JP2019504534A - 容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法 - Google Patents

容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法 Download PDF

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JP2019504534A
JP2019504534A JP2018528001A JP2018528001A JP2019504534A JP 2019504534 A JP2019504534 A JP 2019504534A JP 2018528001 A JP2018528001 A JP 2018528001A JP 2018528001 A JP2018528001 A JP 2018528001A JP 2019504534 A JP2019504534 A JP 2019504534A
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bias
ultrasonic transducers
group
ultrasonic
substrate
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Japanese (ja)
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JP2019504534A5 (enExample
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アリー,スーザン,エー.
ザホリアン,ジェイム,スコット
チェン,カイリャン
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バタフライ ネットワーク,インコーポレイテッド
バタフライ ネットワーク,インコーポレイテッド
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Publication of JP2019504534A publication Critical patent/JP2019504534A/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207Driving circuits
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4488Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
JP2018528001A 2015-12-02 2016-12-01 容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法 Pending JP2019504534A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/957,098 2015-12-02
US14/957,098 US9987661B2 (en) 2015-12-02 2015-12-02 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
PCT/US2016/064325 WO2017095988A1 (en) 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods

Publications (2)

Publication Number Publication Date
JP2019504534A true JP2019504534A (ja) 2019-02-14
JP2019504534A5 JP2019504534A5 (enExample) 2019-12-12

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JP2018528001A Pending JP2019504534A (ja) 2015-12-02 2016-12-01 容量型微細加工超音波トランスデューサ(cmut)のバイアス印加並びに関連する装置及び方法

Country Status (10)

Country Link
US (2) US9987661B2 (enExample)
EP (1) EP3383277B1 (enExample)
JP (1) JP2019504534A (enExample)
KR (1) KR102121137B1 (enExample)
CN (1) CN108366774A (enExample)
AU (1) AU2016365309B2 (enExample)
CA (1) CA3006505A1 (enExample)
ES (1) ES2909488T3 (enExample)
TW (1) TWI705858B (enExample)
WO (1) WO2017095988A1 (enExample)

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CN115917485B (zh) 2019-05-21 2024-09-06 京东方科技集团股份有限公司 用于产生和检测超声波感测信号的传感器电路、超声波感测显示设备
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