JP6495545B2 - 超音波トランスジューサアレイ、プローブ及びシステム - Google Patents
超音波トランスジューサアレイ、プローブ及びシステム Download PDFInfo
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- JP6495545B2 JP6495545B2 JP2018522588A JP2018522588A JP6495545B2 JP 6495545 B2 JP6495545 B2 JP 6495545B2 JP 2018522588 A JP2018522588 A JP 2018522588A JP 2018522588 A JP2018522588 A JP 2018522588A JP 6495545 B2 JP6495545 B2 JP 6495545B2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
- B06B1/0215—Driving circuits for generating pulses, e.g. bursts of oscillations, envelopes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/40—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups with testing, calibrating, safety devices, built-in protection, construction details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/50—Application to a particular transducer type
- B06B2201/51—Electrostatic transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/76—Medical, dental
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Heart & Thoracic Surgery (AREA)
- Surgery (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biophysics (AREA)
- Biomedical Technology (AREA)
- Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
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- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Description
Claims (8)
- 各々が第1電極配列部の第1電極を担持した基板を備える複数のCMUT(容量性微細加工超音波トランスデューサ)セルを有する超音波トランスジューサアレイであって、前記基板の少なくとも一部は第2電極配列部の第2電極を含む可撓性膜体から間隙により空間的に分離され、前記第1電極及び前記第2電極の少なくとも一方は前記間隙から少なくとも1つの誘電体層により電気的に絶縁され、前記第1電極配列部及び前記第2電極配列部は、対応するヒューズ部により相互接続された複数の区域に分割され、前記第1電極配列部は複数の行の第1電極を有し、各行における第1電極は対応するヒューズ部により相互接続され、前記第2電極配列部は複数の列の第2電極を有し、各列における第2電極は対応するヒューズ部により相互接続され、各行及び各列は個別にアドレス指定可能である、超音波トランスジューサアレイ。
- 各ヒューズ部が1Ω/□を超えないシート抵抗を有する、請求項1に記載の超音波トランスジューサアレイ。
- 前記少なくとも1つの誘電体層が、前記間隙と前記第1電極との間の第1誘電体層及び前記間隙と前記第2電極との間の第2誘電体層を有する、請求項1又は請求項2に記載の超音波トランスジューサアレイ。
- 各ヒューズ部が細条形である、請求項1ないし3の何れか一項に記載の超音波トランスジューサアレイ。
- 各ヒューズ部が蝶ネクタイ形である、請求項1ないし3の何れか一項に記載の超音波トランスジューサアレイ。
- 請求項1ないし5の何れか一項に記載の超音波トランスジューサアレイを有する、超音波プローブ。
- 請求項1ないし5の何れか一項に記載の超音波トランスジューサアレイ又は請求項6に記載の超音波プローブを有すると共に、前記第1電極配列部及び前記第2電極配列部に導電的に結合された電源を更に有する、超音波システム。
- 前記超音波システムが超音波診断撮像システム又は超音波治療システムである、請求項7に記載の超音波システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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EP15192480.0 | 2015-11-02 | ||
EP15192480 | 2015-11-02 | ||
PCT/EP2016/076316 WO2017076843A1 (en) | 2015-11-02 | 2016-11-02 | Ultrasound transducer array, probe and system |
Publications (2)
Publication Number | Publication Date |
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JP2018533879A JP2018533879A (ja) | 2018-11-15 |
JP6495545B2 true JP6495545B2 (ja) | 2019-04-03 |
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Application Number | Title | Priority Date | Filing Date |
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JP2018522588A Active JP6495545B2 (ja) | 2015-11-02 | 2016-11-02 | 超音波トランスジューサアレイ、プローブ及びシステム |
Country Status (5)
Country | Link |
---|---|
US (1) | US11084062B2 (ja) |
EP (1) | EP3370621B1 (ja) |
JP (1) | JP6495545B2 (ja) |
CN (1) | CN108348217B (ja) |
WO (1) | WO2017076843A1 (ja) |
Families Citing this family (13)
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WO2018115226A1 (en) * | 2016-12-22 | 2018-06-28 | Koninklijke Philips N.V. | Systems and methods of operation of capacitive radio frequency micro-electromechanical switches |
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CN108871389B (zh) | 2018-05-10 | 2020-03-31 | 京东方科技集团股份有限公司 | 超声波传感单元及制作方法、超声波传感器及显示装置 |
DE102018006127B4 (de) | 2018-08-03 | 2021-07-08 | Pepperl+Fuchs Ag | 1D-Ultraschallwandler-Einheit für die Materialerfassung |
EP3733309A1 (en) | 2019-04-30 | 2020-11-04 | Koninklijke Philips N.V. | Capacitive micro-machined ultrasound transducer (cmut) devices |
KR102472120B1 (ko) | 2019-05-03 | 2022-11-28 | 메이 선 테크놀로지 씨오 엘티디 | 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이 |
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US11904357B2 (en) * | 2020-05-22 | 2024-02-20 | GE Precision Healthcare LLC | Micromachined ultrasonic transducers with non-coplanar actuation and displacement |
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2016
- 2016-11-02 JP JP2018522588A patent/JP6495545B2/ja active Active
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CN108348217B (zh) | 2021-07-20 |
CN108348217A (zh) | 2018-07-31 |
WO2017076843A1 (en) | 2017-05-11 |
EP3370621A1 (en) | 2018-09-12 |
US20180310916A1 (en) | 2018-11-01 |
JP2018533879A (ja) | 2018-11-15 |
US11084062B2 (en) | 2021-08-10 |
EP3370621B1 (en) | 2019-01-09 |
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