JP2015513272A5 - - Google Patents
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- Publication number
- JP2015513272A5 JP2015513272A5 JP2014561548A JP2014561548A JP2015513272A5 JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5 JP 2014561548 A JP2014561548 A JP 2014561548A JP 2014561548 A JP2014561548 A JP 2014561548A JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5
- Authority
- JP
- Japan
- Prior art keywords
- cmut
- voltage source
- dielectric layer
- cmut device
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012544 monitoring process Methods 0.000 claims 7
- 238000002604 ultrasonography Methods 0.000 claims 5
- 230000005540 biological transmission Effects 0.000 claims 4
- 239000012528 membrane Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 230000035945 sensitivity Effects 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261610130P | 2012-03-13 | 2012-03-13 | |
| US61/610,130 | 2012-03-13 | ||
| PCT/IB2013/051631 WO2013136212A1 (en) | 2012-03-13 | 2013-03-01 | Capacitive micro-machined ultrasound transducer device with charging voltage source |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015513272A JP2015513272A (ja) | 2015-04-30 |
| JP2015513272A5 true JP2015513272A5 (enExample) | 2016-04-21 |
| JP6329491B2 JP6329491B2 (ja) | 2018-05-23 |
Family
ID=48142836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014561548A Active JP6329491B2 (ja) | 2012-03-13 | 2013-03-01 | 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9950342B2 (enExample) |
| EP (1) | EP2825856B1 (enExample) |
| JP (1) | JP6329491B2 (enExample) |
| CN (1) | CN104160250B (enExample) |
| WO (1) | WO2013136212A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6011235B2 (ja) | 2012-10-17 | 2016-10-19 | セイコーエプソン株式会社 | 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 |
| JP6534190B2 (ja) * | 2013-09-27 | 2019-06-26 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波トランスデューサアセンブリ並びに超音波を送信及び受信するための方法 |
| JP6684817B2 (ja) * | 2014-11-25 | 2020-04-22 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波システム及び方法 |
| EP3316791B1 (en) | 2015-07-02 | 2020-08-05 | Koninklijke Philips N.V. | Multi-mode capacitive micromachined ultrasound transducer and associated devices and systems |
| WO2017025438A1 (en) | 2015-08-11 | 2017-02-16 | Koninklijke Philips N.V. | Capacitive micromachined ultrasonic transducers with increased lifetime |
| US9987661B2 (en) | 2015-12-02 | 2018-06-05 | Butterfly Network, Inc. | Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods |
| EP4289521A3 (en) * | 2016-12-22 | 2024-03-27 | Koninklijke Philips N.V. | Systems and methods of operation of capacitive radio frequency micro-electromechanical switches |
| CN110100294B (zh) * | 2016-12-22 | 2022-03-29 | 皇家飞利浦有限公司 | 电容式射频微机电开关的系统和操作方法 |
| US10986435B2 (en) * | 2017-04-18 | 2021-04-20 | Massachusetts Institute Of Technology | Electrostatic acoustic transducer utilized in a hearing aid or audio processing system |
| US11026662B2 (en) * | 2018-01-11 | 2021-06-08 | Siemens Medical Solutions Usa, Inc. | Ultrasound transmit/receive for pulse inversion |
| FR3077162B1 (fr) * | 2018-01-22 | 2020-02-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Transducteur piezoelectrique |
| WO2021019296A1 (en) * | 2019-07-26 | 2021-02-04 | Vermon Sa | Cmut transducer and method for manufacturing |
| JP2021038981A (ja) * | 2019-09-02 | 2021-03-11 | 株式会社日立製作所 | 容量検出型超音波トランスデューサを使用した計測方法 |
| US11738369B2 (en) * | 2020-02-17 | 2023-08-29 | GE Precision Healthcare LLC | Capactive micromachined transducer having a high contact resistance part |
| DE102021200003A1 (de) * | 2021-01-04 | 2022-07-07 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6443901B1 (en) * | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
| JP4746291B2 (ja) | 2004-08-05 | 2011-08-10 | オリンパス株式会社 | 静電容量型超音波振動子、及びその製造方法 |
| EP1932476A4 (en) * | 2005-09-05 | 2010-06-23 | Hitachi Medical Corp | ULTRASOUND DEVICE |
| JP4434109B2 (ja) * | 2005-09-05 | 2010-03-17 | 株式会社日立製作所 | 電気・音響変換素子 |
| WO2007058056A1 (ja) * | 2005-11-18 | 2007-05-24 | Hitachi Medical Corporation | 超音波診断装置、超音波診断装置の較正方法 |
| US7599254B2 (en) * | 2005-12-20 | 2009-10-06 | Siemens Medical Solutions Usa, Inc. | Transducer static discharge methods and apparatus |
| JP4852356B2 (ja) * | 2006-06-27 | 2012-01-11 | 株式会社日立メディコ | 超音波診断装置 |
| JP4839176B2 (ja) | 2006-10-12 | 2011-12-21 | オリンパスメディカルシステムズ株式会社 | 超音波トランスデューサ及び超音波診断装置 |
| KR20130014619A (ko) * | 2006-11-03 | 2013-02-07 | 리써치 트라이앵글 인스티튜트 | 굴곡 모드 압전 트랜스듀서를 사용하는 보강된 초음파 촬영 프로브 |
| JP5337813B2 (ja) | 2007-12-03 | 2013-11-06 | コロ テクノロジーズ インコーポレイテッド | デュアルモード動作マイクロマシン超音波トランスデューサ |
| JP2009272824A (ja) | 2008-05-02 | 2009-11-19 | Olympus Medical Systems Corp | 超音波振動子セル、超音波振動子および超音波内視鏡 |
| WO2010000020A1 (en) | 2008-06-30 | 2010-01-07 | Cathrx Ltd | A catheter |
| US8315125B2 (en) | 2009-03-18 | 2012-11-20 | Sonetics Ultrasound, Inc. | System and method for biasing CMUT elements |
| JP6482558B2 (ja) * | 2013-12-12 | 2019-03-13 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | モノリシックに集積された三電極ｃｍｕｔ装置 |
-
2013
- 2013-03-01 JP JP2014561548A patent/JP6329491B2/ja active Active
- 2013-03-01 EP EP13717563.4A patent/EP2825856B1/en active Active
- 2013-03-01 WO PCT/IB2013/051631 patent/WO2013136212A1/en not_active Ceased
- 2013-03-01 CN CN201380013597.7A patent/CN104160250B/zh active Active
- 2013-03-01 US US14/382,560 patent/US9950342B2/en active Active
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