JP2012210053A5 - - Google Patents
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- Publication number
- JP2012210053A5 JP2012210053A5 JP2011073560A JP2011073560A JP2012210053A5 JP 2012210053 A5 JP2012210053 A5 JP 2012210053A5 JP 2011073560 A JP2011073560 A JP 2011073560A JP 2011073560 A JP2011073560 A JP 2011073560A JP 2012210053 A5 JP2012210053 A5 JP 2012210053A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- length
- actuator according
- protrusion
- imaginary line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011073560A JP2012210053A (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011073560A JP2012210053A (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012210053A JP2012210053A (ja) | 2012-10-25 |
| JP2012210053A5 true JP2012210053A5 (enExample) | 2014-04-03 |
Family
ID=47189360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011073560A Withdrawn JP2012210053A (ja) | 2011-03-29 | 2011-03-29 | 圧電アクチュエーター、ロボット及びロボットハンド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012210053A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5978907B2 (ja) * | 2012-10-12 | 2016-08-24 | セイコーエプソン株式会社 | 圧電アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置 |
| KR102177156B1 (ko) | 2014-03-10 | 2020-11-10 | 삼성전자주식회사 | 로봇 및 그를 구비한 기판 처리 장치 |
| JP6269222B2 (ja) * | 2014-03-20 | 2018-01-31 | セイコーエプソン株式会社 | 圧電モーター |
| JP7314713B2 (ja) | 2019-08-21 | 2023-07-26 | セイコーエプソン株式会社 | 圧電駆動装置およびロボット |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001286167A (ja) * | 2000-03-30 | 2001-10-12 | Seiko Epson Corp | 圧電アクチュエータの調整方法および圧電アクチュエータ |
| JP2005237102A (ja) * | 2004-02-19 | 2005-09-02 | Seiko Epson Corp | 圧電アクチュエータ、時計及び電子機器 |
| JP4218666B2 (ja) * | 2005-07-21 | 2009-02-04 | セイコーエプソン株式会社 | 圧電アクチュエータ、および電子機器 |
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2011
- 2011-03-29 JP JP2011073560A patent/JP2012210053A/ja not_active Withdrawn