CN105828962B - 单片集成的三电极cmut设备 - Google Patents

单片集成的三电极cmut设备 Download PDF

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Publication number
CN105828962B
CN105828962B CN201480067581.9A CN201480067581A CN105828962B CN 105828962 B CN105828962 B CN 105828962B CN 201480067581 A CN201480067581 A CN 201480067581A CN 105828962 B CN105828962 B CN 105828962B
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China
Prior art keywords
electrode
cmut
unit
coupled
bias voltage
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CN201480067581.9A
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English (en)
Chinese (zh)
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CN105828962A (zh
Inventor
A·C·范伦斯
A·W·格伦兰德
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/20—Application to multi-element transducer

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
CN201480067581.9A 2013-12-12 2014-12-04 单片集成的三电极cmut设备 Active CN105828962B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881.0 2013-12-12
EP13196881 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (2)

Publication Number Publication Date
CN105828962A CN105828962A (zh) 2016-08-03
CN105828962B true CN105828962B (zh) 2019-07-23

Family

ID=49765363

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480067581.9A Active CN105828962B (zh) 2013-12-12 2014-12-04 单片集成的三电极cmut设备

Country Status (5)

Country Link
US (1) US10265728B2 (enExample)
EP (1) EP3079837B1 (enExample)
JP (1) JP6482558B2 (enExample)
CN (1) CN105828962B (enExample)
WO (1) WO2015086413A1 (enExample)

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JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
US10571436B2 (en) * 2014-08-25 2020-02-25 B-K Medical Aps Transducer array CMUT element biasing
US10139479B2 (en) 2014-10-15 2018-11-27 Qualcomm Incorporated Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
EP3229978B1 (en) * 2014-12-11 2020-05-27 Koninklijke Philips N.V. Two-terminal cmut device
EP3317026B1 (en) 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
WO2017025438A1 (en) * 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
JP6907193B2 (ja) 2015-09-10 2021-07-21 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 幅広い深度及び詳細なビューを備えた超音波システム
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
CN108351411B (zh) 2015-11-02 2022-05-13 皇家飞利浦有限公司 包括干扰分析器的用于以可变频率提供体积区域的超声图像的超声系统
CN108348217B (zh) * 2015-11-02 2021-07-20 皇家飞利浦有限公司 超声换能器阵列、探头和系统
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11877895B2 (en) * 2016-11-28 2024-01-23 Koninklijke Philips N.V. CMUT device and imaging method
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
EP4289521A3 (en) * 2016-12-22 2024-03-27 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
EP4021649A1 (en) * 2019-08-30 2022-07-06 Vermon S.A. Cmut transducer
CN115461231B (zh) * 2019-10-25 2024-08-06 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
US12459001B2 (en) 2020-11-19 2025-11-04 Katholieke Universiteit Leuven Ultrasonic transducer array device

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US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
WO2009016606A3 (en) * 2007-07-31 2009-08-06 Koninkl Philips Electronics Nv Cmuts with a high-k dielectric
CN101573861A (zh) * 2005-05-18 2009-11-04 科隆科技公司 微机电换能器
CN102159334A (zh) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器

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WO2009008282A1 (ja) 2007-07-11 2009-01-15 Hitachi Medical Corporation 超音波探触子及び超音波診断装置
EP2215854A1 (en) * 2007-12-03 2010-08-11 Kolo Technologies, Inc. Stacked transducing devices
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
EP3229978B1 (en) * 2014-12-11 2020-05-27 Koninklijke Philips N.V. Two-terminal cmut device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
CN101573861A (zh) * 2005-05-18 2009-11-04 科隆科技公司 微机电换能器
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
WO2009016606A3 (en) * 2007-07-31 2009-08-06 Koninkl Philips Electronics Nv Cmuts with a high-k dielectric
CN102159334A (zh) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器

Also Published As

Publication number Publication date
WO2015086413A1 (en) 2015-06-18
US20160310992A1 (en) 2016-10-27
JP2017508315A (ja) 2017-03-23
CN105828962A (zh) 2016-08-03
US10265728B2 (en) 2019-04-23
EP3079837A1 (en) 2016-10-19
EP3079837B1 (en) 2023-02-08
JP6482558B2 (ja) 2019-03-13

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