CN110325293B - 电容式射频微机电开关的系统和操作方法 - Google Patents

电容式射频微机电开关的系统和操作方法 Download PDF

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Publication number
CN110325293B
CN110325293B CN201780087039.3A CN201780087039A CN110325293B CN 110325293 B CN110325293 B CN 110325293B CN 201780087039 A CN201780087039 A CN 201780087039A CN 110325293 B CN110325293 B CN 110325293B
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voltage
electrode
cmut cell
cmut
drift
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Chinese (zh)
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CN110325293A (zh
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S·舒列波夫
P·迪克森
H-P·勒布尔
F·P·M·布德泽拉
P·H·M·蒂默曼斯
N·M·A·德维尔德
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0215—Driving circuits for generating pulses, e.g. bursts of oscillations, envelopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60B—VEHICLE WHEELS; CASTORS; AXLES FOR WHEELS OR CASTORS; INCREASING WHEEL ADHESION
    • B60B1/00—Spoked wheels; Spokes thereof
    • B60B1/02—Wheels with wire or other tension spokes
    • B60B1/0253—Wheels with wire or other tension spokes the spoke being hollow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
CN201780087039.3A 2016-12-22 2017-12-21 电容式射频微机电开关的系统和操作方法 Active CN110325293B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16206309.3 2016-12-22
EP16206309 2016-12-22
PCT/EP2017/084088 WO2018115283A1 (en) 2016-12-22 2017-12-21 Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

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CN110325293A CN110325293A (zh) 2019-10-11
CN110325293B true CN110325293B (zh) 2021-06-22

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US (2) US11458504B2 (enExample)
EP (2) EP4289521A3 (enExample)
JP (2) JP7208901B2 (enExample)
CN (1) CN110325293B (enExample)
WO (1) WO2018115283A1 (enExample)

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EP3659515A1 (en) * 2018-11-29 2020-06-03 Koninklijke Philips N.V. Imaging system comprising an ultrasound transducer array and skin contact electrodes, and corresponding imaging method
US11935397B2 (en) 2019-12-30 2024-03-19 Sigmasense, Llc. Organic and inorganic test system
US12352713B2 (en) 2019-12-30 2025-07-08 Sigmasense, Llc. Organic and/or inorganic material test system using differential drive-sense circuits
IL294825A (en) 2020-01-20 2022-09-01 Univ Leland Stanford Junior Contoured electrode and/or pulse train excitation for capacitive micromachined ultrasonic transducer
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
TWI783491B (zh) 2021-05-21 2022-11-11 友達光電股份有限公司 超音波偵測裝置
JP2025500771A (ja) * 2021-12-06 2025-01-15 オーチャード ウルトラサウンド イノベーション エルエルシー 静電容量型マイクロマシン超音波トランスデューサ
FR3131367B1 (fr) * 2021-12-23 2023-11-17 Commissariat Energie Atomique Procédé et système de détermination de l’état d’un capteur dont le comportement mécanique est non linéaire en fonction de l’amplitude de la pression exercée
EP4344795A1 (en) * 2022-09-27 2024-04-03 Koninklijke Philips N.V. Cmut drive method

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US5396143A (en) * 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US6826961B2 (en) * 1999-12-03 2004-12-07 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US6585653B2 (en) * 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
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Publication number Publication date
EP4289521A2 (en) 2023-12-13
US11458504B2 (en) 2022-10-04
EP3558549A1 (en) 2019-10-30
WO2018115283A1 (en) 2018-06-28
JP2020502944A (ja) 2020-01-23
JP2022166105A (ja) 2022-11-01
JP7391152B2 (ja) 2023-12-04
EP3558549B1 (en) 2024-02-14
EP4289521A3 (en) 2024-03-27
US20230012105A1 (en) 2023-01-12
US20210129187A1 (en) 2021-05-06
JP7208901B2 (ja) 2023-01-19
CN110325293A (zh) 2019-10-11

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