JP6482558B2 - モノリシックに集積された三電極cmut装置 - Google Patents
モノリシックに集積された三電極cmut装置 Download PDFInfo
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- JP6482558B2 JP6482558B2 JP2016536176A JP2016536176A JP6482558B2 JP 6482558 B2 JP6482558 B2 JP 6482558B2 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 6482558 B2 JP6482558 B2 JP 6482558B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/20—Application to multi-element transducer
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Medical Informatics (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Public Health (AREA)
- Heart & Thoracic Surgery (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Gynecology & Obstetrics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Micromachines (AREA)
Description
cMUTバイアス関連電子装置の小型化、
ユーザ安全性改良。高バイアス電圧に関連した蓄積された電荷は、非常に高いインピーダンスの直列抵抗器の可能な実装とともに前記第3及び第1の電極の2つの導電性金属板により前記ユーザ/患者から分離される。
システム供給電圧の減少、
のため、カテーテルの超音波アレイにおけるCMUTセルの応用に対して特に関心がある。
Claims (14)
- 基板と、
前記基板に対向し、その間にギャップが存在する、セル膜と、
前記セル膜に結合された第1の電極と、
前記第1の電極に対向するようにセルフロア内に埋め込まれ、気体又は真空キャビティにより前記第1の電極から分離され、前記セルフロアが前記基板の上面を有する、第2の電極と、
第3の電極と、
を有する容量性マイクロマシン超音波トランスデューサセルにおいて、
前記第3の電極が、キャビティ側から前記第2の電極に対向する前記セルフロア内に配置され、前記第3の電極が、前記第1又は第2の電極と容量的に結合され、容量結合が、前記容量的に結合された電極と直接的に接触し、前記容量的に結合された電極の間に挟まれた誘電層により実現される、
容量性マイクロマシン超音波トランスデューサセル。 - 前記第2の電極と前記第3の電極との間の容量関係が、前記第3の電極と前記第1の電極との間の容量関係より大きいか又は等しい、請求項1に記載の容量性マイクロマシン超音波トランスデューサセル。
- 前記誘電層が、高誘電率を持つ材料の層を有する、請求項1乃至2のいずれか一項に記載の容量性マイクロマシン超音波トランスデューサセル。
- 前記第3の電極と前記第1の電極との間の容量関係が、前記基板に対する前記CMUTセルの寄生容量より大きい、請求項2に記載の容量性マイクロマシン超音波トランスデューサセル。
- 接地電位に関して前記第3の電極に対するDCバイアス電圧を生じるDC電源と、
前記第1の電極及び前記第2の電極に結合され、前記膜の振動を引き起こす/感知する信号送信器/受信器と、
を有する、請求項1に記載の容量性マイクロマシン超音波トランスデューサセル。 - 前記DC電源が、抵抗器を介して前記第3の電極に結合される、請求項5に記載の容量性マイクロマシン超音波トランスデューサセル。
- 前記抵抗器が、オンチップ抵抗器である、請求項6に記載の容量性マイクロマシン超音波トランスデューサセル。
- 前記DC電源が、前記CMUTセルの動作中に前記セルフロアに対してつぶされるように前記セル膜をセットするように構成される、請求項7に記載の容量性マイクロマシン超音波トランスデューサセル。
- 請求項1に記載のCMUTセルを少なくとも1つ有する超音波プローブ。
- 前記プローブが、前記CMUTセルのアレイを有し、前記アレイが、前記CMUTセルの第1及び第2のサブグループを有し、前記CMUTセルの第1のサブグループが、2つの方向の一方に沿って相互接続された前記第1の電極を持ち、前記CMUTセルの第2のサブグループが、他方の方向に沿って相互接続された前記第2の電極を持つ、請求項9に記載の超音波プローブ。
- 前記アレイ内の前記CMUTセルの前記第3の電極が、直列抵抗器を介してDCバイアス電圧源に結合される、請求項10に記載の超音波プローブ。
- 前記第3の電極が前記DCバイアス電圧源に相互接続する方法が、前記第2のサブグループの相互接続の方向である、請求項11に記載の超音波プローブ。
- 前記2つの方向の一方に沿って相互接続された前記アレイ内の前記CMUTセルの前記サブグループのいずれかの前記第3の電極が、各相互接続に対して1つの直列抵抗器を介して前記DCバイアス電圧源に結合される、請求項12に記載の超音波プローブ。
- 請求項10乃至13のいずれか一項に記載の超音波プローブを有する超音波撮像システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13196881.0 | 2013-12-12 | ||
EP13196881 | 2013-12-12 | ||
PCT/EP2014/076475 WO2015086413A1 (en) | 2013-12-12 | 2014-12-04 | Monolithically integrated three electrode cmut device |
Publications (3)
Publication Number | Publication Date |
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JP2017508315A JP2017508315A (ja) | 2017-03-23 |
JP2017508315A5 JP2017508315A5 (ja) | 2017-12-14 |
JP6482558B2 true JP6482558B2 (ja) | 2019-03-13 |
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JP2016536176A Active JP6482558B2 (ja) | 2013-12-12 | 2014-12-04 | モノリシックに集積された三電極cmut装置 |
Country Status (5)
Country | Link |
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US (1) | US10265728B2 (ja) |
EP (1) | EP3079837B1 (ja) |
JP (1) | JP6482558B2 (ja) |
CN (1) | CN105828962B (ja) |
WO (1) | WO2015086413A1 (ja) |
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EP3079837B1 (en) * | 2013-12-12 | 2023-02-08 | Koninklijke Philips N.V. | Monolithically integrated three electrode cmut device |
WO2016030717A1 (en) * | 2014-08-25 | 2016-03-03 | B-K Medical Aps | Transducer array cmut element biasing |
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EP3229978B1 (en) * | 2014-12-11 | 2020-05-27 | Koninklijke Philips N.V. | Two-terminal cmut device |
EP3317026B1 (en) * | 2015-06-30 | 2023-12-20 | Koninklijke Philips N.V. | Ultrasound system and ultrasonic pulse transmission method |
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2014
- 2014-12-04 EP EP14809802.3A patent/EP3079837B1/en active Active
- 2014-12-04 JP JP2016536176A patent/JP6482558B2/ja active Active
- 2014-12-04 WO PCT/EP2014/076475 patent/WO2015086413A1/en active Application Filing
- 2014-12-04 US US15/103,388 patent/US10265728B2/en active Active
- 2014-12-04 CN CN201480067581.9A patent/CN105828962B/zh active Active
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US20160310992A1 (en) | 2016-10-27 |
CN105828962B (zh) | 2019-07-23 |
JP2017508315A (ja) | 2017-03-23 |
WO2015086413A1 (en) | 2015-06-18 |
EP3079837A1 (en) | 2016-10-19 |
CN105828962A (zh) | 2016-08-03 |
US10265728B2 (en) | 2019-04-23 |
EP3079837B1 (en) | 2023-02-08 |
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