JP6482558B2 - モノリシックに集積された三電極ｃｍｕｔ装置 - Google Patents

モノリシックに集積された三電極ｃｍｕｔ装置 Download PDF

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Publication number
JP6482558B2
JP6482558B2 JP2016536176A JP2016536176A JP6482558B2 JP 6482558 B2 JP6482558 B2 JP 6482558B2 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 6482558 B2 JP6482558 B2 JP 6482558B2
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electrode
cmut
cell
capacitive
array
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Japanese (ja)
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JP2017508315A (ja
JP2017508315A5 (enExample
Inventor
レンス アントニア コルネリア ファン
レンス アントニア コルネリア ファン
アルフォンス ウォウター グローンランド
アルフォンス ウォウター グローンランド
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/20—Application to multi-element transducer

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
JP2016536176A 2013-12-12 2014-12-04 モノリシックに集積された三電極ｃｍｕｔ装置 Active JP6482558B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881.0 2013-12-12
EP13196881 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (3)

Publication Number Publication Date
JP2017508315A JP2017508315A (ja) 2017-03-23
JP2017508315A5 JP2017508315A5 (enExample) 2017-12-14
JP6482558B2 true JP6482558B2 (ja) 2019-03-13

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JP2016536176A Active JP6482558B2 (ja) 2013-12-12 2014-12-04 モノリシックに集積された三電極ｃｍｕｔ装置

Country Status (5)

Country Link
US (1) US10265728B2 (enExample)
EP (1) EP3079837B1 (enExample)
JP (1) JP6482558B2 (enExample)
CN (1) CN105828962B (enExample)
WO (1) WO2015086413A1 (enExample)

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JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
US10571436B2 (en) * 2014-08-25 2020-02-25 B-K Medical Aps Transducer array CMUT element biasing
US10139479B2 (en) 2014-10-15 2018-11-27 Qualcomm Incorporated Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
EP3229978B1 (en) * 2014-12-11 2020-05-27 Koninklijke Philips N.V. Two-terminal cmut device
EP3317026B1 (en) 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
WO2017025438A1 (en) * 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
JP6907193B2 (ja) 2015-09-10 2021-07-21 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 幅広い深度及び詳細なビューを備えた超音波システム
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
CN108351411B (zh) 2015-11-02 2022-05-13 皇家飞利浦有限公司 包括干扰分析器的用于以可变频率提供体积区域的超声图像的超声系统
CN108348217B (zh) * 2015-11-02 2021-07-20 皇家飞利浦有限公司 超声换能器阵列、探头和系统
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11877895B2 (en) * 2016-11-28 2024-01-23 Koninklijke Philips N.V. CMUT device and imaging method
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
EP4289521A3 (en) * 2016-12-22 2024-03-27 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
EP4021649A1 (en) * 2019-08-30 2022-07-06 Vermon S.A. Cmut transducer
CN115461231B (zh) * 2019-10-25 2024-08-06 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
US12459001B2 (en) 2020-11-19 2025-11-04 Katholieke Universiteit Leuven Ultrasonic transducer array device

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EP3229978B1 (en) * 2014-12-11 2020-05-27 Koninklijke Philips N.V. Two-terminal cmut device

Also Published As

Publication number Publication date
CN105828962B (zh) 2019-07-23
WO2015086413A1 (en) 2015-06-18
US20160310992A1 (en) 2016-10-27
JP2017508315A (ja) 2017-03-23
CN105828962A (zh) 2016-08-03
US10265728B2 (en) 2019-04-23
EP3079837A1 (en) 2016-10-19
EP3079837B1 (en) 2023-02-08

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