JP2015513272A5 - - Google Patents

Download PDF

Info

Publication number
JP2015513272A5
JP2015513272A5 JP2014561548A JP2014561548A JP2015513272A5 JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5 JP 2014561548 A JP2014561548 A JP 2014561548A JP 2014561548 A JP2014561548 A JP 2014561548A JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5
Authority
JP
Japan
Prior art keywords
cmut
voltage source
dielectric layer
cmut device
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014561548A
Other languages
English (en)
Japanese (ja)
Other versions
JP6329491B2 (ja
JP2015513272A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2013/051631 external-priority patent/WO2013136212A1/en
Publication of JP2015513272A publication Critical patent/JP2015513272A/ja
Publication of JP2015513272A5 publication Critical patent/JP2015513272A5/ja
Application granted granted Critical
Publication of JP6329491B2 publication Critical patent/JP6329491B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014561548A 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Active JP6329491B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610130P 2012-03-13 2012-03-13
US61/610,130 2012-03-13
PCT/IB2013/051631 WO2013136212A1 (en) 2012-03-13 2013-03-01 Capacitive micro-machined ultrasound transducer device with charging voltage source

Publications (3)

Publication Number Publication Date
JP2015513272A JP2015513272A (ja) 2015-04-30
JP2015513272A5 true JP2015513272A5 (enExample) 2016-04-21
JP6329491B2 JP6329491B2 (ja) 2018-05-23

Family

ID=48142836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014561548A Active JP6329491B2 (ja) 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置

Country Status (5)

Country Link
US (1) US9950342B2 (enExample)
EP (1) EP2825856B1 (enExample)
JP (1) JP6329491B2 (enExample)
CN (1) CN104160250B (enExample)
WO (1) WO2013136212A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
EP3052250B1 (en) * 2013-09-27 2022-03-30 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
EP3223709B1 (en) * 2014-11-25 2019-02-20 Koninklijke Philips N.V. Ultrasound system and method
CN107735032B (zh) 2015-07-02 2021-09-21 皇家飞利浦有限公司 多模式电容式微加工超声换能器以及相关联的设备、系统和方法
WO2017025438A1 (en) 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
CN110100294B (zh) * 2016-12-22 2022-03-29 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
US11190868B2 (en) * 2017-04-18 2021-11-30 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a headphone device or an earbud
US11026662B2 (en) * 2018-01-11 2021-06-08 Siemens Medical Solutions Usa, Inc. Ultrasound transmit/receive for pulse inversion
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
WO2021019296A1 (en) * 2019-07-26 2021-02-04 Vermon Sa Cmut transducer and method for manufacturing
JP2021038981A (ja) * 2019-09-02 2021-03-11 株式会社日立製作所 容量検出型超音波トランスデューサを使用した計測方法
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
DE102021200003A1 (de) * 2021-01-04 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
EP1932476A4 (en) * 2005-09-05 2010-06-23 Hitachi Medical Corp ULTRASOUND DEVICE
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
JP4812771B2 (ja) * 2005-11-18 2011-11-09 株式会社日立メディコ 超音波診断装置、超音波診断装置の較正方法
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
CA2667751A1 (en) 2006-11-03 2008-05-08 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
JP5337813B2 (ja) 2007-12-03 2013-11-06 コロ テクノロジーズ インコーポレイテッド デュアルモード動作マイクロマシン超音波トランスデューサ
JP2009272824A (ja) * 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
WO2010000020A1 (en) 2008-06-30 2010-01-07 Cathrx Ltd A catheter
US8315125B2 (en) 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
WO2015086413A1 (en) * 2013-12-12 2015-06-18 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device

Similar Documents

Publication Publication Date Title
JP2015513272A5 (enExample)
JP6329491B2 (ja) 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置
EP2711079A3 (en) Microfluidic Feedback Using Impedance Detection
JP2013005137A5 (ja) 圧電センサー装置、超音波センサー、および圧電センサー装置の駆動方法
JP2010527699A5 (enExample)
JP2014507922A5 (enExample)
JP2019004027A5 (enExample)
WO2011021358A3 (en) Capacitive electromechanical transducer apparatus and method for adjusting its sensitivity
JP2010528814A5 (enExample)
WO2011139602A3 (en) Methods for forming a connection with a micromachined ultrasonic transducer, and associated apparatuses
FI3077041T3 (fi) Syövän immunoterapia radiotaajuisella sähköisellä solukalvon hajotuksella (rf-emb)
WO2013003499A3 (en) Cavitation assisted sonochemical hydrogen production system
JP2016073452A5 (enExample)
EP2584687A3 (en) Power Supplier and Image Forming Apparatus including the Power Supplier
WO2011146138A3 (en) Dual-mode piezocomposite ultrasonic transducer
JP2020502944A5 (enExample)
JP2012039754A5 (enExample)
JP2019504534A5 (enExample)
MX385440B (es) Sistema médico.
JP2016213358A5 (enExample)
WO2012030962A3 (en) Apparatus, systems, and methods for current monitoring in ultrasound powered neurostimulation
US10603012B2 (en) Probe and information acquiring device
JP2009198496A5 (enExample)
JP2009225503A5 (enExample)
EP2800259A3 (en) Power supply system and ink-jet image forming apparatus