CN105828962B - 单片集成的三电极cmut设备 - Google Patents

单片集成的三电极cmut设备 Download PDF

Info

Publication number
CN105828962B
CN105828962B CN201480067581.9A CN201480067581A CN105828962B CN 105828962 B CN105828962 B CN 105828962B CN 201480067581 A CN201480067581 A CN 201480067581A CN 105828962 B CN105828962 B CN 105828962B
Authority
CN
China
Prior art keywords
electrode
cmut
unit
coupled
bias voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480067581.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN105828962A (zh
Inventor
A·C·范伦斯
A·W·格伦兰德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of CN105828962A publication Critical patent/CN105828962A/zh
Application granted granted Critical
Publication of CN105828962B publication Critical patent/CN105828962B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/20—Application to multi-element transducer

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
CN201480067581.9A 2013-12-12 2014-12-04 单片集成的三电极cmut设备 Active CN105828962B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881.0 2013-12-12
EP13196881 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (2)

Publication Number Publication Date
CN105828962A CN105828962A (zh) 2016-08-03
CN105828962B true CN105828962B (zh) 2019-07-23

Family

ID=49765363

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480067581.9A Active CN105828962B (zh) 2013-12-12 2014-12-04 单片集成的三电极cmut设备

Country Status (5)

Country Link
US (1) US10265728B2 (enExample)
EP (1) EP3079837B1 (enExample)
JP (1) JP6482558B2 (enExample)
CN (1) CN105828962B (enExample)
WO (1) WO2015086413A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2825856B1 (en) * 2012-03-13 2023-09-27 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer device with charging voltage source
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
US10571436B2 (en) * 2014-08-25 2020-02-25 B-K Medical Aps Transducer array CMUT element biasing
US9995821B2 (en) 2014-10-15 2018-06-12 Qualcomm Incorporated Active beam-forming technique for piezoelectric ultrasonic transducer array
CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备
WO2017001636A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
US11097312B2 (en) * 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
WO2017042304A1 (en) 2015-09-10 2017-03-16 Koninklijke Philips N.V. An ultrasound system with wide depth and detailed viewing
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
US11084062B2 (en) * 2015-11-02 2021-08-10 Koninklijke Philips N.V. Ultrasound transducer array, probe and system
WO2017076758A1 (en) 2015-11-02 2017-05-11 Koninklijke Philips N.V. An ultrasound system for providing ultrasound images at variable frequencies of a volumetric region comprising an interferer analyzer
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11877895B2 (en) * 2016-11-28 2024-01-23 Koninklijke Philips N.V. CMUT device and imaging method
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) * 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) * 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) * 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) * 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
WO2021038300A1 (en) * 2019-08-30 2021-03-04 Vermon Sa Cmut transducer
CN115461231B (zh) * 2019-10-25 2024-08-06 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
CA3199196A1 (en) 2020-11-19 2022-05-27 Michael Kraft Ultrasonic transducer array device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
WO2009016606A3 (en) * 2007-07-31 2009-08-06 Koninkl Philips Electronics Nv Cmuts with a high-k dielectric
CN101573861A (zh) * 2005-05-18 2009-11-04 科隆科技公司 微机电换能器
CN102159334A (zh) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2724437B1 (de) * 1977-05-31 1978-06-15 Siemens Ag Nach dem Impuls-Echo-Verfahren arbeitendes Ultraschall-Bildgeraet
US5396143A (en) * 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US5997479A (en) * 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6865140B2 (en) 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
WO2006123301A2 (en) * 2005-05-18 2006-11-23 Kolo Technologies, Inc. Micro-electro-mechanical transducers
JP4790315B2 (ja) 2005-05-31 2011-10-12 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子
NO20052656D0 (no) 2005-06-02 2005-06-02 Lumex As Geometrisk bildetransformasjon basert pa tekstlinjesoking
JP4880275B2 (ja) 2005-10-03 2012-02-22 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子装置
EP1777721A1 (en) * 2005-10-18 2007-04-25 Seiko Epson Corporation Micro-electromechanical switch, method of manufacturing an integrated circuit including at least one such switch, and an integrated circuit
WO2009008282A1 (ja) 2007-07-11 2009-01-15 Hitachi Medical Corporation 超音波探触子及び超音波診断装置
JP5529749B2 (ja) * 2007-12-03 2014-06-25 コロ テクノロジーズ インコーポレイテッド 積層型変換デバイス
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
CN101573861A (zh) * 2005-05-18 2009-11-04 科隆科技公司 微机电换能器
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
WO2009016606A3 (en) * 2007-07-31 2009-08-06 Koninkl Philips Electronics Nv Cmuts with a high-k dielectric
CN102159334A (zh) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器

Also Published As

Publication number Publication date
WO2015086413A1 (en) 2015-06-18
JP6482558B2 (ja) 2019-03-13
JP2017508315A (ja) 2017-03-23
US20160310992A1 (en) 2016-10-27
EP3079837B1 (en) 2023-02-08
CN105828962A (zh) 2016-08-03
US10265728B2 (en) 2019-04-23
EP3079837A1 (en) 2016-10-19

Similar Documents

Publication Publication Date Title
CN105828962B (zh) 单片集成的三电极cmut设备
US10549316B2 (en) Two-terminal CMUT device
JP6767474B2 (ja) 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ
CN106536068B (zh) 超声换能器布置和组件、同轴电线组件、超声探头及超声成像系统
CN108348217B (zh) 超声换能器阵列、探头和系统
CN110100294B (zh) 电容式射频微机电开关的系统和操作方法
US20240108317A1 (en) Cmut device and imaging method
JP7268223B2 (ja) 増大された患者安全性を持つ容量性マイクロマシン超音波トランスデューサ
US11628472B2 (en) Capacitive micro-machined ultrasound transducer (CMUT) devices

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant