JP2009198496A5 - - Google Patents

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Publication number
JP2009198496A5
JP2009198496A5 JP2009007768A JP2009007768A JP2009198496A5 JP 2009198496 A5 JP2009198496 A5 JP 2009198496A5 JP 2009007768 A JP2009007768 A JP 2009007768A JP 2009007768 A JP2009007768 A JP 2009007768A JP 2009198496 A5 JP2009198496 A5 JP 2009198496A5
Authority
JP
Japan
Prior art keywords
piezoelectric body
piezoelectric
force
regulating member
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009007768A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009198496A (ja
JP4677493B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2009007768A external-priority patent/JP4677493B2/ja
Priority to JP2009007768A priority Critical patent/JP4677493B2/ja
Priority to EP09703195.9A priority patent/EP2240750B1/en
Priority to PCT/JP2009/051147 priority patent/WO2009093727A1/en
Priority to US12/743,076 priority patent/US8365615B2/en
Priority to CN2009801025766A priority patent/CN101918804B/zh
Priority to KR1020107017815A priority patent/KR101247087B1/ko
Priority to TW098102598A priority patent/TWI392860B/zh
Publication of JP2009198496A publication Critical patent/JP2009198496A/ja
Publication of JP2009198496A5 publication Critical patent/JP2009198496A5/ja
Publication of JP4677493B2 publication Critical patent/JP4677493B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009007768A 2008-01-22 2009-01-16 圧電振動型力センサ Expired - Fee Related JP4677493B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2009007768A JP4677493B2 (ja) 2008-01-22 2009-01-16 圧電振動型力センサ
CN2009801025766A CN101918804B (zh) 2008-01-22 2009-01-20 压电振动型力传感器
PCT/JP2009/051147 WO2009093727A1 (en) 2008-01-22 2009-01-20 Piezoelectric vibration type force sensor
US12/743,076 US8365615B2 (en) 2008-01-22 2009-01-20 Piezoelectric vibration type force sensor
EP09703195.9A EP2240750B1 (en) 2008-01-22 2009-01-20 Piezoelectric vibration type force sensor
KR1020107017815A KR101247087B1 (ko) 2008-01-22 2009-01-20 압전 진동형 힘 센서
TW098102598A TWI392860B (zh) 2008-01-22 2009-01-22 壓電振動式力感測器及感測力的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008011626 2008-01-22
JP2009007768A JP4677493B2 (ja) 2008-01-22 2009-01-16 圧電振動型力センサ

Publications (3)

Publication Number Publication Date
JP2009198496A JP2009198496A (ja) 2009-09-03
JP2009198496A5 true JP2009198496A5 (enExample) 2010-09-24
JP4677493B2 JP4677493B2 (ja) 2011-04-27

Family

ID=40901226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009007768A Expired - Fee Related JP4677493B2 (ja) 2008-01-22 2009-01-16 圧電振動型力センサ

Country Status (7)

Country Link
US (1) US8365615B2 (enExample)
EP (1) EP2240750B1 (enExample)
JP (1) JP4677493B2 (enExample)
KR (1) KR101247087B1 (enExample)
CN (1) CN101918804B (enExample)
TW (1) TWI392860B (enExample)
WO (1) WO2009093727A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550468B2 (ja) 2010-06-30 2014-07-16 キヤノン株式会社 力覚センサの校正方法
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
LU91833B1 (en) 2011-06-30 2012-12-31 Iee Sarl Film-type pressure sensor e.g. for article of footwear
JP6317568B2 (ja) 2013-11-15 2018-04-25 キヤノン株式会社 比較回路およびそれを用いた撮像素子並びに比較回路の制御方法
US10201901B2 (en) 2015-01-29 2019-02-12 Canon Kabushiki Kaisha Robot apparatus, method for controlling robot, program, and recording medium
WO2017023404A1 (en) * 2015-07-31 2017-02-09 Sikorsky Aircraft Corporation Multifunctional piezoelectric load sensor assembly
BR112018003579A2 (pt) * 2015-08-31 2018-09-25 Koninklijke Philips N.V. sistema e método de detecção
JP6824764B2 (ja) 2017-01-27 2021-02-03 キヤノン株式会社 センサ、ロボット装置及び物品の製造方法
JP2019011982A (ja) * 2017-06-29 2019-01-24 住友理工株式会社 センサシート、静電容量型センサ、およびセンサシートの製造方法
KR102486453B1 (ko) * 2017-12-08 2023-01-09 삼성디스플레이 주식회사 표시 장치
US11045950B2 (en) 2018-11-02 2021-06-29 Canon Kabushiki Kaisha Driving device and detecting device
CN112716475A (zh) * 2020-12-24 2021-04-30 浙江清华柔性电子技术研究院 一种基于柔性压电传感技术的表面阻抗识别方法和装置
CN116460662A (zh) * 2023-04-18 2023-07-21 华中科技大学 一种高频率紧凑型三分量测力装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278483A (en) 1975-12-25 1977-07-01 Toray Industries Method of measuring force
JPS6034293A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JPS60187834A (ja) 1984-03-07 1985-09-25 Hitachi Ltd 力検出装置
JPS60222734A (ja) 1984-04-20 1985-11-07 Hitachi Ltd 力の検出方法および装置
JPS62230071A (ja) * 1986-03-31 1987-10-08 Ngk Spark Plug Co Ltd 同軸状機械電気変換素子
US4798987A (en) 1986-08-25 1989-01-17 Canon Kabushiki Kaisha Surface acoustic wave generator
JPH0167768U (enExample) * 1987-10-26 1989-05-01
EP0355273B1 (en) 1988-05-18 1994-08-03 Canon Kabushiki Kaisha Probe card, method for measuring part to be measured by use thereof and electrical circuit member
US5200663A (en) 1990-08-29 1993-04-06 Canon Kabushiki Kaisha Surface acoustic wave device provided with output transducer split into a plurality of portions, and communication system using the same
US5367216A (en) 1991-08-02 1994-11-22 Canon Kabushiki Kaisha Surface acoustic wave element and communication system using the same
DE4324692A1 (de) 1993-07-23 1995-01-26 Bosch Gmbh Robert Piezoelektrischer Kraftsensor
KR100243078B1 (ko) 1997-05-12 2000-02-01 윤종용 압전진동형 회전각센서시스템 및 압전진동형 회전각센서의 출력계측방법
JP2000205934A (ja) * 1999-01-08 2000-07-28 Matsushita Electric Ind Co Ltd 重量検出装置
KR100473842B1 (ko) * 2001-10-11 2005-03-07 주식회사 나이콤 진동센서
JP2007017420A (ja) * 2004-10-28 2007-01-25 Matsushita Electric Ind Co Ltd 圧電素子とその製造方法
JP2006126120A (ja) 2004-11-01 2006-05-18 Canon Inc 地中探査装置
CN1800797A (zh) * 2005-01-06 2006-07-12 台达电子工业股份有限公司 应用薄膜体声波共振器的感测装置
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US7915787B2 (en) 2007-07-20 2011-03-29 Canon Kabushiki Kaisha Actuator

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