JP2020513893A5 - - Google Patents
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- Publication number
- JP2020513893A5 JP2020513893A5 JP2019533553A JP2019533553A JP2020513893A5 JP 2020513893 A5 JP2020513893 A5 JP 2020513893A5 JP 2019533553 A JP2019533553 A JP 2019533553A JP 2019533553 A JP2019533553 A JP 2019533553A JP 2020513893 A5 JP2020513893 A5 JP 2020513893A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- dielectric layer
- capacitive
- high frequency
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000012528 membrane Substances 0.000 claims 7
- 230000007547 defect Effects 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- VXAUWWUXCIMFIM-UHFFFAOYSA-M aluminum;oxygen(2-);hydroxide Chemical compound [OH-].[O-2].[Al+3] VXAUWWUXCIMFIM-UHFFFAOYSA-M 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 2
- 230000000638 stimulation Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 230000004936 stimulating effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16206333.3 | 2016-12-22 | ||
| EP16206333 | 2016-12-22 | ||
| PCT/EP2017/083996 WO2018115226A1 (en) | 2016-12-22 | 2017-12-21 | Systems and methods of operation of capacitive radio frequency micro-electromechanical switches |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020513893A JP2020513893A (ja) | 2020-05-21 |
| JP2020513893A5 true JP2020513893A5 (enExample) | 2021-02-04 |
| JP6998379B2 JP6998379B2 (ja) | 2022-01-18 |
Family
ID=57708400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019533553A Active JP6998379B2 (ja) | 2016-12-22 | 2017-12-21 | 容量性高周波微小電気機械スイッチのシステム及び動作方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11864947B2 (enExample) |
| EP (1) | EP3559972B1 (enExample) |
| JP (1) | JP6998379B2 (enExample) |
| CN (1) | CN110100294B (enExample) |
| WO (1) | WO2018115226A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110325293B (zh) * | 2016-12-22 | 2021-06-22 | 皇家飞利浦有限公司 | 电容式射频微机电开关的系统和操作方法 |
| JP2021038981A (ja) * | 2019-09-02 | 2021-03-11 | 株式会社日立製作所 | 容量検出型超音波トランスデューサを使用した計測方法 |
| WO2021167669A2 (en) * | 2019-11-26 | 2021-08-26 | Graphaudio Inc. | Graphene transducers |
| US20230012963A1 (en) * | 2019-12-09 | 2023-01-19 | Orta Dogu Teknik Universitesi | Mems airborne ultrasonic transducer system for detecting brain haemorrhage |
| CN111044181B (zh) * | 2019-12-19 | 2021-10-26 | 华南理工大学 | 梯度零泊松比结构电容式柔性触觉传感器及其制备方法 |
| US11738369B2 (en) * | 2020-02-17 | 2023-08-29 | GE Precision Healthcare LLC | Capactive micromachined transducer having a high contact resistance part |
| CN113950380B (zh) | 2020-03-30 | 2023-07-18 | 京东方科技集团股份有限公司 | 声波换能器及其驱动方法 |
| FR3131367B1 (fr) * | 2021-12-23 | 2023-11-17 | Commissariat Energie Atomique | Procédé et système de détermination de l’état d’un capteur dont le comportement mécanique est non linéaire en fonction de l’amplitude de la pression exercée |
| CN114487627B (zh) * | 2022-01-04 | 2025-05-09 | 清华大学 | 绝缘介质局部空间电荷测试方法、装置、设备及存储介质 |
| CN116027064A (zh) * | 2022-12-29 | 2023-04-28 | 歌尔微电子股份有限公司 | 传感器、传感器的检测方法及电子设备 |
| CN115921259B (zh) * | 2023-01-03 | 2024-11-05 | 京东方科技集团股份有限公司 | 一种超声换能单元及其制备方法、超声换能器件 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6283919B1 (en) | 1996-11-26 | 2001-09-04 | Atl Ultrasound | Ultrasonic diagnostic imaging with blended tissue harmonic signals |
