JP2012210051A5 - - Google Patents
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- Publication number
- JP2012210051A5 JP2012210051A5 JP2011073558A JP2011073558A JP2012210051A5 JP 2012210051 A5 JP2012210051 A5 JP 2012210051A5 JP 2011073558 A JP2011073558 A JP 2011073558A JP 2011073558 A JP2011073558 A JP 2011073558A JP 2012210051 A5 JP2012210051 A5 JP 2012210051A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- length
- actuator according
- support portion
- approximately
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011073558A JP5776269B2 (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011073558A JP5776269B2 (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015133338A Division JP6107894B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電アクチュエーター、ロボット及びロボットハンド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012210051A JP2012210051A (ja) | 2012-10-25 |
| JP2012210051A5 true JP2012210051A5 (enExample) | 2014-04-03 |
| JP5776269B2 JP5776269B2 (ja) | 2015-09-09 |
Family
ID=47189359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011073558A Active JP5776269B2 (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5776269B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102177156B1 (ko) | 2014-03-10 | 2020-11-10 | 삼성전자주식회사 | 로봇 및 그를 구비한 기판 처리 장치 |
| CN106415423B (zh) | 2014-07-10 | 2021-01-01 | 伊莱克斯公司 | 用于检测机器人清洁装置的测量误差的方法 |
| TWI683959B (zh) | 2016-09-05 | 2020-02-01 | 研能科技股份有限公司 | 壓電致動器及其所適用之微型流體控制裝置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1561518B1 (en) * | 2002-11-12 | 2011-10-05 | Seiko Epson Corporation | Piezoelectric vibrator, production method therefor, and equipment provided with this piezoelectric vibrator |
| JP2005237102A (ja) * | 2004-02-19 | 2005-09-02 | Seiko Epson Corp | 圧電アクチュエータ、時計及び電子機器 |
| JP2006081237A (ja) * | 2004-09-07 | 2006-03-23 | Seiko Epson Corp | 超音波モータの駆動回路およびアクチュエータ |
| JP4043497B2 (ja) * | 2006-06-14 | 2008-02-06 | シャープ株式会社 | 超音波振動子の振動特性の調整方法およびそれに用いられる超音波振動子 |
| JP2009254198A (ja) * | 2008-04-10 | 2009-10-29 | Sharp Corp | 超音波モータおよび超音波振動子 |
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2011
- 2011-03-29 JP JP2011073558A patent/JP5776269B2/ja active Active