscopy
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
US7622848B2 (en) 2006-01-06 2009-11-24 General Electric Company Transducer assembly with z-axis interconnect
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
US7615834B2 (en) 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
WO2007115283A2 (en) 2006-04-04 2007-10-11 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
US7451651B2 (en) 2006-12-11 2008-11-18 General Electric Company Modular sensor assembly and methods of fabricating the same
US7687976B2 (en) 2007-01-31 2010-03-30 General Electric Company Ultrasound imaging system
US7892176B2 (en) 2007-05-02 2011-02-22 General Electric Company Monitoring or imaging system with interconnect structure for large area sensor array
US20080296708A1 (en) 2007-05-31 2008-12-04 General Electric Company Integrated sensor arrays and method for making and using such arrays
US8203912B2 (en) 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
US8277380B2 (en) 2007-09-11 2012-10-02 Siemens Medical Solutions Usa, Inc. Piezoelectric and CMUT layered ultrasound transducer array
WO2009037655A2 (en) 2007-09-17 2009-03-26 Koninklijke Philips Electronics, N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
US7843022B2 (en) 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
US7745248B2 (en) 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
US7786584B2 (en) 2007-11-26 2010-08-31 Infineon Technologies Ag Through substrate via semiconductor components
CN101868982B (zh) 2007-12-03 2013-10-16 科隆科技公司 带有电压反馈的电容式微机械超声换能器
CN101874287B (zh) 2007-12-03 2012-08-29 科隆科技公司 静电换能器及阵列中的贯穿晶片互连
JP5337813B2 (ja) 2007-12-03 2013-11-06 コロ テクノロジーズ インコーポレイテッド デュアルモード動作マイクロマシン超音波トランスデューサ
EP2215854A1 (en) 2007-12-03 2010-08-11 Kolo Technologies, Inc. Stacked transducing devices
US8483014B2 (en) 2007-12-03 2013-07-09 Kolo Technologies, Inc. Micromachined ultrasonic transducers
EP2227835A1 (en) 2007-12-03 2010-09-15 Kolo Technologies, Inc. Variable operating voltage in micromachined ultrasonic transducer
US7781238B2 (en) 2007-12-06 2010-08-24 Robert Gideon Wodnicki Methods of making and using integrated and testable sensor array
US8614151B2 (en) 2008-01-04 2013-12-24 Micron Technology, Inc. Method of etching a high aspect ratio contact
KR100878454B1 (ko) 2008-02-28 2009-01-13 (주)실리콘화일 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법
AU2009243918A1 (en) 2008-05-07 2009-11-12 Signostics Limited Docking system for medical diagnostic scanning using a handheld device
EP2230497A1 (de) 2008-06-09 2010-09-22 Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. Diodenbolometer und ein Verfahren zur Herstellung eines Diodenbolometers
JP2009291514A (ja) 2008-06-09 2009-12-17 Canon Inc 静電容量型トランスデューサの製造方法、及び静電容量型トランスデューサ
US7812418B2 (en) 2008-07-29 2010-10-12 Fortemedia, Inc Chip-scaled MEMS microphone package
US8133182B2 (en) * 2008-09-09 2012-03-13 Siemens Medical Solutions Usa, Inc. Multi-dimensional transducer array and beamforming for ultrasound imaging
TWI401975B (zh) * 2008-12-09 2013-07-11 Univ Nat Kaohsiung Applied Sci 具高分子基震盪薄膜之電容式超音波換能器的製作方法
WO2010082519A1 (ja) 2009-01-16 2010-07-22 株式会社日立メディコ 超音波探触子の製造方法および超音波探触子
GB2467776A (en) 2009-02-13 2010-08-18 Wolfson Microelectronics Plc Integrated MEMS transducer and circuitry
US8402831B2 (en) 2009-03-05 2013-03-26 The Board Of Trustees Of The Leland Standford Junior University Monolithic integrated CMUTs fabricated by low-temperature wafer bonding
US8315125B2 (en) 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
WO2010109205A2 (en) 2009-03-26 2010-09-30 Ntnu Technology Transfer As Cmut array
JP5578810B2 (ja) * 2009-06-19 2014-08-27 キヤノン株式会社 静電容量型の電気機械変換装置
US8451693B2 (en) 2009-08-25 2013-05-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducer having compliant post structure
US8345508B2 (en) 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same
US8222065B1 (en) 2009-10-02 2012-07-17 National Semiconductor Corporation Method and system for forming a capacitive micromachined ultrasonic transducer
US8563345B2 (en) 2009-10-02 2013-10-22 National Semiconductor Corporated Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements
US8476145B2 (en) 2010-10-13 2013-07-02 Monolithic 3D Inc. Method of fabricating a semiconductor device and structure
US8241931B1 (en) 2009-10-19 2012-08-14 Analog Devices, Inc. Method of forming MEMS device with weakened substrate
