JP2020502944A5 - - Google Patents

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JP2020502944A5
JP2020502944A5 JP2019533554A JP2019533554A JP2020502944A5 JP 2020502944 A5 JP2020502944 A5 JP 2020502944A5 JP 2019533554 A JP2019533554 A JP 2019533554A JP 2019533554 A JP2019533554 A JP 2019533554A JP 2020502944 A5 JP2020502944 A5 JP 2020502944A5
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Japan
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voltage
electrode
cmut cell
polarity
cmut
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JP2019533554A
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Japanese (ja)
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JP2020502944A (ja
JP7208901B2 (ja
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Priority claimed from PCT/EP2017/084088 external-priority patent/WO2018115283A1/en
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Publication of JP2020502944A5 publication Critical patent/JP2020502944A5/ja
Priority to JP2022125373A priority Critical patent/JP7391152B2/ja
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JP2019533554A 2016-12-22 2017-12-21 容量性高周波微小電気機械スイッチのシステム及び動作方法 Active JP7208901B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022125373A JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16206309 2016-12-22
EP16206309.3 2016-12-22
PCT/EP2017/084088 WO2018115283A1 (en) 2016-12-22 2017-12-21 Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

Related Child Applications (1)

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JP2022125373A Division JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

Publications (3)

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JP2020502944A JP2020502944A (ja) 2020-01-23
JP2020502944A5 true JP2020502944A5 (enExample) 2021-02-04
JP7208901B2 JP7208901B2 (ja) 2023-01-19

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JP2019533554A Active JP7208901B2 (ja) 2016-12-22 2017-12-21 容量性高周波微小電気機械スイッチのシステム及び動作方法
JP2022125373A Active JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

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Country Status (5)

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US (2) US11458504B2 (enExample)
EP (2) EP4289521A3 (enExample)
JP (2) JP7208901B2 (enExample)
CN (1) CN110325293B (enExample)
WO (1) WO2018115283A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3659515A1 (en) * 2018-11-29 2020-06-03 Koninklijke Philips N.V. Imaging system comprising an ultrasound transducer array and skin contact electrodes, and corresponding imaging method
US12352713B2 (en) 2019-12-30 2025-07-08 Sigmasense, Llc. Organic and/or inorganic material test system using differential drive-sense circuits
US11935397B2 (en) 2019-12-30 2024-03-19 Sigmasense, Llc. Organic and inorganic test system
IL294825A (en) 2020-01-20 2022-09-01 Univ Leland Stanford Junior Contoured electrode and/or pulse train excitation for capacitive micromachined ultrasonic transducer
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
TWI783491B (zh) 2021-05-21 2022-11-11 友達光電股份有限公司 超音波偵測裝置
WO2023107433A2 (en) * 2021-12-06 2023-06-15 Orchard Ultrasound Innovation Llc Capacitive micromachined ultrasonic transducer
FR3131367B1 (fr) * 2021-12-23 2023-11-17 Commissariat Energie Atomique Procédé et système de détermination de l’état d’un capteur dont le comportement mécanique est non linéaire en fonction de l’amplitude de la pression exercée
EP4344795A1 (en) * 2022-09-27 2024-04-03 Koninklijke Philips N.V. Cmut drive method