| US6458083B1 (en) | 1996-11-26 | 2002-10-01 | Koninklijke Philips Electronics N.V. | Ultrasonic harmonic imaging with adaptive image formation |
| US6013032A (en) | 1998-03-13 | 2000-01-11 | Hewlett-Packard Company | Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array |
| US5997479A (en) | 1998-05-28 | 1999-12-07 | Hewlett-Packard Company | Phased array acoustic systems with intra-group processors |
| US6530885B1 (en) | 2000-03-17 | 2003-03-11 | Atl Ultrasound, Inc. | Spatially compounded three dimensional ultrasonic images |
| US6443896B1 (en) | 2000-08-17 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Method for creating multiplanar ultrasonic images of a three dimensional object |
| US6468216B1 (en) | 2000-08-24 | 2002-10-22 | Kininklijke Philips Electronics N.V. | Ultrasonic diagnostic imaging of the coronary arteries |
| US20060004289A1 (en) * | 2004-06-30 | 2006-01-05 | Wei-Cheng Tian | High sensitivity capacitive micromachined ultrasound transducer |
| JP4434109B2 (ja) | 2005-09-05 | 2010-03-17 | 株式会社日立製作所 | 電気・音響変換素子 |
| JP4271252B2 (ja) * | 2006-10-12 | 2009-06-03 | オリンパスメディカルシステムズ株式会社 | 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置 |
| WO2009112894A1 (en) | 2008-03-13 | 2009-09-17 | S.O.I.Tec Silicon On Insulator Technologies | Substrate having a charged zone in an insulating buried layer |
| US8975791B2 (en) * | 2008-09-12 | 2015-03-10 | Imec | Patterned electret structures and methods for manufacturing patterned electret structures |
| JP5628178B2 (ja) | 2008-09-16 | 2014-11-19 | コーニンクレッカ フィリップス エヌ ヴェ | 容量性マイクロマシン超音波トランスデューサ |
| EP2246868A1 (en) * | 2009-04-27 | 2010-11-03 | Epcos Ag | Capacitive switch with enhanced lifetime |
| WO2012101107A1 (en) * | 2011-01-24 | 2012-08-02 | Imec | Vertical memory device and method for making thereof |
| JP5875244B2 (ja) * | 2011-04-06 | 2016-03-02 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| WO2013111063A1 (en) | 2012-01-27 | 2013-08-01 | Koninklijke Philips N.V. | Capacitive micro-machined transducer and method of manufacturing the same |
| EP2825856B1 (en) * | 2012-03-13 | 2023-09-27 | Koninklijke Philips N.V. | Capacitive micro-machined ultrasound transducer device with charging voltage source |
| WO2015044827A1 (en) * | 2013-09-27 | 2015-04-02 | Koninklijke Philips N.V. | Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves |
| US10586753B2 (en) * | 2014-03-31 | 2020-03-10 | Koninklijke Philips N.V. | IC die, ultrasound probe, ultrasonic diagnostic system and method |
| US11192107B2 (en) * | 2014-04-25 | 2021-12-07 | Berkeley Lights, Inc. | DEP force control and electrowetting control in different sections of the same microfluidic apparatus |
| US11084062B2 (en) * | 2015-11-02 | 2021-08-10 | Koninklijke Philips N.V. | Ultrasound transducer array, probe and system |
-
2017
- 2017-12-21 US US16/471,997 patent/US11864947B2/en active Active
- 2017-12-21 JP JP2019533553A patent/JP6998379B2/ja active Active
- 2017-12-21 CN CN201780079840.3A patent/CN110100294B/zh active Active
- 2017-12-21 WO PCT/EP2017/083996 patent/WO2018115226A1/en not_active Ceased
- 2017-12-21 EP EP17821912.7A patent/EP3559972B1/en active Active
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