KR101247087B1 - 압전 진동형 힘 센서 - Google Patents

압전 진동형 힘 센서 Download PDF

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Publication number
KR101247087B1
KR101247087B1 KR1020107017815A KR20107017815A KR101247087B1 KR 101247087 B1 KR101247087 B1 KR 101247087B1 KR 1020107017815 A KR1020107017815 A KR 1020107017815A KR 20107017815 A KR20107017815 A KR 20107017815A KR 101247087 B1 KR101247087 B1 KR 101247087B1
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KR
South Korea
Prior art keywords
force
piezoelectric body
piezoelectric
limiting member
vibration
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Expired - Fee Related
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KR1020107017815A
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English (en)
Korean (ko)
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KR20100113115A (ko
Inventor
슈우이찌 사또
유이찌 소메야
히데유끼 니시다
다까오 요꼬마쯔
겐따로 나까무라
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캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20100113115A publication Critical patent/KR20100113115A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020107017815A 2008-01-22 2009-01-20 압전 진동형 힘 센서 Expired - Fee Related KR101247087B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2008011626 2008-01-22
JPJP-P-2008-011626 2008-01-22
JPJP-P-2009-007768 2009-01-16
JP2009007768A JP4677493B2 (ja) 2008-01-22 2009-01-16 圧電振動型力センサ
PCT/JP2009/051147 WO2009093727A1 (en) 2008-01-22 2009-01-20 Piezoelectric vibration type force sensor

Publications (2)

Publication Number Publication Date
KR20100113115A KR20100113115A (ko) 2010-10-20
KR101247087B1 true KR101247087B1 (ko) 2013-03-25

Family

ID=40901226

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107017815A Expired - Fee Related KR101247087B1 (ko) 2008-01-22 2009-01-20 압전 진동형 힘 센서

Country Status (7)

Country Link
US (1) US8365615B2 (enExample)
EP (1) EP2240750B1 (enExample)
JP (1) JP4677493B2 (enExample)
KR (1) KR101247087B1 (enExample)
CN (1) CN101918804B (enExample)
TW (1) TWI392860B (enExample)
WO (1) WO2009093727A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550468B2 (ja) 2010-06-30 2014-07-16 キヤノン株式会社 力覚センサの校正方法
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
LU91833B1 (en) 2011-06-30 2012-12-31 Iee Sarl Film-type pressure sensor e.g. for article of footwear
JP6317568B2 (ja) 2013-11-15 2018-04-25 キヤノン株式会社 比較回路およびそれを用いた撮像素子並びに比較回路の制御方法
US10201901B2 (en) 2015-01-29 2019-02-12 Canon Kabushiki Kaisha Robot apparatus, method for controlling robot, program, and recording medium
WO2017023404A1 (en) * 2015-07-31 2017-02-09 Sikorsky Aircraft Corporation Multifunctional piezoelectric load sensor assembly
BR112018003579A2 (pt) * 2015-08-31 2018-09-25 Koninklijke Philips N.V. sistema e método de detecção
JP6824764B2 (ja) 2017-01-27 2021-02-03 キヤノン株式会社 センサ、ロボット装置及び物品の製造方法
JP2019011982A (ja) * 2017-06-29 2019-01-24 住友理工株式会社 センサシート、静電容量型センサ、およびセンサシートの製造方法
KR102486453B1 (ko) * 2017-12-08 2023-01-09 삼성디스플레이 주식회사 표시 장치
US11045950B2 (en) 2018-11-02 2021-06-29 Canon Kabushiki Kaisha Driving device and detecting device
CN112716475A (zh) * 2020-12-24 2021-04-30 浙江清华柔性电子技术研究院 一种基于柔性压电传感技术的表面阻抗识别方法和装置
CN116460662A (zh) * 2023-04-18 2023-07-21 华中科技大学 一种高频率紧凑型三分量测力装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100243078B1 (ko) 1997-05-12 2000-02-01 윤종용 압전진동형 회전각센서시스템 및 압전진동형 회전각센서의 출력계측방법
KR20030021108A (ko) * 2001-10-11 2003-03-12 주식회사 나이콤 진동센서

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Publication number Priority date Publication date Assignee Title
JPS5278483A (en) 1975-12-25 1977-07-01 Toray Industries Method of measuring force
JPS6034293A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JPS60187834A (ja) 1984-03-07 1985-09-25 Hitachi Ltd 力検出装置
JPS60222734A (ja) 1984-04-20 1985-11-07 Hitachi Ltd 力の検出方法および装置
JPS62230071A (ja) * 1986-03-31 1987-10-08 Ngk Spark Plug Co Ltd 同軸状機械電気変換素子
US4798987A (en) 1986-08-25 1989-01-17 Canon Kabushiki Kaisha Surface acoustic wave generator
JPH0167768U (enExample) * 1987-10-26 1989-05-01
EP0355273B1 (en) 1988-05-18 1994-08-03 Canon Kabushiki Kaisha Probe card, method for measuring part to be measured by use thereof and electrical circuit member
US5200663A (en) 1990-08-29 1993-04-06 Canon Kabushiki Kaisha Surface acoustic wave device provided with output transducer split into a plurality of portions, and communication system using the same
US5367216A (en) 1991-08-02 1994-11-22 Canon Kabushiki Kaisha Surface acoustic wave element and communication system using the same
DE4324692A1 (de) 1993-07-23 1995-01-26 Bosch Gmbh Robert Piezoelektrischer Kraftsensor
JP2000205934A (ja) * 1999-01-08 2000-07-28 Matsushita Electric Ind Co Ltd 重量検出装置
JP2007017420A (ja) * 2004-10-28 2007-01-25 Matsushita Electric Ind Co Ltd 圧電素子とその製造方法
JP2006126120A (ja) 2004-11-01 2006-05-18 Canon Inc 地中探査装置
CN1800797A (zh) * 2005-01-06 2006-07-12 台达电子工业股份有限公司 应用薄膜体声波共振器的感测装置
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US7915787B2 (en) 2007-07-20 2011-03-29 Canon Kabushiki Kaisha Actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100243078B1 (ko) 1997-05-12 2000-02-01 윤종용 압전진동형 회전각센서시스템 및 압전진동형 회전각센서의 출력계측방법
KR20030021108A (ko) * 2001-10-11 2003-03-12 주식회사 나이콤 진동센서

Also Published As

Publication number Publication date
EP2240750B1 (en) 2015-06-24
JP2009198496A (ja) 2009-09-03
KR20100113115A (ko) 2010-10-20
CN101918804A (zh) 2010-12-15
EP2240750A1 (en) 2010-10-20
JP4677493B2 (ja) 2011-04-27
US20110113898A1 (en) 2011-05-19
EP2240750A4 (en) 2013-11-27
TW200946885A (en) 2009-11-16
TWI392860B (zh) 2013-04-11
US8365615B2 (en) 2013-02-05
WO2009093727A1 (en) 2009-07-30
CN101918804B (zh) 2012-04-18

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