JP2017508315A5 - - Google Patents
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- Publication number
- JP2017508315A5 JP2017508315A5 JP2016536176A JP2016536176A JP2017508315A5 JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 2017508315 A5 JP2017508315 A5 JP 2017508315A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cell
- ultrasonic transducer
- cmut
- capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000004027 cell Anatomy 0.000 claims 22
- 239000000523 sample Substances 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 4
- 238000002604 ultrasonography Methods 0.000 claims 3
- 210000000170 cell membrane Anatomy 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 claims 1
- 238000012285 ultrasound imaging Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13196881 | 2013-12-12 | ||
| EP13196881.0 | 2013-12-12 | ||
| PCT/EP2014/076475 WO2015086413A1 (en) | 2013-12-12 | 2014-12-04 | Monolithically integrated three electrode cmut device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017508315A JP2017508315A (ja) | 2017-03-23 |
| JP2017508315A5 true JP2017508315A5 (enExample) | 2017-12-14 |
| JP6482558B2 JP6482558B2 (ja) | 2019-03-13 |
Family
ID=49765363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016536176A Active JP6482558B2 (ja) | 2013-12-12 | 2014-12-04 | モノリシックに集積された三電極ｃｍｕｔ装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10265728B2 (enExample) |
| EP (1) | EP3079837B1 (enExample) |
| JP (1) | JP6482558B2 (enExample) |
| CN (1) | CN105828962B (enExample) |
| WO (1) | WO2015086413A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9950342B2 (en) * | 2012-03-13 | 2018-04-24 | Koninklijke Philips N.V. | Capacitive micro-machined ultrasound transducer device with charging voltage source |
| WO2015086413A1 (en) * | 2013-12-12 | 2015-06-18 | Koninklijke Philips N.V. | Monolithically integrated three electrode cmut device |
| WO2016030717A1 (en) * | 2014-08-25 | 2016-03-03 | B-K Medical Aps | Transducer array cmut element biasing |
| US10139479B2 (en) | 2014-10-15 | 2018-11-27 | Qualcomm Incorporated | Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming |
| WO2016091624A1 (en) * | 2014-12-11 | 2016-06-16 | Koninklijke Philips N.V. | Two-terminal cmut device |
| EP3317026B1 (en) * | 2015-06-30 | 2023-12-20 | Koninklijke Philips N.V. | Ultrasound system and ultrasonic pulse transmission method |
| US9751108B2 (en) * | 2015-07-31 | 2017-09-05 | Texas Instruments Incorporated | Extended range ultrasound transducer |
| WO2017025438A1 (en) * | 2015-08-11 | 2017-02-16 | Koninklijke Philips N.V. | Capacitive micromachined ultrasonic transducers with increased lifetime |
| CN108027437B (zh) | 2015-09-10 | 2022-07-05 | 皇家飞利浦有限公司 | 具有宽深度和详细查看的超声系统 |
| US10497748B2 (en) | 2015-10-14 | 2019-12-03 | Qualcomm Incorporated | Integrated piezoelectric micromechanical ultrasonic transducer pixel and array |
| CN108351411B (zh) | 2015-11-02 | 2022-05-13 | 皇家飞利浦有限公司 | 包括干扰分析器的用于以可变频率提供体积区域的超声图像的超声系统 |
| JP6495545B2 (ja) * | 2015-11-02 | 2019-04-03 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波トランスジューサアレイ、プローブ及びシステム |
| US9987661B2 (en) | 2015-12-02 | 2018-06-05 | Butterfly Network, Inc. | Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods |
| US11877895B2 (en) * | 2016-11-28 | 2024-01-23 | Koninklijke Philips N.V. | CMUT device and imaging method |
| US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| CN110325293B (zh) * | 2016-12-22 | 2021-06-22 | 皇家飞利浦有限公司 | 电容式射频微机电开关的系统和操作方法 |
| EP3366221A1 (en) | 2017-02-28 | 2018-08-29 | Koninklijke Philips N.V. | An intelligent ultrasound system |
| US10613058B2 (en) * | 2017-06-27 | 2020-04-07 | Kolo Medical, Ltd. | CMUT signal separation with multi-level bias control |
