JP5603728B2 - 圧電振動子 - Google Patents

圧電振動子 Download PDF

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Publication number
JP5603728B2
JP5603728B2 JP2010220621A JP2010220621A JP5603728B2 JP 5603728 B2 JP5603728 B2 JP 5603728B2 JP 2010220621 A JP2010220621 A JP 2010220621A JP 2010220621 A JP2010220621 A JP 2010220621A JP 5603728 B2 JP5603728 B2 JP 5603728B2
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Japan
Prior art keywords
piezoelectric
electrode
piezoelectric diaphragm
support arm
wiring
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Active
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JP2010220621A
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English (en)
Japanese (ja)
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JP2012080166A (ja
JP2012080166A5 (enExample
Inventor
勝也 水本
剛史 西塚
佑亮 山形
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
River Eletec Corp
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River Eletec Corp
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Priority to JP2010220621A priority Critical patent/JP5603728B2/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010220621A 2010-09-30 2010-09-30 圧電振動子 Active JP5603728B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010220621A JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010220621A JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

Publications (3)

Publication Number Publication Date
JP2012080166A JP2012080166A (ja) 2012-04-19
JP2012080166A5 JP2012080166A5 (enExample) 2013-11-14
JP5603728B2 true JP5603728B2 (ja) 2014-10-08

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ID=46239954

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JP2010220621A Active JP5603728B2 (ja) 2010-09-30 2010-09-30 圧電振動子

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JP (1) JP5603728B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
WO2016158048A1 (ja) 2015-03-31 2016-10-06 株式会社村田製作所 共振子
WO2016158045A1 (ja) * 2015-03-31 2016-10-06 株式会社村田製作所 共振子
US10938375B2 (en) 2015-03-31 2021-03-02 Murata Manufacturing Co, Ltd. Resonator
US10778182B2 (en) 2015-03-31 2020-09-15 Murata Manufacturing Co., Ltd. Resonator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931889B2 (ja) * 1976-10-18 1984-08-04 セイコーインスツルメンツ株式会社 圧電振動子
JPS55130416U (enExample) * 1979-03-12 1980-09-16
JPH03130620U (enExample) * 1990-04-13 1991-12-27

Also Published As

Publication number Publication date
JP2012080166A (ja) 2012-04-19

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