JP2017508315A5 - - Google Patents

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Publication number
JP2017508315A5
JP2017508315A5 JP2016536176A JP2016536176A JP2017508315A5 JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5
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JP
Japan
Prior art keywords
electrode
cell
ultrasonic transducer
cmut
capacitive
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JP2016536176A
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English (en)
Japanese (ja)
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JP6482558B2 (ja
JP2017508315A (ja
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Priority claimed from PCT/EP2014/076475 external-priority patent/WO2015086413A1/en
Publication of JP2017508315A publication Critical patent/JP2017508315A/ja
Publication of JP2017508315A5 publication Critical patent/JP2017508315A5/ja
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Publication of JP6482558B2 publication Critical patent/JP6482558B2/ja
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JP2016536176A 2013-12-12 2014-12-04 モノリシックに集積された三電極cmut装置 Active JP6482558B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881 2013-12-12
EP13196881.0 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (3)

Publication Number Publication Date
JP2017508315A JP2017508315A (ja) 2017-03-23
JP2017508315A5 true JP2017508315A5 (enExample) 2017-12-14
JP6482558B2 JP6482558B2 (ja) 2019-03-13

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Family Applications (1)

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JP2016536176A Active JP6482558B2 (ja) 2013-12-12 2014-12-04 モノリシックに集積された三電極cmut装置

Country Status (5)

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US (1) US10265728B2 (enExample)
EP (1) EP3079837B1 (enExample)
JP (1) JP6482558B2 (enExample)
CN (1) CN105828962B (enExample)
WO (1) WO2015086413A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
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US9950342B2 (en) * 2012-03-13 2018-04-24 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer device with charging voltage source
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US10571436B2 (en) * 2014-08-25 2020-02-25 B-K Medical Aps Transducer array CMUT element biasing
US9995821B2 (en) 2014-10-15 2018-06-12 Qualcomm Incorporated Active beam-forming technique for piezoelectric ultrasonic transducer array
CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备
WO2017001636A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
CN107921480B (zh) * 2015-08-11 2020-08-11 皇家飞利浦有限公司 具有增加的寿命的电容式微机械超声换能器
JP6907193B2 (ja) 2015-09-10 2021-07-21 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 幅広い深度及び詳細なビューを備えた超音波システム
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
JP6495545B2 (ja) * 2015-11-02 2019-04-03 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 超音波トランスジューサアレイ、プローブ及びシステム
JP6553297B2 (ja) 2015-11-02 2019-07-31 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 干渉分析器を含むボリューム領域の超音波画像を可変周波数で提供するための超音波システム
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WO2018115283A1 (en) * 2016-12-22 2018-06-28 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) * 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
CN114302774B (zh) * 2019-08-30 2023-05-23 维蒙股份公司 Cmut换能器
WO2021077381A1 (zh) * 2019-10-25 2021-04-29 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
AU2021382380A1 (en) 2020-11-19 2023-07-06 Katholieke Universiteit Leuven Ultrasonic transducer array device

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CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备

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