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5161128A (en) * 1990-11-30 1992-11-03 Ultrasonic Arrays, Inc. Capacitive transducer system and method
US5396143A (en) * 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US6283919B1 (en) 1996-11-26 2001-09-04 Atl Ultrasound Ultrasonic diagnostic imaging with blended tissue harmonic signals
US6458083B1 (en) 1996-11-26 2002-10-01 Koninklijke Philips Electronics N.V. Ultrasonic harmonic imaging with adaptive image formation
US6013032A (en) 1998-03-13 2000-01-11 Hewlett-Packard Company Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array
US5997479A (en) 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6499348B1 (en) * 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US6530885B1 (en) 2000-03-17 2003-03-11 Atl Ultrasound, Inc. Spatially compounded three dimensional ultrasonic images
EP1294493A2 (en) * 2000-06-15 2003-03-26 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers.
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6443896B1 (en) 2000-08-17 2002-09-03 Koninklijke Philips Electronics N.V. Method for creating multiplanar ultrasonic images of a three dimensional object
US6468216B1 (en) 2000-08-24 2002-10-22 Kininklijke Philips Electronics N.V. Ultrasonic diagnostic imaging of the coronary arteries
US6585653B2 (en) 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
JP4176450B2 (ja) * 2002-02-13 2008-11-05 松下電器産業株式会社 微小機械振動フィルタ
US7087023B2 (en) * 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US7780597B2 (en) * 2003-02-14 2010-08-24 Siemens Medical Solutions Usa, Inc. Method and apparatus for improving the performance of capacitive acoustic transducers using bias polarity control and multiple firings
US20050215909A1 (en) * 2004-03-19 2005-09-29 Siemens Medical Solutions Usa, Inc. Electric field control for capacitive micromachined ultrasound transducers
US20050219953A1 (en) * 2004-04-06 2005-10-06 The Board Of Trustees Of The Leland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
EP1932476A4 (en) * 2005-09-05 2010-06-23 Hitachi Medical Corp ULTRASOUND DEVICE
WO2007058056A1 (ja) * 2005-11-18 2007-05-24 Hitachi Medical Corporation 超音波診断装置、超音波診断装置の較正方法
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
WO2009037655A2 (en) * 2007-09-17 2009-03-26 Koninklijke Philips Electronics, N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
CN101888809B (zh) * 2007-12-13 2012-11-28 株式会社日立医疗器械 超声波诊断装置和超声波探头
US8133182B2 (en) * 2008-09-09 2012-03-13 Siemens Medical Solutions Usa, Inc. Multi-dimensional transducer array and beamforming for ultrasound imaging
EP2400893B1 (en) * 2009-02-27 2017-01-04 Koninklijke Philips N.V. Pre-collapsed cmut with mechanical collapse retention
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
JP5409138B2 (ja) * 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
JP5473579B2 (ja) * 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
EP2520917A1 (en) * 2011-05-04 2012-11-07 Nxp B.V. MEMS Capacitive Pressure Sensor, Operating Method and Manufacturing Method
CN103917304B (zh) * 2011-10-28 2016-08-17 皇家飞利浦有限公司 具有应力层的预塌陷电容式微加工换能器单元
JP6073855B2 (ja) * 2012-02-23 2017-02-01 株式会社日立製作所 超音波診断装置及び超音波探触子
US9950342B2 (en) * 2012-03-13 2018-04-24 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer device with charging voltage source
BR112014029547A2 (pt) * 2012-05-31 2017-06-27 Koninklijke Philips Nv placa sendo subdividida e separavel em uma pluralidade de matrizes, método de fabricação de uma placa e método de fabricação de uma matriz
US9479162B2 (en) * 2012-11-28 2016-10-25 Analog Devices, Inc. Apparatus and methods for ultrasound probes
EP2928208A4 (en) * 2012-12-03 2016-07-06 Nec Corp ELECTRIC ACOUSTIC CONVERTER, MANUFACTURING METHOD AND ELECTRONIC DEVICE WITH THE ELECTRIC ACOUSTIC CONVERTER
EP2969914B1 (en) 2013-03-15 2020-01-01 Butterfly Network Inc. Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same
US10209206B2 (en) * 2013-07-08 2019-02-19 Nova Measuring Instruments Ltd. Method and system for determining strain distribution in a sample
JP6513674B2 (ja) * 2013-08-27 2019-05-15 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． デュアルモードｃｍｕｔトランスデューサ
CN105592940B (zh) * 2013-09-24 2018-09-25 皇家飞利浦有限公司 Cmut装置制造方法、cmut装置和设备
CN105592941B (zh) 2013-09-27 2018-01-19 皇家飞利浦有限公司 超声换能器组件和用于发送和接收超声波的方法
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
KR20160021558A (ko) * 2014-08-18 2016-02-26 삼성전자주식회사 초음파 변환기의 구동방법 및 초음파 진단 방치
JP6684817B2 (ja) 2014-11-25 2020-04-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び方法
CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备
US9479875B2 (en) * 2015-01-23 2016-10-25 Silicon Audio Directional, Llc Multi-mode microphones
US9503820B2 (en) * 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
US10773277B2 (en) * 2015-03-05 2020-09-15 Koninklijke Philips N.V. Ultrasound system and method
JP6472313B2 (ja) * 2015-04-16 2019-02-20 キヤノン株式会社 探触子及び情報取得装置
CN104826243B (zh) 2015-05-15 2018-02-27 深圳先进技术研究院 一种超声刺激神经组织的装置
WO2017001636A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
CN106198724B (zh) 2016-06-30 2018-11-02 重庆大学 一种多稳态超声检测传感器
CN110100294B (zh) * 2016-12-22 2022-03-29 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法

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