JP6482558B2 - モノリシックに集積された三電極ｃｍｕｔ装置 - Google Patents

モノリシックに集積された三電極ｃｍｕｔ装置 Download PDF

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Publication number
JP6482558B2
JP6482558B2 JP2016536176A JP2016536176A JP6482558B2 JP 6482558 B2 JP6482558 B2 JP 6482558B2 JP 2016536176 A JP2016536176 A JP 2016536176A JP 2016536176 A JP2016536176 A JP 2016536176A JP 6482558 B2 JP6482558 B2 JP 6482558B2
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electrode
cmut
cell
capacitive
array
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Japanese (ja)
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JP2017508315A (ja
JP2017508315A5 (enExample
Inventor
レンス アントニア コルネリア ファン
レンス アントニア コルネリア ファン
アルフォンス ウォウター グローンランド
アルフォンス ウォウター グローンランド
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/20—Application to multi-element transducer

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
JP2016536176A 2013-12-12 2014-12-04 モノリシックに集積された三電極ｃｍｕｔ装置 Active JP6482558B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13196881 2013-12-12
EP13196881.0 2013-12-12
PCT/EP2014/076475 WO2015086413A1 (en) 2013-12-12 2014-12-04 Monolithically integrated three electrode cmut device

Publications (3)

Publication Number Publication Date
JP2017508315A JP2017508315A (ja) 2017-03-23
JP2017508315A5 JP2017508315A5 (enExample) 2017-12-14
JP6482558B2 true JP6482558B2 (ja) 2019-03-13

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Family Applications (1)

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JP2016536176A Active JP6482558B2 (ja) 2013-12-12 2014-12-04 モノリシックに集積された三電極ｃｍｕｔ装置

Country Status (5)

Country Link
US (1) US10265728B2 (enExample)
EP (1) EP3079837B1 (enExample)
JP (1) JP6482558B2 (enExample)
CN (1) CN105828962B (enExample)
WO (1) WO2015086413A1 (enExample)

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WO2015086413A1 (en) * 2013-12-12 2015-06-18 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
WO2016030717A1 (en) * 2014-08-25 2016-03-03 B-K Medical Aps Transducer array cmut element biasing
US10139479B2 (en) 2014-10-15 2018-11-27 Qualcomm Incorporated Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
WO2016091624A1 (en) * 2014-12-11 2016-06-16 Koninklijke Philips N.V. Two-terminal cmut device
EP3317026B1 (en) * 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
WO2017025438A1 (en) * 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
CN108027437B (zh) 2015-09-10 2022-07-05 皇家飞利浦有限公司 具有宽深度和详细查看的超声系统
US10497748B2 (en) 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
CN108351411B (zh) 2015-11-02 2022-05-13 皇家飞利浦有限公司 包括干扰分析器的用于以可变频率提供体积区域的超声图像的超声系统
JP6495545B2 (ja) * 2015-11-02 2019-04-03 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスジューサアレイ、プローブ及びシステム
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11877895B2 (en) * 2016-11-28 2024-01-23 Koninklijke Philips N.V. CMUT device and imaging method
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
US10613058B2 (en) * 2017-06-27 2020-04-07 Kolo Medical, Ltd. CMUT signal separation with multi-level bias control
EP3527140A1 (en) * 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
EP3597313A1 (en) 2018-07-18 2020-01-22 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10725597B2 (en) * 2018-07-23 2020-07-28 Superc-Touch Corporation Hovering and touch sensing apparatus with enhanced sensitivity
EP3613352A1 (en) * 2018-08-21 2020-02-26 Koninklijke Philips N.V. Systems and methods for performing bi-plane imaging
JP7089992B2 (ja) 2018-08-31 2022-06-23 富士フイルムヘルスケア株式会社 超音波トランスデューサアレイおよび超音波プローブ
EP3733309A1 (en) 2019-04-30 2020-11-04 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices
US12427544B2 (en) * 2019-08-30 2025-09-30 Vermon Sa CMUT transducer
WO2021077381A1 (zh) * 2019-10-25 2021-04-29 京东方科技集团股份有限公司 电容式微机械超声换能单元及其制备方法、面板、装置
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
EP4247567B1 (en) 2020-11-19 2024-12-25 Katholieke Universiteit Leuven An ultrasonic transducer structure

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WO2005084284A2 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
JP2008541473A (ja) * 2005-05-18 2008-11-20 コロ テクノロジーズ インコーポレイテッド 貫通ウェーハ相互接続
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Also Published As

Publication number Publication date
US10265728B2 (en) 2019-04-23
EP3079837B1 (en) 2023-02-08
CN105828962B (zh) 2019-07-23
WO2015086413A1 (en) 2015-06-18
CN105828962A (zh) 2016-08-03
US20160310992A1 (en) 2016-10-27
EP3079837A1 (en) 2016-10-19
JP2017508315A (ja) 2017-03-23

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