CN104160250B - 具有充电电压源的电容微机械超声换能器设备 - Google Patents

具有充电电压源的电容微机械超声换能器设备 Download PDF

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Publication number
CN104160250B
CN104160250B CN201380013597.7A CN201380013597A CN104160250B CN 104160250 B CN104160250 B CN 104160250B CN 201380013597 A CN201380013597 A CN 201380013597A CN 104160250 B CN104160250 B CN 104160250B
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China
Prior art keywords
cmut
electrode
charging voltage
dielectric layer
polarity
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CN201380013597.7A
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English (en)
Chinese (zh)
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CN104160250A (zh
Inventor
G·A·布罗克-费希尔
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Publication of CN104160250A publication Critical patent/CN104160250A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Surgical Instruments (AREA)
CN201380013597.7A 2012-03-13 2013-03-01 具有充电电压源的电容微机械超声换能器设备 Active CN104160250B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610130P 2012-03-13 2012-03-13
US61/610,130 2012-03-13
PCT/IB2013/051631 WO2013136212A1 (en) 2012-03-13 2013-03-01 Capacitive micro-machined ultrasound transducer device with charging voltage source

Publications (2)

Publication Number Publication Date
CN104160250A CN104160250A (zh) 2014-11-19
CN104160250B true CN104160250B (zh) 2017-10-27

Family

ID=48142836

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380013597.7A Active CN104160250B (zh) 2012-03-13 2013-03-01 具有充电电压源的电容微机械超声换能器设备

Country Status (5)

Country Link
US (1) US9950342B2 (enExample)
EP (1) EP2825856B1 (enExample)
JP (1) JP6329491B2 (enExample)
CN (1) CN104160250B (enExample)
WO (1) WO2013136212A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
WO2015044827A1 (en) * 2013-09-27 2015-04-02 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
JP6684817B2 (ja) * 2014-11-25 2020-04-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び方法
US11766237B2 (en) 2015-07-02 2023-09-26 Philips Image Guided Therapy Corporation Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities
US11097312B2 (en) 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11864947B2 (en) 2016-12-22 2024-01-09 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
US10986435B2 (en) * 2017-04-18 2021-04-20 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a hearing aid or audio processing system
US11026662B2 (en) * 2018-01-11 2021-06-08 Siemens Medical Solutions Usa, Inc. Ultrasound transmit/receive for pulse inversion
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
CN114175682A (zh) * 2019-07-26 2022-03-11 维蒙股份公司 Cmut换能器和制造方法
JP2021038981A (ja) * 2019-09-02 2021-03-11 株式会社日立製作所 容量検出型超音波トランスデューサを使用した計測方法
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
DE102021200003A1 (de) * 2021-01-04 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
CN101227863B (zh) * 2005-09-05 2011-08-31 株式会社日立医药 超声波摄像装置
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
EP1952767B1 (en) * 2005-11-18 2015-07-15 Hitachi Medical Corporation Ultrasound diagnostic apparatus and method of calibrating the same
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
US20100168583A1 (en) 2006-11-03 2010-07-01 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
US8559274B2 (en) * 2007-12-03 2013-10-15 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
JP2009272824A (ja) 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
WO2010000020A1 (en) 2008-06-30 2010-01-07 Cathrx Ltd A catheter
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置

Also Published As

Publication number Publication date
JP2015513272A (ja) 2015-04-30
WO2013136212A1 (en) 2013-09-19
CN104160250A (zh) 2014-11-19
JP6329491B2 (ja) 2018-05-23
US20150016227A1 (en) 2015-01-15
EP2825856B1 (en) 2023-09-27
EP2825856A1 (en) 2015-01-21
US9950342B2 (en) 2018-04-24

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