| EP3527140A1 (en) * | 2018-02-15 | 2019-08-21 | Koninklijke Philips N.V. | Ultrasound imaging system using an array of transducer elements and an imaging method |
| EP3597313A1 (en) | 2018-07-18 | 2020-01-22 | Koninklijke Philips N.V. | Ultrasound imaging system using an array of transducer elements and an imaging method |
| US10725597B2 (en) * | 2018-07-23 | 2020-07-28 | Superc-Touch Corporation | Hovering and touch sensing apparatus with enhanced sensitivity |
| EP3613352A1 (en) * | 2018-08-21 | 2020-02-26 | Koninklijke Philips N.V. | Systems and methods for performing bi-plane imaging |
| JP7089992B2 (ja) | 2018-08-31 | 2022-06-23 | 富士フイルムヘルスケア株式会社 | 超音波トランスデューサアレイおよび超音波プローブ |
| EP3733309A1 (en) | 2019-04-30 | 2020-11-04 | Koninklijke Philips N.V. | Capacitive micro-machined ultrasound transducer (cmut) devices |
| US12427544B2 (en) * | 2019-08-30 | 2025-09-30 | Vermon Sa | CMUT transducer |
| WO2021077381A1 (zh) * | 2019-10-25 | 2021-04-29 | 京东方科技集团股份有限公司 | 电容式微机械超声换能单元及其制备方法、面板、装置 |
| KR102253210B1 (ko) * | 2020-08-06 | 2021-05-18 | 한국과학기술원 | 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법 |
| EP4247567B1 (en) | 2020-11-19 | 2024-12-25 | Katholieke Universiteit Leuven | An ultrasonic transducer structure |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2724437B1 (de) * | 1977-05-31 | 1978-06-15 | Siemens Ag | Nach dem Impuls-Echo-Verfahren arbeitendes Ultraschall-Bildgeraet |
| US5396143A (en) * | 1994-05-20 | 1995-03-07 | Hewlett-Packard Company | Elevation aperture control of an ultrasonic transducer |
| US5997479A (en) * | 1998-05-28 | 1999-12-07 | Hewlett-Packard Company | Phased array acoustic systems with intra-group processors |
| US6865140B2 (en) | 2003-03-06 | 2005-03-08 | General Electric Company | Mosaic arrays using micromachined ultrasound transducers |
| WO2005084284A2 (en) * | 2004-02-27 | 2005-09-15 | Georgia Tech Research Corporation | Multiple element electrode cmut devices and fabrication methods |
| JP2008541473A (ja) * | 2005-05-18 | 2008-11-20 | コロ テクノロジーズ インコーポレイテッド | 貫通ウェーハ相互接続 |
| CA2607916A1 (en) | 2005-05-18 | 2006-11-23 | Kolo Technologies, Inc. | Micro-electro-mechanical transducers |
| JP4790315B2 (ja) | 2005-05-31 | 2011-10-12 | オリンパスメディカルシステムズ株式会社 | 静電容量型超音波振動子 |
| NO20052656D0 (no) | 2005-06-02 | 2005-06-02 | Lumex As | Geometrisk bildetransformasjon basert pa tekstlinjesoking |
| JP4880275B2 (ja) | 2005-10-03 | 2012-02-22 | オリンパスメディカルシステムズ株式会社 | 静電容量型超音波振動子装置 |
| EP1777721A1 (en) * | 2005-10-18 | 2007-04-25 | Seiko Epson Corporation | Micro-electromechanical switch, method of manufacturing an integrated circuit including at least one such switch, and an integrated circuit |
| EP1944070A1 (en) * | 2007-01-12 | 2008-07-16 | Esaote S.p.A. | Bidimensional ultrasonic array for volumetric imaging |
| JP5329408B2 (ja) | 2007-07-11 | 2013-10-30 | 株式会社日立メディコ | 超音波探触子及び超音波診断装置 |
| EP2170531A2 (en) * | 2007-07-31 | 2010-04-07 | Koninklijke Philips Electronics N.V. | Cmuts with a high-k dielectric |
| CN101868981B (zh) * | 2007-12-03 | 2014-05-07 | 科隆科技公司 | 叠层换能设备 |
| EP2326432A2 (en) * | 2008-09-16 | 2011-06-01 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasound transducer |
| WO2015086413A1 (en) * | 2013-12-12 | 2015-06-18 | Koninklijke Philips N.V. | Monolithically integrated three electrode cmut device |
| WO2016091624A1 (en) * | 2014-12-11 | 2016-06-16 | Koninklijke Philips N.V. | Two-terminal cmut device |
-
2014
- 2014-12-04 WO PCT/EP2014/076475 patent/WO2015086413A1/en not_active Ceased
- 2014-12-04 CN CN201480067581.9A patent/CN105828962B/zh active Active
- 2014-12-04 JP JP2016536176A patent/JP6482558B2/ja active Active
- 2014-12-04 US US15/103,388 patent/US10265728B2/en active Active
- 2014-12-04 EP EP14809802.3A patent/EP3079837B1/en active Active
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