JP5404335B2 (ja) 2009-11-17 2014-01-29 キヤノン株式会社 電気機械変換装置及びその作製方法
US8647279B2 (en) 2010-06-10 2014-02-11 Siemens Medical Solutions Usa, Inc. Volume mechanical transducer for medical diagnostic ultrasound
US8957564B1 (en) 2010-06-29 2015-02-17 Silicon Light Machines Corporation Microelectromechanical system megasonic transducer
JP5702966B2 (ja) 2010-08-02 2015-04-15 キヤノン株式会社 電気機械変換装置及びその作製方法
US8273610B2 (en) 2010-11-18 2012-09-25 Monolithic 3D Inc. Method of constructing a semiconductor device and structure
JP5734620B2 (ja) * 2010-10-27 2015-06-17 オリンパス株式会社 超音波プローブ装置及びその制御方法
US8461655B2 (en) 2011-03-31 2013-06-11 Infineon Technologies Ag Micromechanical sound transducer having a membrane support with tapered surface
US8852103B2 (en) 2011-10-17 2014-10-07 Butterfly Network, Inc. Transmissive imaging and related apparatus and methods
US20130096433A1 (en) 2011-10-18 2013-04-18 The Regents Of The University Of Michigan System and Method for Unattended Monitoring of Blood Flow
US20130161702A1 (en) 2011-12-25 2013-06-27 Kun-Lung Chen Integrated mems device
KR101894393B1 (ko) 2011-12-28 2018-09-04 삼성전자주식회사 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법
JP6329491B2 (ja) * 2012-03-13 2018-05-23 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置
KR101388141B1 (ko) 2012-05-31 2014-04-23 전자부품연구원 Cmos 회로가 집적된 마이크로폰 및 그 제조방법
JP6071285B2 (ja) * 2012-07-06 2017-02-01 キヤノン株式会社 静電容量型トランスデューサ
US8735199B2 (en) 2012-08-22 2014-05-27 Honeywell International Inc. Methods for fabricating MEMS structures by etching sacrificial features embedded in glass
CA2795441A1 (en) 2012-10-19 2014-04-19 The Governors Of The University Of Alberta Top-orthogonal-to-bottom electrode (tobe) 2d cmut arrays for low-channel-count 3d imaging
US9499392B2 (en) 2013-02-05 2016-11-22 Butterfly Network, Inc. CMOS ultrasonic transducers and related apparatus and methods
US9470710B2 (en) * 2013-02-27 2016-10-18 Texas Instruments Incorporated Capacitive MEMS sensor devices
TWI623081B (zh) 2013-03-15 2018-05-01 蝴蝶網路公司 互補式金屬氧化物半導體(cmos)超音波換能器以及用於形成其之方法
CA2903479C (en) 2013-03-15 2023-10-10 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
JP6271887B2 (ja) * 2013-07-10 2018-01-31 キヤノン株式会社 静電容量型トランスデューサ、プローブ、及び被検体情報取得装置
JP5855050B2 (ja) * 2013-07-10 2016-02-09 キヤノン株式会社 トランスデューサ、被検体情報取得装置
US10806431B2 (en) * 2013-09-25 2020-10-20 Massachusetts Institute Of Technology Application specific integrated circuit with column-row-parallel architecture for ultrasonic imaging
CN105722609B (zh) * 2013-11-18 2018-03-06 皇家飞利浦有限公司 超声换能器组件
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. モノリシックに集積された三電極cmut装置
US10330781B2 (en) * 2013-12-19 2019-06-25 B-K Medical Aps Ultrasound imaging transducer array with integrated apodization
CN106659464B (zh) 2014-04-18 2020-03-20 蝴蝶网络有限公司 互补金属氧化物半导体(cmos)晶片中的超声换能器及相关装置和方法
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US20160009544A1 (en) 2015-03-02 2016-01-14 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods

Similar Documents

Publication Publication Date Title
JP2019504534A5 (enExample)
JP2017508315A5 (enExample)
JP2012511360A5 (enExample)
US10272471B2 (en) Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
CN104121984B (zh) 一种高灵敏度谐振式mems矢量水听器结构
JP2016518739A5 (enExample)
WO2012112540A3 (en) Piezoelectric transducers using micro-dome arrays
JP2016522650A5 (enExample)
WO2007134051A3 (en) High frequency ultrasound transducers
JP2014179062A5 (enExample)
EP2907588A3 (en) Electro acoustic transducer
CN108370483B (zh) 确定具有电容电极和压电电极的mems麦克风的绝对灵敏度的系统和方法
FI3405294T3 (fi) Pienikokoinen ultraäänilaite, jossa on renkaan muotoinen ultraääniryhmä, joka on yhdistetty sähköisesti reunalle taipuisaan piirilevyyn
EP3376346A3 (en) Electret-based electrostatic haptic actuator
RU2015132850A (ru) Прибор с электродом, подключенным к сквозному проводу, и способ его изготовления
EP2823896A3 (en) Electrostatic capacitance transducer, probe, and subject information acquiring device
JP2016097033A5 (enExample)
EP2783759A3 (en) Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
JP2020502944A5 (enExample)
CN112020698A (zh) 触控基板、触控装置和触控检测方法
EP2587354A3 (en) Touch panel and output method therefor
JP2014195494A5 (enExample)
JP2016092879A5 (enExample)
JP2014209728A5 (enExample)
CN108227982A8 (zh) 触摸传感器以及包括触摸传感器的显示装置